公开(公告)号：US5247165A

公开(公告)日：1993-09-21

申请号：US898422

申请日：1992-06-15

申请人： Akitaka Hiruta ,  Kayoko Taniguchi ,  Takao Yukawa

发明人： Akitaka Hiruta ,  Kayoko Taniguchi ,  Takao Yukawa

IPC分类号： G01B11/02

CPC分类号： G01B11/026

摘要： A displacement detecting apparatus comprises a non-contacting sensor for detecting a displacement of a measured surface, a linear scale unitarily attached to the non-contacting sensor through a coupling member, a graduation read-out device for reading out a graduation of the linear scale, an actuator for moving the non-contacting sensor and the linear scale, and a servo control circuit for driving the actuator, wherein the linear scale and the non-contacting sensor are moved by the actuator in unison with each other. Thus, the displacement of the measured surface can be detected with high accuracy.

摘要翻译： 位移检测装置包括用于检测测量表面的位移的非接触传感器，通过联接构件一体地附接到非接触传感器的线性刻度，用于读出线性刻度刻度的刻度读出装置 ，用于移动非接触式传感器和线性标尺的致动器，以及用于驱动致动器的伺服控制电路，其中线性标尺和非接触式传感器由致动器彼此一致地移动。 因此，可以高精度地检测测量表面的位移。

公开(公告)号：US5225918A

公开(公告)日：1993-07-06

申请号：US731323

申请日：1991-07-17

申请人： Kayoko Taniguchi ,  Hideki Tsuchiya

发明人： Kayoko Taniguchi ,  Hideki Tsuchiya

IPC分类号： G01D5/347 ,  G03H1/04 ,  G03H1/20 ,  G03H1/26

CPC分类号： G03H1/20 ,  G01D5/34707 ,  G03H1/04 ,  G03H1/26

摘要： An apparatus for making a hologram scale is comprised of a reference diffraction grating on which a light becomes incident and from or by which the incident light is emitted or reflected as a diffracted light, and a recording material, wherein at least two diffracted lights of the diffracted light are caused to interfere with each other as an object wave and a reference wave so as to form a hologram scale on the recording material. Further, an apparatus for making an assembled hologram scale, a hologram scale, an assembled hologram scale and a moving member having a hologram scale are also provided.

摘要翻译： 用于制造全息图刻度的装置包括：入射光的参考衍射光栅，入射光或衍射光被入射或被入射的光;以及记录材料，其中至少两个衍射光 使衍射光作为对象波和参考波相互干扰，以在记录材料上形成全息图。 此外，还提供了一种用于制造组装的全息图刻度，全息图刻度，组装的全息图标尺和具有全息图刻度的移动部件的装置。