Micromachined ultrasonic transducer cells having compliant support structure
    21.
    发明申请
    Micromachined ultrasonic transducer cells having compliant support structure 有权
    具有顺应性支撑结构的微加工超声换能器单元

    公开(公告)号:US20050146240A1

    公开(公告)日:2005-07-07

    申请号:US10748920

    申请日:2003-12-29

    CPC分类号: B06B1/0292 H02N1/006

    摘要: A micromachined ultrasonic transducer array comprising a multiplicity of cMUT cells built on a substrate. Each cMUT cell comprises a compliant support structure built on the substrate, a membrane supported over a cavity by the compliant support structure, a first electrode supported by the membrane, and a second electrode that forms a capacitor with the first electrode, the cavity being disposed between the first and second electrodes. The compliant support structure uncouples the non-membrane outer surface of each cMUT cell from the supporting substrate.

    摘要翻译: 一种微机械加工的超声波换能器阵列,其包括建立在基底上的多个cMUT电池。 每个cMUT单元包括构建在基板上的柔性支撑结构,由柔性支撑结构支撑在空腔上的膜,由膜支撑的第一电极,以及与第一电极形成电容器的第二电极, 在第一和第二电极之间。 顺应性支撑结构将每个cMUT电池的非膜外表面与支撑衬底断开。

    ULTRASOUND TRANSDUCER WITH IMPROVED ACOUSTIC PERFORMANCE
    23.
    发明申请
    ULTRASOUND TRANSDUCER WITH IMPROVED ACOUSTIC PERFORMANCE 有权
    超声波传感器具有改进的声音性能

    公开(公告)号:US20100317972A1

    公开(公告)日:2010-12-16

    申请号:US12485226

    申请日:2009-06-16

    IPC分类号: A61B8/14

    摘要: A system for improving the acoustic performance of an ultrasound transducer by reducing artifacts within the acoustic spectrum is disclosed. The system includes an acoustic layer having an array of acoustic elements, a dematching layer coupled to the acoustic layer and having an acoustic impedance greater than an acoustic impedance of the acoustic layer, and an interposer layer coupled to the dematching layer and comprising a substrate and a plurality of conductive element. The interposer layer is formed to have an acoustic impedance lower than the acoustic impedance of the dematching layer. The ultrasound transducer also includes an integrated circuit coupled to the interposer layer and electrically connected to the array of acoustic elements through the dematching layer and the interposer layer.

    摘要翻译: 公开了一种通过减少声谱内的伪像来改善超声换能器的声学性能的系统。 该系统包括具有声学元件阵列的声学层,耦合到声学层并且具有大于声学层的声学阻抗的声阻抗的解映射层,以及耦合到分离层的中介层,并且包括衬底和 多个导电元件。 内插层形成为具有低于分配层的声阻抗的声阻抗。 超声波换能器还包括耦合到插入层的集成电路,并通过分配层和插入层电连接到声学元件阵列。