公开(公告)号：US6091499A

公开(公告)日：2000-07-18

申请号：US291119

申请日：1999-04-14

Applicant: Michael Abraham ,  Oliver Depner ,  Matthias Eberhardt

Inventor： Michael Abraham ,  Oliver Depner ,  Matthias Eberhardt

IPC: G01B11/00 ,  G01B11/26 ,  G01J4/00 ,  G01J4/04 ,  G01N21/01 ,  G01N21/13 ,  G01N21/21 ,  G01B11/14

CPC classification number: G01B11/26 ,  G01J4/00

Abstract: Normally, repeated calibration measurements are necessary for the adjustment of the sample and ellipsometer. To achieve an automatic relative adjustment, a sample position detection system that can be adjusted in relation to the ellipsometer and locked in is assigned to the ellipsometer, and where the detection system is connected to an adjusting system that affects the sample table and/or the entire system detection system/ellipsometer. The method for automatic relative adjustment is provided for, that by initially using one sample, the system sample/ellipsometer is adjusted via the symmetry of the detector signal of the ellipsometer, and that the sample position detection system is adjusted and subsequently locked in with the ellipsometer. With all subsequent samples, a relative adjustment of sample and ellipsometer detection system is performed using the signals of the detection system. In particular, the measurements can be performed without moving the sample itself because the adjustment can also be carried out through a single movement of the ellipsometer detection system.

Abstract translation: 通常，重复的校准测量对于样品和椭偏仪的调整是必要的。 为了实现自动相对调整，可以将相对于椭偏仪调整并锁定的样本位置检测系统分配给椭偏仪，并且其中检测系统连接到影响样品台和/或 整个系统检测系统/椭偏仪。 提供了自动相对调整的方法，通过最初使用一个样本，通过椭偏仪的检测器信号的对称性来调整系统样品/椭偏仪，并且样品位置检测系统被调整并随后被锁定 椭偏仪。 对于所有后续样本，使用检测系统的信号执行样本和椭偏仪检测系统的相对调整。 特别地，可以在不移动样品本身的情况下进行测量，因为也可以通过椭偏仪检测系统的单次移动进行调整。

公开(公告)号：US5502567A

公开(公告)日：1996-03-26

申请号：US268149

申请日：1994-06-28

Applicant: Peter Pokrowsky ,  Eckehard Kiefer ,  Michael Abraham ,  Bernd Stenkamp ,  Wolfgang Ehrfeld ,  Thomas Zetterer

Inventor： Peter Pokrowsky ,  Eckehard Kiefer ,  Michael Abraham ,  Bernd Stenkamp ,  Wolfgang Ehrfeld ,  Thomas Zetterer

IPC: G01J4/04 ,  G01N21/21 ,  G01J4/00

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: A micropolarimeter comprises an analyzer (1) and a detector (3), which is typically a photodetector array. The detector has a circular configuration of a number N of sectors. Analyzer (1) and detector (3) form a unit with the analyzer assigning different polarization values to the sectors. Analyzer and the detector contain no moving parts. Three different embodiments are proposed for the analyzer: a glass cone, covered with a polarizing thin film stack, a metal grid polarizing array, and an array of polarizing waveguides. The micropolarimeter (14) is used preferably in a microellipsometer system which can serve as a tool for film diagnostics, especially optical characterization of thin films.

Abstract translation: 微波偏振器包括分析器（1）和检测器（3），其通常是光电检测器阵列。 检测器具有N个扇区的圆形配置。 分析仪（1）和检测器（3）形成一个单元，分析仪为扇区分配不同的极化值。 分析仪和检测器不含运动部件。 提出了三种不同的实施例用于分析器：玻璃锥，覆盖有偏振薄膜叠层，金属栅极偏振阵列和偏振波导阵列。 微电极计（14）优选地用在可以用作薄膜诊断工具，特别是薄膜的光学表征的微型计量器系统中。

公开(公告)号：US5134949A

公开(公告)日：1992-08-04

申请号：US563352

申请日：1990-08-07

Applicant: Zeev Almog ,  Michael Abraham ,  David Sela ,  Josef Ophir ,  Miron Rubinstein ,  Dan Rabin

Inventor： Zeev Almog ,  Michael Abraham ,  David Sela ,  Josef Ophir ,  Miron Rubinstein ,  Dan Rabin

IPC: B63B1/04 ,  F02B3/06

CPC classification number: B63B1/04 ,  F02B3/06

Abstract: A ship of the 50 ton class includes a deep-V hull shape which is a partially monohedron fully planing hull with a hand chine and two bottom risers, a water jet propulsion system cooperating with a motor, and control apparatus for controlling the motor and propulsion system. Preferably, the motor is a 16 cylinder marine diesel engine having a maximum speed of between about 1800 and 2100 rpm and a maximum power of about 1900 kW, while the water jet is a high speed, high rpm water jet having a maximum water jet speed of between about 1400 and 1600 rpm, the water jet coupled to the motor by means of a reduction gear between about 1:1.15 and 1:1.

Abstract translation: 50吨级的船包括深V型船体形状，它是部分单面完全刨平的船体，其具有手中和两个底部立管，与马达配合的喷水推进系统，以及用于控制马达和推进的控制装置 系统。 优选地，电动机是16缸船用柴油发动机，其最大速度为约1800至2100rpm，最大功率为约1900kW，而水射流为具有最大喷水速度的高速，高转速水喷射 在约1400和1600rpm之间，水流通过约1:1.15和1:1之间的减速齿轮耦合到马达。