Piezo-electric/electrostrictive film type chip
    26.
    发明授权
    Piezo-electric/electrostrictive film type chip 失效
    压电/电致伸缩薄膜型芯片

    公开(公告)号:US06440174B1

    公开(公告)日:2002-08-27

    申请号:US08809042

    申请日:1997-03-07

    IPC分类号: H01L4108

    摘要: A piezo-electric/electrostrictive film type chip (50) includes: a ceramic substrate (70) having a spacer plate (74) having a windows-disposed pattern (100) having a plurality of window portions (75) and a thin closure plate (72) for closing the window portions (75) which is unitarily connected with the spacer plate; and a piezo-electric/electrostrictive working portion (71) having a lower electrode (81), a piezo-electric/electrostrictive layer (82), and an upper electrode (83), each being formed in the form of a layer and laminated in this order at a closure portion of the window (75) on the outer surface of the closure plate (72) by a film formation method. A pin hole (52) for positioning is formed in or near the center of gravity of the windows-disposed pattern (100). Deterioration of positional preciseness of the pin hole and a through hole of the piezo-electric/electrostrictive actuator can be minimized, and the piezo-electric/electrostrictive actuator can be unitarily connected with an ink nozzle member with high positional preciseness.

    摘要翻译: 压电/电致伸缩薄膜型芯片(50)包括:具有隔板(74)的陶瓷基板(70),所述间隔板具有具有多个窗口部分(75)的窗口布置图案(100)和薄的封闭板 (72),用于封闭与间隔板一体连接的窗口部分(75); 以及具有下电极(81),压电/电致伸缩层(82)和上电极(83)的压电/电致伸缩工作部分(71),每个都以层的形式形成并层压 按照这种顺序,通过成膜方法在封闭板(72)的外表面上的窗口(75)的封闭部分处。 用于定位的销孔(52)形成在窗户布置图案(100)的重心附近或附近。 压电/电致伸缩致动器的销孔和通孔的位置精度的恶化可以最小化,并且压电/电致伸缩致动器可以与具有高位置精度的墨喷嘴构件一体地连接。