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公开(公告)号：US06637998B2
公开(公告)日：2003-10-28
申请号：US09968125
申请日：2001-10-01
IPC分类号： B65G4907
CPC分类号： H01L21/67724 , H01L21/67736 , Y10S414/139 , Y10S414/14
摘要： A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the system includes a mobile cart, a vacuum sealable container to hold the substrates, a vacuum source having a portable power source, located on the cart and capable of generating a vacuum in the container, and a docking valve to mate with a corresponding valve on each of the processing chambers, where the docking valve and the corresponding valve are securable to one another to form a substantially vacuum-tight seal and openable, while mated, to permit unloading and loading of substrates between the container and the processing chamber. A method of using the system is also provided.
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公开(公告)号：US6023933A
公开(公告)日：2000-02-15
申请号：US963728
申请日：1997-11-04
CPC分类号： F17C9/02 , Y10S62/924
摘要： A method and apparatus for pressurizing a high purity gas in liquefied form to an ultra high pressure gas in vapor form using a constant volume, heated vaporization vessel.
摘要翻译： 一种使用恒定体积的加热蒸发容器将液化形式的高纯度气体加压成蒸汽形式的超高压气体的方法和装置。
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公开(公告)号：US5644855A
公开(公告)日：1997-07-08
申请号：US417585
申请日：1995-04-06
CPC分类号： F26B21/14
摘要： A portable contamination-sensitive component transport container provides a continuously purged environment for the components. The container includes an attached cryogenically liquefied inert gas insulated storage vessel from which vaporized liquefied inert gas is used to generate a gaseous nitrogen purge to the container.
摘要翻译： 便携式污染敏感组件运输容器为组件提供了持续清洗的环境。 容器包括附着的低温液体惰性气体绝缘储存容器，使用蒸发的液化惰性气体来向容器产生气态氮气吹扫。
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