公开(公告)号：US5537083A

公开(公告)日：1996-07-16

申请号：US298233

申请日：1994-08-30

Applicant: Liwei Lin ,  Clark T. Nguyen ,  Roger T. Howe ,  Albert P. Pigano

Inventor： Liwei Lin ,  Clark T. Nguyen ,  Roger T. Howe ,  Albert P. Pigano

IPC: H03H9/46 ,  H03H9/00

CPC classification number: H03H9/02275 ,  H03H9/02377 ,  H03H9/46 ,  H03H9/462

Abstract: A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.

公开(公告)号：US5455547A

公开(公告)日：1995-10-03

申请号：US332981

申请日：1994-10-31

Applicant: Liwei Lin ,  Clark T.-C. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Liwei Lin ,  Clark T.-C. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

IPC: H03H9/46 ,  H03H9/00

CPC classification number: H03H9/02275 ,  H03H9/02377 ,  H03H9/46 ,  H03H9/462

Abstract: A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.

Abstract translation: 具有平面部件的微机械滤波器，并且可使用非常大规模的集成电路微加工技术制造。 输入和输出换能器是叉指梳状电极。 输入和输出换能器之间的机械耦合包括平面弯曲，电极的位移产生弯曲元件的弯曲。 通过在真空中密封微机械滤波器并提供板上电路，可以实现高信噪比和质量因素。 构建使用许多微机械谐振器的实时频谱分析仪，为设备提供高精度和短的采样时间。