公开(公告)号：US09564447B1

公开(公告)日：2017-02-07

申请号：US14842345

申请日：2015-09-01

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Suraj K. Patil ,  Ajey P. Jacob ,  Min-hwa Chi

IPC: H01L27/112 ,  G11C13/00

CPC classification number: H01L27/11206 ,  G11C13/0002 ,  G11C13/0009 ,  G11C13/0069 ,  G11C13/025 ,  G11C2013/008 ,  H01L23/5256 ,  H01L23/53276 ,  H01L27/112 ,  H01L29/0676 ,  H01L29/413

Abstract: Methods and structures for programmable device fabrication are provided. The methods for fabricating a programmable device include, for example forming at least one via opening in a layer of the programmable device and providing a catalyzing material over a lower surface of the at least one via opening; forming a plurality of nanowires or nanotubes in the at least one via opening using the catalyzing material as a catalyst for the forming of the plurality of nanowires or nanotubes; and providing a dielectric material in the at least one via opening so that the dielectric material surrounds the plurality of nanowires or nanotubes. The programmable device may, in subsequent or separate programming steps, have programming of the programmable device made permanent via thermal oxidation of the dielectric material and the plurality of nanowires or nanotubes, leaving a non-conducting material behind in the at least one via opening.

Abstract translation: 提供了可编程器件制造的方法和结构。 制造可编程装置的方法包括例如在可编程装置的层中形成至少一个通孔，并在至少一个通孔开口的下表面上提供催化材料; 在所述至少一个通孔开口中使用所述催化材料形成多个纳米线或纳米管作为用于形成所述多个纳米线或纳米管的催化剂; 以及在所述至少一个通孔开口中提供介电材料，使得所述电介质材料包围所述多个纳米线或纳米管。 可编程设备在随后或单独的编程步骤中可以通过介电材料和多个纳米线或纳米管的热氧化使可编程器件的编程永久化，在至少一个通孔开口之后留下非导电材料。