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公开(公告)号：US20220278666A1
公开(公告)日：2022-09-01
申请号：US17743328
申请日：2022-05-12
申请人： Resonant Inc.
发明人： Ventsislav Yantchev
摘要： Acoustic filters and methods of fabrication are disclosed. A filter device includes a substrate and a single-crystal piezoelectric plate, a back surface of the piezoelectric plate attached to a surface of the substrate. The filter device includes a plurality of acoustic resonators including one or more shunt resonators and one or more series resonators. Each of the plurality of acoustic resonators includes an interdigital transducer (IDT) formed on the front surface of the piezoelectric plate, interleaved fingers of the IDT disposed on a respective diaphragm formed by a respective portion of the piezoelectric plate that spans a respective cavity in the substrate. A divided frequency setting layer is formed on at least some of the one or more shunt resonators but not on the one or more series resonators.
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公开(公告)号：US11374549B2
公开(公告)日：2022-06-28
申请号：US17081717
申请日：2020-10-27
申请人： Resonant Inc.
发明人： Ventsislav Yantchev
摘要： Acoustic filters and methods of fabrication are disclosed. A filter device includes a substrate and a single-crystal piezoelectric plate, a back surface of the piezoelectric plate attached to a surface of the substrate. The filter device includes a plurality of acoustic resonators including one or more shunt resonators and one or more series resonators. Each of the plurality of acoustic resonators includes an interdigital transducer (IDT) formed on the front surface of the piezoelectric plate, interleaved fingers of the IDT disposed on a respective diaphragm formed by a respective portion of the piezoelectric plate that spans a respective cavity in the substrate. A divided frequency setting layer is formed on at least some of the one or more shunt resonators but not on the one or more series resonators.
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23.发明授权公开(公告)号：US11326881B2
公开(公告)日：2022-05-10
申请号：US16242129
申请日：2019-01-08
发明人： Hiroshi Kiya
IPC分类号： H01L41/04 , H03H9/10 , H03H9/05 , G01C19/5628 , G01C19/5621 , H03H9/15 , H03H3/04 , H01L41/09 , H03H9/02
摘要： A vibrator device includes a vibrator having a first and second electrode, and a circuit device having a drive circuit adapted to drive the vibrator, and an output circuit adapted to output a monitor signal corresponding to a vibration characteristic of the vibrator while driven by the drive circuit. The circuit device includes a first terminal electrically connected to the first electrode, and from which an output signal from the drive circuit to the vibrator is output, a second terminal electrically connected to the second electrode, and to which an input signal from the vibrator to the drive circuit is input, a third terminal electrically separated from the first electrode and the second electrode, and a monitor terminal from which the monitor signal is output. The vibrator is supported on an active surface side of the circuit device using conductive bumps respectively to the first, second, and third terminal.
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24.发明申请公开(公告)号：US20220085786A1
公开(公告)日：2022-03-17
申请号：US17534662
申请日：2021-11-24
发明人： Shumin ZHANG , Guohao WANG , Quan WANG , Hailong CHEN , Genlin ZHENG
摘要： An acoustic wave device and a preparation method therefor, and a temperature control method of the acoustic wave. The preparation method comprises: providing a first substrate and a second substrate (S110); forming an acoustic wave structure on the first substrate (S120); forming a temperature measuring resistor on the first substrate (S130); forming a TEC device on the second substrate (S140); and bonding the first substrate and the second substrate via metal fusion to produce the acoustic wave device (S150).
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公开(公告)号：US20220077843A1
公开(公告)日：2022-03-10
申请号：US17305897
申请日：2021-07-16
申请人： Statek Corporation
发明人： Yue Fang , Thomas Pham
IPC分类号： H03H9/215 , B22F1/00 , C08G65/336 , H03H9/19 , H03H3/04
摘要： The disclosed technology generally relates to packaging a quartz crystal, and more particularly to bonding a quartz crystal using sintering silver paste. In one aspect, a method of packaging a quartz crystal comprises attaching a quartz crystal to a package substrate using one or more silver paste layers comprising silver particles. The method additionally comprises sintering the silver paste in a substantially oxygen-free atmosphere and at a sintering temperature sufficient to cause sintering of the silver particles. The sintering is such that the quartz crystal exhibits a positive drift in resonance frequency of the quartz crystal over time. The method further comprises hermetically sealing the quartz crystal in the package substrate.
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公开(公告)号：US11239816B1
公开(公告)日：2022-02-01
申请号：US17408120
申请日：2021-08-20
申请人： Resonant Inc.
发明人： Sean McHugh
摘要： Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate having parallel front and back surfaces, the back surface attached to the substrate. A decoupling dielectric layer is on the front surface of the piezoelectric plate. An interdigital transducer (IDT) is formed over the decoupling dielectric layer such that interleaved fingers of the IDT are over a portion of the piezoelectric plate suspended across a cavity formed in the substrate.
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公开(公告)号：US11218133B2
公开(公告)日：2022-01-04
申请号：US16327705
申请日：2016-09-30
申请人： INTEL CORPORATION
摘要： Techniques are disclosed for forming integrated circuit film bulk acoustic resonator (FBAR) devices having multiple resonator thicknesses on a common substrate. A piezoelectric stack is formed in an STI trench and overgrown onto the STI material. In some cases, the piezoelectric stack can include epitaxially grown AlN. In some cases, the piezoelectric stack can include single crystal (epitaxial) AlN in combination with polycrystalline (e.g., sputtered) AlN. The piezoelectric stack thus forms a central portion having a first resonator thickness and end wings extending from the central portion and having a different resonator thickness. Each wing may also have different thicknesses from one another. Thus, multiple resonator thicknesses can be achieved on a common substrate, and hence, multiple resonant frequencies on that same substrate. The end wings can have metal electrodes formed thereon, and the central portion can have a plurality of IDT electrodes patterned thereon.
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公开(公告)号：US20210391844A1
公开(公告)日：2021-12-16
申请号：US17463322
申请日：2021-08-31
申请人： Resonant Inc.
发明人： Viktor Plesski , Soumya Yandrapalli , Robert B. Hammond , Bryant Garcia , Patrick Turner , Jesson John , Ventsislav Yantchev
摘要： Acoustic resonator devices and filters, and methods of making the same. An acoustic resonator includes a piezoelectric plate and an interdigital transducer (IDT) including interleaved fingers on the piezoelectric plate. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the piezoelectric plate. The acoustic resonator further includes a front-side dielectric layer on the piezoelectric plate between the fingers of the IDT, wherein a resonance frequency of the acoustic resonator device has an inverse dependence on a thickness of the front-side dielectric layer.
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公开(公告)号：US20210384883A1
公开(公告)日：2021-12-09
申请号：US17406362
申请日：2021-08-19
发明人： Shigeo Ojima , Isao Ikeda , Koki Sai
摘要： An electronic device that includes a base substrate having a mounting surface; an electronic component having a mechanical vibration portion mounted on the mounting surface of the base substrate; an intermediate layer mounted on the base substrate and forming an internal space with the base substrate so as to accommodate the electronic component therein, the intermediate layer having at least one through-hole that opens the internal space to an outside; and a sealing layer on the intermediate layer and sealing the internal space by closing the at least one through-hole.
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公开(公告)号：US20210344318A1
公开(公告)日：2021-11-04
申请号：US15929370
申请日：2020-04-29
申请人： Timothy J Gindele
发明人： Timothy J Gindele
摘要： The piezoelectric effect is a well-known phenomenon inherent in some crystal compounds. Silicon dioxide in nature forms a natural hexagonal crystal. The same material when heated to a molten state and then rapidly cooled becomes common glass with no piezoelectric effect. The phenomenon is an electrical or electron relationship to the crystal in that when the modulus is changed the state of electrical charge also changes and in two modalities. If you apply an electrical charge the crystal will change shape and if you change the shape the crystal it will cause an electrical charge.
The device being presented is part of a larger thesis of the phenomenon in that it is presenting mechanical interactivity from low to ultrahigh frequencies. It was also discovered that the reactance of the crystal can be produced under magnetic pressure such that stacking crystals between strong magnets called unit/cells and connecting them in a series/parallel wired conductive arrangement can produce an amplification such that all frequencies of electrical activity in the environment are amplified and produce a rectifiable current flow of electrons.
Envisioned are many possible embodiments of this device. One such embodiment is the application of a coupled toroidal coil that enhances the signals in the environment and magnetically couples the signal into the device.
This device has been prototyped and functions as described. The output characteristics beyond what has been described are not disclosed and are considered proprietary information.
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