公开(公告)号：US11638931B2

公开(公告)日：2023-05-02

申请号：US16680956

申请日：2019-11-12

Applicant: BFLY OPERATIONS, INC.

Inventor： Keith G. Fife ,  Lingyun Miao ,  Jianwei Liu ,  Jonathan M. Rothberg

IPC: B81B7/00 ,  B06B1/02 ,  B81C1/00 ,  A61B8/00

Abstract: A method of forming an ultrasonic transducer device includes bonding a membrane to seal a transducer cavity with at least a portion of a getter material layer being exposed, the getter material layer comprising a portion of a bilayer stack compatible for use in damascene processing.

公开(公告)号：US11583894B2

公开(公告)日：2023-02-21

申请号：US16683750

申请日：2019-11-14

Applicant: BFLY OPERATIONS, INC.

Inventor： Lingyun Miao ,  Jianwei Liu ,  Keith G. Fife

IPC: B06B1/00 ,  B06B1/02 ,  B81B3/00 ,  B81C1/00

Abstract: A method of forming an ultrasonic transducer device includes forming and patterning a film stack over a substrate, the film stack comprising a metal electrode layer and a chemical mechanical polishing (CMP) stop layer formed over the metal electrode layer; forming an insulation layer over the patterned film stack; planarizing the insulation layer to the CMP stop layer; measuring a remaining thickness of the CMP stop layer; and forming a membrane support layer over the patterned film stack, wherein the membrane support layer is formed at thickness dependent upon the measured remaining thickness of the CMP stop layer, such that a combined thickness of the CMP stop layer and the membrane support layer corresponds to a desired transducer cavity depth.