公开(公告)号：US20220181170A1

公开(公告)日：2022-06-09

申请号：US17522067

申请日：2021-11-09

Applicant: DENSO CORPORATION ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  MIRISE Technologies Corporation ,  National University Corporation Kyoto Institute of Technology

Inventor： Tatsuji NAGAOKA ,  Hiroki MIYAKE ,  Hiroyuki NISHINAKA ,  Yuki KAJITA ,  Masahiro YOSHIMOTO

IPC: H01L21/67 ,  H01L21/306 ,  H01L21/02

Abstract: A wafer processing apparatus is configured to process a wafer by supplying mist to a surface of the wafer. The wafer processing apparatus includes a furnace in which the wafer is disposed, a gas supplying device configured to supply gas into the furnace, a mist supplying device configured to supply the mist into the furnace, and a controller. The controller is configured to execute a processing step by controlling the gas supplying device and the mist supplying device to supply the gas and the mist into the furnace, respectively. The controller is further configured to control the mist supplying device to stop supplying the mist into the furnace while controlling the gas supplying device to keep supplying the gas into the furnace when the processing step ends.

公开(公告)号：US20220158415A1

公开(公告)日：2022-05-19

申请号：US17501497

申请日：2021-10-14

Applicant: DENSO CORPORATION ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  MIRISE Technologies Corporation ,  QD LASER, Inc.

Inventor： Yuki KAMATA ,  Hiroyuki TARUMI ,  Koichi OYAMA ,  Keizo TAKEMASA ,  Kenichi NISHI ,  Yutaka ONISHI

IPC: H01S5/34 ,  H01S5/042 ,  H01S5/10

Abstract: The semiconductor laser device includes: an activation layer having at least one first quantum dot layer and at least one second quantum dot layer having a longer emission wavelength than the first quantum dot layer. The gain spectrum of the active layer has the maximum values at the first wavelength and the second wavelength longer than the first wavelength corresponding to the emission wavelength of the first quantum dot layer and the emission wavelength of the second quantum dot layer, respectively. The maximum value of the gain spectrum at the first wavelength is defined as the first maximum value, and the maximum value of the gain spectrum at the second wavelength is defined as the second maximum value. The first maximum value is larger than the second maximum value.