公开(公告)号：US20160225995A1

公开(公告)日：2016-08-04

申请号：US14803704

申请日：2015-07-20

Applicant: Samsung Display Co., Ltd.

Inventor： Tae An SEO ,  Bo Ik PARK ,  Ju Chan PARK ,  Young Gug SEOL ,  Pil Suk LEE ,  Jin Hwan CHOI

IPC: H01L51/00 ,  G03F1/42 ,  H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  G03F1/42 ,  H01L51/56

Abstract: A mask comprises a mask frame defining an opening; a plurality of support bars installed in the opening of the mask frame; a plurality of movable bars, each of which is installed over a corresponding one of the plurality of support bars and movable relative to the corresponding support bar, wherein the plurality of support bars and the plurality of movable bars are arranged to divide the opening into a plurality of mask holes; and a plurality of actuators installed between the plurality of movable bars and the corresponding support bars and configured to move the movable bars relative to the plurality of support bars.

Abstract translation: 掩模包括限定开口的掩模框架; 安装在所述面罩框架的开口中的多个支撑杆; 多个可动杆，每个可移动杆都安装在所述多个支撑杆中相应的一个支撑杆上并相对于相应的支撑杆可移动，其中所述多个支撑杆和所述多个可动杆被布置成将所述开口分成 多个掩模孔; 以及多个致动器，其安装在所述多个可动杆和相应的支撑杆之间并且被配置为相对于所述多个支撑杆移动所述可动杆。