公开(公告)号：US20090097106A1

公开(公告)日：2009-04-16

申请号：US12238778

申请日：2008-09-26

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G02B17/00 ,  G03B27/54

CPC分类号： G03F7/70233 ,  G02B13/18 ,  G02B17/0657 ,  G03F7/70275

摘要： A reflective-type projection optical system has 8 reflective mirrors that form a reduced image of a first surface on a second surface. A first reflective imaging optical system (G1) forms an intermediate image of the first surfaces and a second reflective imaging optical system (G2) forms an image of the intermediate image on the second surface. The first reflective imaging optical system has, from the first surface side in order of light beam incidence, a first reflective mirror (M1), a second reflective mirror (M2), a third reflective mirror (M3), and a fourth reflective mirror (M4). The second reflective imaging optical system has, from the first surface side in order of light beam incidence, a fifth reflective mirror (M5), a sixth reflective mirror (M6), a seventh reflective mirror (M7), and an eighth reflective mirror (M8). At least one of the reflective surfaces of these 8 reflective mirrors is composed of a spherical surface.

摘要翻译： 反射型投影光学系统具有8个反射镜，其形成第二表面上的第一表面的缩小图像。 第一反射成像光学系统（G1）形成第一表面的中间图像，第二反射成像光学系统（G2）在第二表面上形成中间图像的图像。 第一反射成像光学系统从第一表面侧按照光束入射的顺序，具有第一反射镜（M1），第二反射镜（M2），第三反射镜（M3）和第四反射镜 M4）。 第二反射成像光学系统从第一表面侧按照光束入射的顺序具有第五反射镜（M5），第六反射镜（M6），第七反射镜（M7）和第八反射镜（ M8）。 这8个反射镜的至少一个反射表面由球面组成。

公开(公告)号：US20060262277A1

公开(公告)日：2006-11-23

申请号：US11353005

申请日：2006-02-14

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G03B21/26

CPC分类号： G03F7/70233 ,  G02B17/0657 ,  G03F7/70275

摘要： A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The eight reflecting mirrors (M1˜M8) form a reduced image of a first surface on a second surface. A first reflecting image forming optical system (G1) forms a first intermediate image (IMI1) of the first surface based on light from the first surface, a second reflecting image forming optical system (G2) forms a second intermediate image (IMI2) of the first surface based on light from the first intermediate image, and a third reflecting image forming optical system (G3) forms a reduced image on the second surface based on light from the second intermediate image. The number of reflecting mirrors (M6˜M8) comprising the third reflecting image forming optical system is greater than the number of reflecting mirrors (M1, M2) comprising the first reflecting image forming optical system.

摘要翻译： 投影光学系统具有至少八个反射镜，并且在径向上相对紧凑。 八个反射镜（M 1〜M 8）形成第二表面上的第一表面的缩小图像。 第一反射成像光学系统（G 1）基于来自第一表面的光形成第一表面的第一中间图像（IMI 1），第二反射成像光学系统（G 2）形成第二中间图像（IMI 基于来自第一中间图像的光，第三反射图像形成光学系统（G 3），基于来自第二中间图像的光在第二表面上形成缩小图像。 包括第三反射成像光学系统的反射镜（M 6〜M 8）的数量大于包括第一反射成像光学系统的反射镜（M 1，M 2）的数量。

公开(公告)号：USRE39296E1

公开(公告)日：2006-09-19

申请号：US09659375

申请日：2000-09-08

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G02B17/08 ,  G03B27/42

摘要： Catadioptric projection systems are disclosed for projecting an illuminated region of a reticle onto a corresponding region on a substrate. The systems are preferably used with ultraviolet light sources (e.g., 193 nm). The systems comprise a first imaging system, a concave mirror, and a second imaging system. The first imaging system comprises a single-pass lens group and a double-pass lens group. The single-pass lens group comprises a first negative subgroup, a positive subgroup, and a second negative subgroup. Light from the illuminated region of the reticle passes through the single-pass lens group and the double-pass lens group, and reflects from the concave mirror to pass back through the double-pass lens group to form an intermediate image of the illuminated region of the reticle. The light is then directed to the second imaging system that re-images the illuminated region of the reticle on the substrate. Alternatively, light from the single-pass lens group is reflected by a turning mirror to the double-pass lens group, wherein the light returning through the double-pass lens group continues directly to the second imaging system.

摘要翻译： 折射率投影系统被公开用于将掩模版的照明区域投影到基板上的相应区域上。 该系统优选与紫外光源（例如193nm）一起使用。 该系统包括第一成像系统，凹面镜和第二成像系统。 第一成像系统包括单通透镜组和双透镜组。 单通透镜组包括第一负亚组，正亚组和第二负亚组。 来自掩模版的照明区域的光通过单通透镜组和双透镜组，并从凹面镜反射回通过双透镜组，以形成照明区域的中间图像 标线。 然后将光引导到第二成像系统，其重新对基板上的掩模版的照明区域进行再成像。 或者，来自单通透镜组的光被转向镜反射到双透镜组，其中通过双透镜组返回的光直接继续到第二成像系统。

公开(公告)号：US20060098273A1

公开(公告)日：2006-05-11

申请号：US11266201

申请日：2005-11-04

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G02B17/00

CPC分类号： G03F7/70233 ,  G02B13/18 ,  G02B17/0657 ,  G03F7/70275

摘要： A reflective-type projection optical system equipped with 8 reflective mirrors that forms a reduced image of a first surface on a second surface. It is equipped with a first reflective imaging optical system (G1) for forming an intermediate image of the first surface and a second reflective imaging optical system (G2) for forming an image of the intermediate image on the second surface. The first reflective imaging optical system has, from the first surface side in order of light beam incidence, a first reflective mirror (M1), a second reflective mirror (M2), a third reflective mirror (M3), and a fourth reflective mirror (M4). The second reflective imaging optical system has, from the first surface side in order of light beam incidence, a fifth reflective mirror (M5), a sixth reflective mirror (M6), a seventh reflective mirror (M7), and an eighth reflective mirror (M8). At least one of the reflective surfaces of these 8 reflective mirrors is composed of a spherical surface.

摘要翻译： 一种装有8个反射镜的反射式投影光学系统，其形成第二表面上的第一表面的缩小图像。 配备有用于形成第一表面的中间图像的第一反射成像光学系统（G 1）和用于在第二表面上形成中间图像的图像的第二反射成像光学系统（G 2）。 第一反射成像光学系统从第一表面侧按照光束入射的顺序具有第一反射镜（M 1），第二反射镜（M 2），第三反射镜（M 3）和第四反射镜 反光镜（M 4）。 第二反射成像光学系统从第一表面侧按照光束入射的顺序具有第五反射镜（M5），第六反射镜（M6），第七反射镜（M7）和第八反射镜 反光镜（M 8）。 这8个反射镜的至少一个反射表面由球面组成。

公开(公告)号：USRE38438E1

公开(公告)日：2004-02-24

申请号：US09766486

申请日：2001-01-19

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G02B2700

CPC分类号： G02B17/0892 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70358

摘要： A catadioptric projection optical system is provided, which can use a beam splitting optical system smaller in size than a conventional polarizing beam splitter, can set a long optical path from a concave reflecting mirror to an image plane, allows easy adjustment of the optical system, and has excellent imaging performance. A light beam from an object surface forms a first intermediate image through a refracting lens group. A light beam from the first intermediate image passes through a polarizing beam splitter and is reflected by a concave reflecting mirror to form a second intermediate image in the polarizing beam splitter. A light beam from the second intermediate image is reflected by the polarizing beam splitter means to form a final image on the image plane via a refracting lens group. The polarizing beam splitter means is arranged near the positions at which the intermediate images are formed.

公开(公告)号：US06172825B2

公开(公告)日：2001-01-09

申请号：US09398660

申请日：1999-09-17

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G02B510

CPC分类号： G03F7/70233 ,  G02B17/0657 ,  G03F7/7025 ,  G03F7/70275

摘要： A catoptric reduction projection optical system (100), a projection exposure apparatus (EX) and a method using same. The catoptric reduction projection optical system is capable of forming a reduced magnification image of an object present on a first surface (R) onto a third surface W. The system includes a first catoptric optical system (10) capable of forming an intermediate image of the object onto a second surface (IM) and comprises a first mirror pair having a first reflective mirror (M1) and a second reflective mirror (M2). The system also includes a second catoptric optical system (20) capable of imaging the intermediate image onto the third surface, and comprises a second mirror pair having a third reflective mirror (M3) with a concave reflective surface and a fourth reflective mirror (M4) with a reflective surface of a predetermined shape, and a third mirror pair having a fifth reflective mirror (M5) with a convex reflective surface and a sixth reflective mirror (M6) with a concave reflective surface. Light from the first surface forms the intermediate image on the second surface after reflecting from the first mirror pair. Then, the light from the intermediate image is reflected by the second mirror pair in the order of the third reflective mirror and the fourth reflective mirror. The light reflected by the second mirror pair is further reflected by the third mirror pair in the order of the fifth reflective mirror and the sixth reflective mirror. This light is then guided to the third surface.

摘要翻译： 折射减少投影光学系统（100），投影曝光装置（EX）及其使用方法。 折射减少投影光学系统能够将存在于第一表面（R）上的物体的放大倍率图像形成在第三表面W上。该系统包括能够形成第二表面的中间图像的第一反射光学系统（10） 物体在第二表面（IM）上并且包括具有第一反射镜（M1）和第二反射镜（M2）的第一反射镜对。 该系统还包括能够将中间图像成像到第三表面上的第二反射光学系统（20），并且包括具有带凹面反射表面的第三反射镜（M3）和第四反射镜（M4）的第二反射镜对， 具有预定形状的反射表面，以及具有带凸起反射表面的第五反射镜（M5）和具有凹面反射表面的第六反射镜（M6）的第三反射镜对。 来自第一表面的光在从第一镜对反射之后在第二表面上形成中间图像。 然后，来自中间图像的光以第三反射镜和第四反射镜的顺序被第二反射镜对反射。 由第二反射镜对反射的光被第五反射镜对以第五反射镜和第六反射镜的顺序进一步反射。 然后将该光引导到第三表面。

公开(公告)号：US4632519A

公开(公告)日：1986-12-30

申请号：US626989

申请日：1984-07-02

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G02B15/173 ,  G02B15/14

CPC分类号： G02B15/173

摘要： A zoom lens including a wide angle of view has, in succession from the object side, a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power and a fourth lens group of positive refractive power. When zooming is to be effected from the wide angle end to the telephoto end, the first lens group and the fourth lens group are monotonously moved toward the object side and at the same time, the third lens group is monotonously moved toward the object side by an amount of movement 0.4-0.8 time as great as the amount of movement of the first and fourth lens groups and the second lens group is moved toward the object side in the vicinity at least the wide angle end. The zoom lens satisfies the following condition: 4.5

摘要翻译： 包括宽视角的变焦透镜从物体侧连续地具有正屈光力的第一透镜组，负折射光焦度的第二透镜组，正折光力的第三透镜组和第四透镜组 正屈光力。 当从广角端到远摄端进行变焦时，第一透镜组和第四透镜组朝向物体侧单调移动，同时第三透镜组朝向物体侧单调移动 至少在广角端附近，第一和第四透镜组和第二透镜组的移动量的移动量的0.4-0.8倍的移动量在附近移动到物体侧。 变焦透镜满足以下条件：4.5

公开(公告)号：US07283206B2

公开(公告)日：2007-10-16

申请号：US11353005

申请日：2006-02-14

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G03B27/54 ,  G03B27/42 ,  G02B5/10

CPC分类号： G03F7/70233 ,  G02B17/0657 ,  G03F7/70275

摘要： A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The eight reflecting mirrors (M1˜M8) form a reduced image of a first surface on a second surface. A first reflecting image forming optical system (G1) forms a first intermediate image (IMI1) of the first surface based on light from the first surface, a second reflecting image forming optical system (G2) forms a second intermediate image (IMI2) of the first surface based on light from the first intermediate image, and a third reflecting image forming optical system (G3) forms a reduced image on the second surface based on light from the second intermediate image. The number of reflecting mirrors (M6˜M8) of the third reflecting image forming optical system is greater than the number of reflecting mirrors (M1, M2) of the first reflecting image forming optical system.

摘要翻译： 投影光学系统具有至少八个反射镜，并且在径向上相对紧凑。 八个反射镜（M 1〜M 8）形成第二表面上的第一表面的缩小图像。 第一反射成像光学系统（G 1）基于来自第一表面的光形成第一表面的第一中间图像（IMI 1），第二反射成像光学系统（G 2）形成第二中间图像（IMI 基于来自第一中间图像的光，第三反射图像形成光学系统（G 3），基于来自第二中间图像的光在第二表面上形成缩小图像。 第三反射成像光学系统的反射镜（M 6〜M 8）的数量大于第一反射成像光学系统的反射镜（M 1，M 2）的数量。

公开(公告)号：US20070046918A1

公开(公告)日：2007-03-01

申请号：US11508290

申请日：2006-08-23

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G03B27/54

CPC分类号： G03F7/70233 ,  G02B17/0657 ,  G03F7/70275

摘要： An 8-mirror reflecting type projection optical system. A first reflecting image forming optical system forms an intermediate image of a first surface and a second reflecting image forming optical system forms an image of that intermediate image on a second surface. The first reflecting image forming optical system has a first reflecting mirror M1, a second reflecting mirror M2, a third reflecting mirror M3, and a fourth reflecting mirror M4. The second reflecting image forming optical system has a fifth reflecting mirror M5, a sixth reflecting mirror M6, a seventh reflecting mirror M7, and an eighth reflecting mirror M8. The first reflecting mirror M1, the fourth reflecting mirror M4, the fifth reflecting mirror M5, and the eighth reflecting mirror M8 have concave reflecting surfaces, and the seventh reflecting mirror M7 has a convex reflecting surface. One of the second reflecting mirror M2 and the third reflecting mirror M3 has a concave reflecting surface, and the other has a convex reflecting surface. The width dimension of an arcuate effective image forming region is relatively large.

摘要翻译： 8镜反射型投影光学系统。 第一反射成像光学系统形成第一表面的中间图像，第二反射成像光学系统在第二表面上形成该中间图像的图像。 第一反射成像光学系统具有第一反射镜M 1，第二反射镜M 2，第三反射镜M 3和第四反射镜M 4.第二反射成像光学系统具有第五反射镜M 5，第六反射镜M 6，第七反射镜M7和第八反射镜M8。第一反射镜M 1，第四反射镜M 4，第五反射镜M 5和第八反射镜 M 8具有凹面反射面，第七反射镜M7具有凸面反射面。 第二反射镜M 2和第三反射镜M 3中的一个具有凹面反射面，另一方具有凸面反射面。 弧形有效图像形成区域的宽度尺寸相对较大。

公开(公告)号：US06867931B2

公开(公告)日：2005-03-15

申请号：US10086472

申请日：2002-02-28

申请人： Tomowaki Takahashi

发明人： Tomowaki Takahashi

IPC分类号： G02B17/08 ,  G03F7/20 ,  G02B17/00

CPC分类号： G02B17/0892 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275

摘要： An optical imaging system especially for microlithography includes a first imaging system forming an intermediate image of an object, and a second imaging system forming, on a surface, an image of the intermediate image. A reflective surface directs light from the first imaging system to the second imaging system. An aspherical corrective optical surface is located at or near the location of the intermediate image for correcting aberrations such as high-order distortion, aberrations due to accumulation of manufacturing tolerances, and spherical aberration. The first imaging system comprises a positive power refractive element and a concave mirror. The second imaging system comprises refractive elements and no concave mirror.

摘要翻译： 特别是用于微光刻的光学成像系统包括形成物体的中间图像的第一成像系统和在中间图像的表面上形成表面的第二成像系统。 反射表面将来自第一成像系统的光引导到第二成像系统。 非球面校正光学表面位于中间图像的位置处或附近，用于校正诸如高阶失真，由于制造公差的累积造成的像差和球面像差等像差。 第一成像系统包括正功率折射元件和凹面镜。 第二成像系统包括折射元件和无凹面镜。