公开(公告)号：US20220107544A1

公开(公告)日：2022-04-07

申请号：US17553705

申请日：2021-12-16

Applicant: KLA Corporation

Inventor： Yung-Ho Alex Chuang ,  Yinying Xiao-Li ,  Elena Loginova ,  John Fielden ,  Baigang Zhang

IPC: G02F1/355 ,  G02F1/35

Abstract: An optical element includes Strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency converting stage of a laser assembly to generate laser output light having a wavelength in the range of 125 nm to 183 nm. One or more fundamental light beams having fundamental wavelengths between 1 and 1.1 μm are doubled and/or summed using multiple intermediate frequency conversion stages to generate one or more intermediate light beam frequencies (e.g., second through eighth harmonics, or sums thereof), and then the final frequency converting stage utilizes the optical element to either double a single intermediate light beam frequency or to sum two intermediate light beam frequencies to generate the desired laser output light at high power and photon energy levels. A method and inspection system incorporating the laser assembly is also described.

公开(公告)号：US11255797B2

公开(公告)日：2022-02-22

申请号：US16921738

申请日：2020-07-06

Applicant: KLA Corporation

Inventor： Yung-Ho Alex Chuang ,  Yinying Xiao-Li ,  Elena Loginova ,  John Fielden

IPC: G01N21/95 ,  G02B27/10 ,  G02B1/113 ,  G01N21/88 ,  G03F7/20 ,  G02B5/08 ,  G02B3/00 ,  G02B5/30

Abstract: Strontium tetraborate can be used as an optical material. Strontium tetraborate exhibits high refractive indices, high optical damage threshold, and high microhardness. The transmission window of strontium tetraborate covers a very broad range of wavelengths, from 130 nm to 3200 nm, making the material particularly useful at VUV wavelengths. An optical component made of strontium tetraborate can be incorporated in an optical system, such as a semiconductor inspection system, a metrology system, or a lithography system. These optical components may include mirrors, lenses, lens arrays, prisms, beam splitters, windows, lamp cells or Brewster-angle optics.

公开(公告)号：US10943760B2

公开(公告)日：2021-03-09

申请号：US16568110

申请日：2019-09-11

Applicant: KLA Corporation ,  National Institute of Advanced Industrial Science and Technology

Inventor： Yung-Ho Alex Chuang ,  Yinying Xiao-Li ,  Edgardo Garcia Berrios ,  John Fielden ,  Masayoshi Nagao

IPC: H01J37/073 ,  H01J37/28 ,  H01J37/317

Abstract: An electron gun for an electron microscope or similar device includes a field emitter cathode having a field emitter protrusion extending from the output surface of a monocrystalline silicon substrate, and electrodes configured to enhance the emission of electrons from a tip portion of the field emitter protrusion to generate a primary electron beam. A thin, contiguous SiC layer is disposed directly on at least the tip portion of the field emitter protrusion using a process that minimizes oxidation and defects in the SiC layer. Optional gate layers may be placed at, slightly lower than or slightly higher than the height of the field emitter tip portion to achieve high emission current and fast and accurate control of the primary emission beam. The field emitter can be p-type doped and configured to operate in a reverse bias mode, or the field emitter can be n-type doped.