公开(公告)号：US08278727B2

公开(公告)日：2012-10-02

申请号：US12651623

申请日：2010-01-04

Applicant: Thoralf Kautzsch ,  Marco Müller ,  Dirk Meinhold ,  Ben Rosam ,  Klaus Elian ,  Stefan Kolb

Inventor： Thoralf Kautzsch ,  Marco Müller ,  Dirk Meinhold ,  Ben Rosam ,  Klaus Elian ,  Stefan Kolb

IPC: G01L9/00

CPC classification number: B81C1/00071 ,  B81B2201/0264 ,  G01L9/0042

Abstract: A method for providing a pressure sensor substrate comprises creating a first cavity that extends inside the substrate in a first direction perpendicular to a main surface of the substrate, and that extends inside the substrate, in a second direction perpendicular to the first direction, into a first venting area of the substrate; creating a second cavity that extends in the first direction inside the substrate, that extends in parallel to the first cavity in the second direction, and that does not extend into the first venting area; and opening the first cavity in the first venting area.

Abstract translation: 一种用于提供压力传感器基板的方法包括：在垂直于基板的主表面的第一方向上形成在基板内延伸的第一空腔，并且在垂直于第一方向的第二方向上延伸到基板的内部， 基板的第一通气区域; 形成第二空腔，该第二空腔沿第一方向在基板内延伸，该第二空腔在第二方向上平行于第一空腔延伸，并且不延伸到第一排气区域; 并打开第一个通风区域的第一个空腔。

公开(公告)号：US06450787B1

公开(公告)日：2002-09-17

申请号：US09622386

申请日：2001-01-25

Applicant: Stephan Risch ,  Axel Hinz ,  Hans-Dieter Reinartz ,  Helmut Steffes ,  Georg Sonnenschein ,  Marco Müller ,  Günther Vogel ,  Uwe Greiff ,  Christoph Wagner ,  Joachim Böing

Inventor： Stephan Risch ,  Axel Hinz ,  Hans-Dieter Reinartz ,  Helmut Steffes ,  Georg Sonnenschein ,  Marco Müller ,  Günther Vogel ,  Uwe Greiff ,  Christoph Wagner ,  Joachim Böing

IPC: F04B3910

CPC classification number: F04B53/109 ,  B60T8/4031 ,  F04B1/0421 ,  F04B1/0452

Abstract: In a piston pump, in particular, for the pressure fluid conveyance in hydraulic, slip-controlled brake systems, comprising at least one piston, a suction valve and a pressure valve, it will be possible for the suction and pressure valves to be externally checked in that the suction valve and the pressure valve are formed on a structural unit adapted to be separately handled. Preferably, the structural unit comprises a sleeve-type section in which the piston is guided.

Abstract translation: 特别地，在活塞泵中，对于包括至少一个活塞，吸入阀和压力阀的液压，滑动控制制动系统中的压力流体输送，可以从外部检查吸入和压力阀 因为吸入阀和压力阀形成在适于单独处理的结构单元上。 优选地，结构单元包括其中活塞被引导的套筒型部分。

公开(公告)号：US20110163395A1

公开(公告)日：2011-07-07

申请号：US12651623

申请日：2010-01-04

Applicant: Thoralf Kautzsch ,  Marco Müller ,  Dirk Meinhold ,  Ben Rosam ,  Klaus Elian ,  Stefan Kolb

Inventor： Thoralf Kautzsch ,  Marco Müller ,  Dirk Meinhold ,  Ben Rosam ,  Klaus Elian ,  Stefan Kolb

IPC: H01L29/84 ,  H01L21/78

CPC classification number: B81C1/00071 ,  B81B2201/0264 ,  G01L9/0042

Abstract: A method for providing a pressure sensor substrate comprises creating a first cavity that extends inside the substrate in a first direction perpendicular to a main surface of the substrate, and that extends inside the substrate, in a second direction perpendicular to the first direction, into a first venting area of the substrate; creating a second cavity that extends in the first direction inside the substrate, that extends in parallel to the first cavity in the second direction, and that does not extend into the first venting area; and opening the first cavity in the first venting area.

Abstract translation: 一种用于提供压力传感器基板的方法包括：在垂直于基板的主表面的第一方向上形成在基板内延伸的第一空腔，并且在垂直于第一方向的第二方向上延伸到基板的内部， 基板的第一通气区域; 形成第二空腔，该第二空腔沿第一方向在基板内延伸，该第二空腔在第二方向上平行于第一空腔延伸，并且不延伸到第一排气区域; 并打开第一个通风区域的第一个空腔。