公开(公告)号：US06592673B2

公开(公告)日：2003-07-15

申请号：US09322102

申请日：1999-05-27

Applicant: Michael D. Welch ,  Harald Herchen

Inventor： Michael D. Welch ,  Harald Herchen

IPC: B05C1100

CPC classification number: H01L21/67259

Abstract: A chamber 25 comprises a support 45 for holding a substrate 20 and a sensor system 135 adapted to detect the presence or proper placement of the substrate 20 on the support 45. The support 45 comprises a window 155 that is transparent and adapted to transmit light therethrough. The sensor system 135 comprises a light source 140 adapted to direct a light beam 150 through the window 155 and a light sensor 160 in the path of the light beam 150. The light beam 150 is sensed by the light sensor 135 when the substrate 20 is properly positioned and the light beam 150 is blocked from the light sensor 135 when the substrate 20 is improperly positioned or vice versa. Preferably, the support 45 comprises an electrostatic chuck 55 adapted to electrostatically hold the substrate 20, the electrostatic chuck 55 comprising a window 155 composed of transparent material or a cut-out or a hole therein.

Abstract translation: 腔室25包括用于保持衬底20的支撑件45和适于检测衬底20在支撑件45上的存在或适当放置的传感器系统135.支撑件45包括透明的窗口155，其适于透射光 。 传感器系统135包括适于将光束150引导通过窗口155的光源140和在光束150的路径中的光传感器160.当基底20是基底20时，光束150被光传感器135感测 正确地定位，并且当基板20被不正确地定位时反射光束150并且光束150被阻挡在光传感器135上。 优选地，支撑件45包括适于静电保持基板20的静电卡盘55，静电卡盘55包括由透明材料构成的窗口155或其中的切口或孔。