FINFET WITH LATERAL CHARGE BALANCE AT THE DRAIN DRIFT REGION

    公开(公告)号:US20210391460A1

    公开(公告)日:2021-12-16

    申请号:US17409078

    申请日:2021-08-23

    Inventor: Ming-Yeh Chuang

    Abstract: A semiconductor device includes an extended drain finFET. The drain drift region of the finFET extends between a drain contact region and a body of the finFET. The drain drift region includes an enhanced portion of the drain drift region between the drain contact region and the body. The drain drift region also includes a first charge balance region and a second charge balance region laterally adjacent to, and on opposite sides of, the enhanced portion of the drain drift region. The enhanced portion of the drain drift region and the drain contact region have a first conductivity type; the body, the first charge balance region, and the second charge balance region have a second, opposite, conductivity type. The drain drift region is wider than the body.

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