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公开(公告)号：US06281557B1
公开(公告)日：2001-08-28
申请号：US09126173
申请日：1998-07-30
IPC分类号： H01L2976
CPC分类号： H01L27/11273 , H01L21/76224 , H01L27/112
摘要： A read-only memory cell array has vertical MOS transistors formed on trench walls, and is programmed with a programming mask which covers only the areas at which a transistor is not to be produced. As a result, the word lines can be formed with minimum grid spacing and the risk of short-circuiting between adjacent word lines is eliminated by buried ploy stringers.
摘要翻译： 只读存储单元阵列具有形成在沟槽壁上的垂直MOS晶体管，并且用仅覆盖晶体管不被产生的区域的编程掩模进行编程。 结果，字线可以以最小的网格间隔形成，并且相邻字线之间的短路的风险通过埋入的桁架桁架消除。
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公开(公告)号：US4865713A
公开(公告)日：1989-09-12
申请号：US185453
申请日：1988-04-25
CPC分类号： H01J37/3244 , C23C14/568
摘要： Thin layers are deposited on a substrate such as a silicon substrate in series of evacuatable chambers into each of which an inert gas is admitted. In the case of a reactive sputtering deposition, a reactive gas is also admitted. Contamination between neighboring chambers with the reactive gas is prevented, and the chambers are rapidly charged with new reactive gas to achieve a stable gas flow by providing an inlet system including a pair of shut-off valves, and a closable flow governor, the shut-off valves and the flow governor being actuated in synchronism.
摘要翻译： 薄层沉积在诸如硅衬底的衬底上，其中每个都可以容纳惰性气体。 在反应溅射沉积的情况下，也承认反应性气体。 防止相邻室与反应气体之间的污染，并且通过提供包括一对截止阀的入口系统和可关闭的流量调节器，闭合的流量调节器，快速充满新的反应气体以实现稳定的气体流动， 关闭阀和流量调节器被同步致动。
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