公开(公告)号：US20110163395A1

公开(公告)日：2011-07-07

申请号：US12651623

申请日：2010-01-04

Applicant: Thoralf Kautzsch ,  Marco Müller ,  Dirk Meinhold ,  Ben Rosam ,  Klaus Elian ,  Stefan Kolb

Inventor： Thoralf Kautzsch ,  Marco Müller ,  Dirk Meinhold ,  Ben Rosam ,  Klaus Elian ,  Stefan Kolb

IPC: H01L29/84 ,  H01L21/78

CPC classification number: B81C1/00071 ,  B81B2201/0264 ,  G01L9/0042

Abstract: A method for providing a pressure sensor substrate comprises creating a first cavity that extends inside the substrate in a first direction perpendicular to a main surface of the substrate, and that extends inside the substrate, in a second direction perpendicular to the first direction, into a first venting area of the substrate; creating a second cavity that extends in the first direction inside the substrate, that extends in parallel to the first cavity in the second direction, and that does not extend into the first venting area; and opening the first cavity in the first venting area.

Abstract translation: 一种用于提供压力传感器基板的方法包括：在垂直于基板的主表面的第一方向上形成在基板内延伸的第一空腔，并且在垂直于第一方向的第二方向上延伸到基板的内部， 基板的第一通气区域; 形成第二空腔，该第二空腔沿第一方向在基板内延伸，该第二空腔在第二方向上平行于第一空腔延伸，并且不延伸到第一排气区域; 并打开第一个通风区域的第一个空腔。