公开(公告)号：US20050051606A1

公开(公告)日：2005-03-10

申请号：US10657085

申请日：2003-09-09

申请人： Rene Perrot ,  Thomas Hunt ,  Holger Koenigsmann ,  Paul Gilman

发明人： Rene Perrot ,  Thomas Hunt ,  Holger Koenigsmann ,  Paul Gilman

IPC分类号： B23K20/02 ,  C23C14/34 ,  B23K31/02

CPC分类号： B23K20/023 ,  C23C14/3407

摘要： Provided is a method of manufacturing sputter target assemblies, and the products thereof. The method includes manufacturing a backing plate, the backing plate having a planar top surface and a cylindrical recess therein. Then a near final shape target insert having a frusta-conical rear surface that corresponds to the cylindrical recess of the backing plate and a front surface is manufactured. The target insert has a yield strength greater than that of the backing plate, and a height greater than the depth of the cylindrical recess in the backing plate. Thereafter, the target insert is hot pressed into the cylindrical recess of the backing plate to a state of plastic deformation so as to diffusion bond the target insert to the backing plate and form the target assembly. The target insert protrudes above the planar front surface of the backing plate.

摘要翻译： 提供了制造溅射靶组件及其产品的方法。 该方法包括制造背板，背板具有平坦的顶表面和其中的圆柱形凹部。 然后制造具有对应于背板的圆柱形凹部和前表面的截头圆锥形后表面的近最终形状目标插入件。 目标刀片的屈服强度大于背板的屈服强度，高度大于背板中圆柱形凹槽的深度。 此后，将目标插入件热压到背板的圆柱形凹槽中以形成塑性变形的状态，从而将目标插件扩散连接到背板并形成目标组件。 目标插入件突出在背板的平面前表面上方。