公开(公告)号：US10790358B2

公开(公告)日：2020-09-29

申请号：US16515412

申请日：2019-07-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Moorym Choi ,  Bongyong Lee ,  Junhee Lim

IPC: H01L27/00 ,  H01L29/10 ,  H01L29/78 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/1157 ,  H01L27/11582

Abstract: A three-dimensional semiconductor memory device includes common source regions, an electrode structure between the common source regions, first channel structures penetrating the electrode structure, and second channel structures between the first channel structures and penetrating the electrode structures. The electrode structure includes electrodes vertically stacked on a substrate. The first channel structures include a first semiconductor pattern and a first vertical insulation layer. The second channel structures include a second vertical insulation layer surrounding a second semiconductor pattern. The second vertical insulation layer has a bottom surface lower than a bottom surface of the first vertical insulation layer.