公开(公告)号：US20100055857A1

公开(公告)日：2010-03-04

申请号：US12334492

申请日：2008-12-14

Applicant: Wei-Chieh Lin ,  Hsin-Yu Hsu ,  Hsin-Yen Chiu ,  Shih-Chieh Hung ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Li-Cheng Lin

Inventor： Wei-Chieh Lin ,  Hsin-Yu Hsu ,  Hsin-Yen Chiu ,  Shih-Chieh Hung ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Li-Cheng Lin

IPC: H01L21/336

CPC classification number: H01L29/7813 ,  H01L21/26586 ,  H01L29/4236 ,  H01L29/456 ,  H01L29/66734

Abstract: A method of forming a power device includes providing a substrate, a semiconductor layer having at least a trench and being disposed on the substrate, a gate insulating layer covering the semiconductor layer, and a conductive material disposed in the trench, performing an ion implantation process to from a body layer, performing a tilted ion implantation process to from a heavy doped region, forming a first dielectric layer overall, performing a chemical mechanical polishing process until the body layer disposed under the heavy doped region is exposed to form source regions on the opposite sides of the trench, and forming a source trace directly covering the source regions disposed on the opposite sides of the trench.

Abstract translation: 一种形成功率器件的方法包括提供衬底，至少具有沟槽并设置在衬底上的半导体层，覆盖半导体层的栅极绝缘层和设置在沟槽中的导电材料，执行离子注入工艺 从体层进行倾斜的离子注入工艺，从重掺杂区域进行倾斜的离子注入工艺，整体形成第一介电层，进行化学机械抛光工艺，直到布置在重掺杂区域之下的体层露出，形成源区 并且形成直接覆盖设置在沟槽的相对侧上的源极区域的源极迹线。