Exposure apparatus, exposure method, and exposure system
    21.
    发明授权
    Exposure apparatus, exposure method, and exposure system 失效
    曝光装置,曝光方法和曝光系统

    公开(公告)号:US07714980B2

    公开(公告)日:2010-05-11

    申请号:US11675162

    申请日:2007-02-15

    申请人: Keita Sakai

    发明人: Keita Sakai

    IPC分类号: G03B27/52 G03B27/42

    CPC分类号: G03F7/70925 G03F7/70341

    摘要: An exposure apparatus has a projection optical system configured to project an image of a reticle pattern onto a substrate, and exposes the substrate via liquid supplied to a space between the substrate and the projection optical system. The exposure apparatus includes an oxygen removal unit configured to reduce dissolved oxygen in the liquid by bringing the liquid into contact with a gas other than oxygen, and a degassing unit configured to reduce a dissolved gas in the liquid.

    摘要翻译: 曝光装置具有投影光学系统,该投影光学系统配置为将掩模版图案的图像投影到基板上,并且通过供应到基板和投影光学系统之间的空间的液体使基板曝光。 曝光装置包括:除氧单元,其被配置为通过使液体与除氧之外的气体接触来减少液体中的溶解氧;以及脱气单元,其被配置为减少液体中溶解的气体。

    EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
    22.
    发明申请
    EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD 审中-公开
    曝光装置,曝光方法和装置制造方法

    公开(公告)号:US20090225291A1

    公开(公告)日:2009-09-10

    申请号:US12400946

    申请日:2009-03-10

    IPC分类号: G03B27/52 G03B27/32

    CPC分类号: G03F7/70341

    摘要: An exposure apparatus exposes a substrate to exposure light via an organic liquid. The exposure apparatus includes an oxidation reaction device and a filter. The oxidation reaction device generates oxide by causing reaction between the organic liquid and at least one of oxygen and water in the organic liquid through the application of illumination light onto the organic liquid. The filter removes the oxide generated by the oxidation reaction device from the organic liquid. The organic liquid is supplied onto the substrate via the oxidation reaction device and the filter.

    摘要翻译: 曝光装置通过有机液体将基板曝光于曝光光。 曝光装置包括氧化反应装置和过滤器。 氧化反应装置通过在有机液体上施加照明光使有机液体与有机液体中的氧和水中的至少一种反应而产生氧化物。 过滤器从有机液体中除去由氧化反应装置产生的氧化物。 通过氧化反应装置和过滤器将有机液体供给到基板上。

    Method of manufacturing single crystal calcium fluoride
    23.
    发明授权
    Method of manufacturing single crystal calcium fluoride 有权
    单晶氟化钙的制造方法

    公开(公告)号:US07105049B2

    公开(公告)日:2006-09-12

    申请号:US10657166

    申请日:2003-09-09

    申请人: Keita Sakai

    发明人: Keita Sakai

    IPC分类号: F27B5/08

    摘要: A method for manufacturing calcium fluoride single crystal includes the step of cooling the calcium fluoride single crystal so that maximum shear stress inside the calcium fluoride single crystal caused by thermal stress is approximately equal to or smaller than critical resolved shear stress (τc) in a direction of on a {0 0 1} plane of the calcium fluoride single crystal.

    摘要翻译: 氟化钙单晶的制造方法包括:使氟化钙单晶冷却的步骤,使得由热应力引起的氟化钙单晶内部的最大剪切应力大致等于或小于临界分解剪切应力(τC 在氟化钙单晶的{0 0 1}平面上的<1×10>方向上。

    Thermal printer and drive thereof
    24.
    发明授权
    Thermal printer and drive thereof 有权
    热敏打印机及其驱动

    公开(公告)号:US06288737B1

    公开(公告)日:2001-09-11

    申请号:US09462790

    申请日:2000-04-14

    IPC分类号: B41J1100

    摘要: The present invention relates to a thermal line printer for a small recording terminals such as a terminal for POS (point of sales), a handy terminal, a measuring apparatus or the like, and also relates to a driving device for the thermal line printer. In the structure of a conventional thermal line printer, there is a limitation to the ability to decrease the dimension of depth in a situation where the downsizing of an apparatus is desired. By installing the thermal line printer in an upright state, the dimension of the depth can be decreased. However, in this configuration, the user cannot see the state of the printing because the recording paper falls down toward the user's side, due to the gravity, when the paper is ejected after printing. The present invention solves the above problems by disposing a line type thermal head (5) and a platen roller (2) in such a manner that a tangential line to the platen roller (2) at a pressed point between the line type thermal head (5) and the platen roller (2) intersects the short side of the body of the printer in a plane projecting the body along the axial direction of the platen roller (2), and by ejecting the recording paper from the short side.

    摘要翻译: 本发明涉及一种用于POS(销售点)终端,便携式终端,测量装置等的小型记录终端的热线打印机,还涉及热线打印机的驱动装置。 在常规热线打印机的结构中,限制了在需要设备尺寸缩小的情况下减小深度尺寸的能力。 通过将热线打印机安装在直立状态,可以减小深度的尺寸。 然而,在这种配置中,当打印后的纸张被排出时,由于记录纸由于重力而使记录纸朝向使用者的一侧向下落,所以用户看不到打印的状态。 本发明解决了上述问题,即通过将行式热敏头(5)和压纸辊(2)设置成在压纸辊(2)的切线到线型热敏头( 5),并且压纸辊(2)沿着打印机主体的短边在沿着压纸辊(2)的轴向突出主体的平面中相交,并且从短边喷射记录纸。