公开(公告)号：US20160370242A1

公开(公告)日：2016-12-22

申请号：US14980373

申请日：2015-12-28

Applicant: STMicroelectronics S.R.L.

Inventor： Enri Duqi ,  Sebastiano Conti ,  Sonia Costantini

IPC: G01L9/00 ,  B81C1/00 ,  B81B7/00

Abstract: A pressure sensor designed to detect a value of ambient pressure of the environment external to the pressure sensor includes: a first substrate having a buried cavity and a membrane suspended over the buried cavity; a second substrate having a recess, hermetically coupled to the first substrate so that the recess defines a sealed cavity the internal pressure value of which provides a pressure-reference value; and a channel formed at least in part in the first substrate and configured to arrange the buried cavity in communication with the environment external to the pressure sensor. The membrane undergoes deflection as a function of a difference of pressure between the pressure-reference value in the sealed cavity and the ambient-pressure value in the buried cavity.

Abstract translation: 设计用于检测压力传感器外部环境环境压力值的压力传感器包括：第一衬底，其具有掩埋腔和悬挂在掩埋腔上的膜; 具有凹部的第二基板，气密地联接到所述第一基板，使得所述凹部限定其内部压力值提供压力参考值的密封空腔; 以及至少部分地形成在所述第一基板中并且被配置为将所述掩埋腔布置成与所述压力传感器外部的环境连通的通道。 膜作为密封腔中的压力参考值与埋入腔中的环境压力值之间的压力差的函数发生偏转。

公开(公告)号：US20140198366A1

公开(公告)日：2014-07-17

申请号：US14151471

申请日：2014-01-09

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Sebastiano Conti ,  Sonia Costantini

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  G01B11/2518 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/105 ,  G03B21/008 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/2257 ,  H04N13/211 ,  H04N13/236 ,  H04N13/254 ,  Y10T29/49

Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.

Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。