公开(公告)号：US20170182778A1

公开(公告)日：2017-06-29

申请号：US15179096

申请日：2016-06-10

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Mauro Cattaneo ,  Carlo Luigi Prelini ,  Lorenzo Colombo ,  Dino Faralli ,  Alessandra Sciutti ,  Lorenzo Tentori

IPC: B41J2/16

CPC classification number: B41J2/1626 ,  B41J2/01 ,  B41J2/135 ,  B41J2/16 ,  B41J2/1607 ,  B41J2/161 ,  B41J2/162 ,  B41J2/1621 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  Y10T29/49401

Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.