公开(公告)号：US07226510B2

公开(公告)日：2007-06-05

申请号：US10964723

申请日：2004-10-15

申请人： Tetsu Miyoshi

发明人： Tetsu Miyoshi

IPC分类号： B05C11/10

CPC分类号： C23C24/04

摘要： In a film forming apparatus according to the aerosol deposition method, the thickness of a structure being formed can be controlled accurately. The film forming apparatus includes an aerosol generating part in which raw material powder is to be provided, a compressed gas cylinder and a pressure regulating part for introducing a gas into the aerosol generating part to blow up the raw material powder thereby generating an aerosol, a substrate holder for holding a substrate on which a structure is to be formed, a nozzle for spraying the aerosol generated in the aerosol generating part toward the substrate, and a sensor to be used for obtaining an amount of primary particles that have contributed to film formation by impinging on the substrate or the structure formed thereon from among the raw material powder contained in the aerosol sprayed from the nozzle.

摘要翻译： 在根据气溶胶沉积法的成膜装置中，可以精确地控制正在形成的结构的厚度。 成膜装置包括将要设置原料粉末的气溶胶发生部分，压缩气瓶和用于将气体引入气溶胶发生部分的压力调节部分，以使原料粉末膨胀从而产生气溶胶， 用于保持要在其上形成结构的基板的基板保持器，用于将在气溶胶发生部分中产生的气溶胶喷射到基板的喷嘴和用于获得有助于成膜的一次粒子的量的传感器 通过从从喷嘴喷射的气溶胶中包含的原料粉末中的基材或其上形成的结构物撞击。

公开(公告)号：US20070094856A1

公开(公告)日：2007-05-03

申请号：US11564146

申请日：2006-11-28

申请人： Tetsu MIYOSHI

发明人： Tetsu MIYOSHI

IPC分类号： H04R17/00

CPC分类号： H01L41/27 ,  B06B1/064 ,  H01L41/0472 ,  H01L41/083 ,  H01L41/273 ,  H01L41/293 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49128

摘要： An array of piezoelectric elements is easily manufactured by making insulating portions at side surfaces smaller. The piezoelectric element includes: a multilayered structure in which piezoelectric material layers and internal electrode layers are alternately stacked; first insulating films formed by using an AD method, for covering a first group of internal electrode layers at a first surface of the multilayered structure; second insulating films formed by using the AD method, for covering a second group of internal electrode layers at a second surface of the multilayered structure; a first external electrode connected to the second group of internal electrode layers and insulated from the first group of internal electrode layers at the first surface; and a second external electrode connected to the first group of internal electrode layers and insulated from the second group of internal electrode layers at the second surface.

摘要翻译： 通过使侧面的绝缘部较小，容易制造压电元件阵列。 压电元件包括​​：多层结构，其中压电材料层和内部电极层交替堆叠; 通过使用AD方法形成的第一绝缘膜，用于在所述多层结构的第一表面处覆盖第一组内部电极层; 通过使用AD方法形成的第二绝缘膜，用于在多层结构的第二表面处覆盖第二组内部电极层; 第一外部电极，连接到所述第二组内部电极层，并在所述第一表面与所述第一组内部电极层绝缘; 以及第二外部电极，其连接到所述第一组内部电极层并且在所述第二表面处与所述第二组内部电极层绝缘。