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公开(公告)号：US6023933A
公开(公告)日：2000-02-15
申请号：US963728
申请日：1997-11-04
CPC分类号： F17C9/02 , Y10S62/924
摘要： A method and apparatus for pressurizing a high purity gas in liquefied form to an ultra high pressure gas in vapor form using a constant volume, heated vaporization vessel.
摘要翻译： 一种使用恒定体积的加热蒸发容器将液化形式的高纯度气体加压成蒸汽形式的超高压气体的方法和装置。
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公开(公告)号：US07439654B2
公开(公告)日：2008-10-21
申请号：US10785298
申请日：2004-02-24
IPC分类号： H01L41/04
摘要： Ultrasonic probe comprising an elongate body having a first end and a second end, an ultrasonic transducer attached to the probe at or adjacent the first end, and an enlarged support section intermediate the ultrasonic transducer and the second end, wherein the enlarged support section has an equivalent diameter greater than an equivalent diameter of the body at any location between the enlarged support section and the ultrasonic transducer. The probe may be used to introduce ultrasonic energy into ultrasonic cleaning systems.
摘要翻译： 超声波探头包括具有第一端和第二端的细长主体，在第一端处或邻近第一端附接到探针的超声波换能器，以及位于超声波换能器和第二端之间的扩大的支撑部分，其中扩大的支撑部分具有 等效直径大于在扩大的支撑部分和超声波换能器之间的任何位置处的本体的等效直径。 探头可用于将超声波能量引入超声波清洗系统。
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公开(公告)号：US07282099B2
公开(公告)日：2007-10-16
申请号：US10253296
申请日：2002-09-24
IPC分类号： B08B3/00
CPC分类号： B08B7/0021 , Y10S438/906
摘要： Method for processing an article by contacting the article with a dense fluid. The article is introduced into a sealable processing chamber and the processing chamber is sealed. A dense fluid is prepared by introducing a subcritical fluid into a pressurization vessel and isolating the vessel, and then heating the subcritical fluid at essentially constant volume and essentially constant density to yield a dense fluid. At least a portion of the dense fluid is transferred from the pressurization vessel to the processing chamber, wherein the transfer of the dense fluid is driven by the difference between the pressure in the pressurization vessel and the pressure in the processing chamber, thereby pressurizing the processing chamber with transferred dense fluid. The article is contacted with the transferred dense fluid to yield a spent dense fluid and a treated article, and the spent dense fluid is separated from the treated article.
摘要翻译： 通过使制品与致密流体接触来处理制品的方法。 将物品引入可密封的处理室中，并且处理室被密封。 通过将亚临界流体引入加压容器并分离容器，然后以基本上恒定的体积和基本上恒定的密度加热亚临界流体以产生致密的流体来制备致密流体。 致密流体的至少一部分从加压容器转移到处理室，其中致密流体的转移由加压容器中的压力与处理室中的压力之间的差异驱动，由此加压处理 室内转移致密流体。 将物品与转移的致密流体接触以产生用过的致密流体和经处理的物品，并将废的致密流体与经处理的物品分离。
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4.发明授权公开(公告)号：US06469780B1
公开(公告)日：2002-10-22
申请号：US09217113
申请日：1998-12-21
IPC分类号： G01N100
CPC分类号： G01N15/065 , Y10S977/953
摘要： An apparatus and a method are disclosed for detecting particles in a particle-containing gas at a pressure greater than about 0 psig. The apparatus includes a gas distribution line containing a pressurized gas having a pressure greater than about 0 psig and a condensation nucleus counter in fluid communication with the pressurized gas in the gas distribution line. The condensation nucleus counter is adapted to receive a stream of the pressurized gas at a pressure substantially equal to the pressure of the pressurized gas in the gas distribution line. The condensation nucleus counter is constructed of materials resistant to corrosion and to reaction with the pressurized gas, which may be one or more reactive or toxic gases, such as those used in microchip processing, or an inert gas.
摘要翻译： 公开了用于以大于约0psig的压力检测含颗粒气体中的颗粒的装置和方法。 该装置包括：气体分配管线，其包含压力大于约0psig的加压气体，以及与气体分配管线中的加压气体流体连通的冷凝核计数器。 冷凝核计数器适于以基本上等于气体分配管线中的加压气体的压力的压力接收加压气体流。 冷凝核计数器由耐腐蚀和与加压气体反应的材料构成，加压气体可以是一种或多种反应性或有毒气体，例如用于微芯片处理的气体或惰性气体。
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5.发明授权公开(公告)号：US06436170B1
公开(公告)日：2002-08-20
申请号：US09602933
申请日：2000-06-23
IPC分类号： B03C301
CPC分类号： B03C3/06 , B03C3/38 , B03C3/41 , B03C2201/10
摘要： An apparatus for removing particles from a gas in a high purity flowing gas system is provided which includes a flow tube inserted inline in the flowing gas system having an inlet and an outlet, a pressure sealed, electrically insulated feed-through integral to the flow tube, an emitter inserted through the feed-through into the flow tube to create a plasma in the gas to charge particles in the gas, and a collector surface in proximity to the emitter; whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. An apparatus for removing particles from a gas in a high purity gas containment vessel is also provided which includes a gas containment vessel having an inlet orifice, a pressure sealed, electrically insulated feed-through sealingly attached adjacent the inlet orifice, an emitter inserted through the feed-through into the gas containment vessel to create a plasma in the gas to charge particles in the gas; and a collector surface in proximity to the emitter, whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. Methods of using the above apparatus are also provided.
摘要翻译： 提供了一种用于从高纯度流动气体系统中的气体中除去颗粒的装置，其包括在具有入口和出口的流动气体系统中嵌入的流动管，压力密封的，电绝缘的，与流管 ，通过所述馈通插入到所述流管中以在所述气体中产生等离子体以对所述气体中的颗粒进行充电的发射器以及靠近所述发射极的收集器表面; 由此发射极和集电器表面之间的电场将气体中的颗粒吸引到集电器表面。 还提供了一种用于从高纯度气体容纳容器中的气体中除去颗粒的装置，其包括具有入口孔的气体容纳容器，密封地连接在入口孔附近的压力密封的电绝缘进料口， 通入气体容纳容器以在气体中产生等离子体以对气体中的颗粒进行充电; 以及靠近发射极的集电极表面，由此发射极和集电极表面之间的电场将气体中的颗粒吸引到集电器表面。 还提供了使用上述装置的方法。
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公开(公告)号：US06383257B1
公开(公告)日：2002-05-07
申请号：US09542995
申请日：2000-04-04
IPC分类号： B01D5322
CPC分类号： B01D53/229 , B01D53/002 , B01D53/04 , B01D53/053 , B01D53/14 , B01D2256/24 , B01D2258/0216 , B01D2259/40001 , Y02C20/10 , Y02C20/30
摘要： An apparatus and process for separating perfluorocarbon compounds from a gas mixture passes an incoming stream of a gas into a cold trap, the gas stream including a plurality of perfluorocarbon compounds. The gas mixture is cooled within the cold trap to a temperature below −100° C. to produce a condensate that is enriched in at least one perfluorocarbon compound and a non-condensed stream from which the condensate was separated. The condensate is withdrawn from the cold trap. The condensate may be withdrawn by warming the cold trap to vaporize the condensate and thereafter flowing the vaporized condensate into a storage vessel. The non-condensed stream may be vented to the atmosphere, re-circulated into the cold trap or flowed through subsequent separation processes to extract additional perfluorocarbon compounds.
摘要翻译： 用于从气体混合物中分离全氟化碳化合物的装置和方法将气体的进入流通入冷阱，该气流包括多个全氟化碳化合物。 将气体混合物在冷阱内冷却至低于-100℃的温度，以产生富含至少一种全氟化碳化合物的冷凝物和从其中分离出冷凝物的非冷凝物流。 冷凝水从冷阱中取出。 可以通过加热冷阱来蒸发冷凝物，然后将蒸发的冷凝物流入储存容器中，从而将冷凝物抽出。 非冷凝流可以排放到大气中，再循环到冷阱中或者通过随后的分离过程流出以提取另外的全氟化碳化合物。
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7.发明授权System and method comprising same for measurement and/or analysis of particles in gas stream 有权包含相同的系统和方法用于测量和/或分析气流中的颗粒公开(公告)号：US07867779B2
公开(公告)日：2011-01-11
申请号：US11340641
申请日：2006-01-27
IPC分类号： G01N1/22
CPC分类号： G01N1/2205 , G01N1/34 , G01N15/00 , G01N15/0205 , G01N15/0606 , Y10T436/25 , Y10T436/25125 , Y10T436/25375 , Y10T436/255 , Y10T436/25875
摘要： A system and method for measuring and analyzing particles within a gas feed stream. In one aspect, the system includes a particle counter and a particle capture filter that are arranged in parallel. In another aspect, the system includes a purifying device to remove trace molecular impurities from a gas feed stream to reduce the presence of impurities.
摘要翻译： 一种用于测量和分析气体进料流中的颗粒的系统和方法。 一方面，该系统包括平行布置的颗粒计数器和颗粒捕获过滤器。 另一方面，该系统包括净化装置以从气体进料流中除去痕量分子杂质以减少杂质的存在。
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公开(公告)号：US20080202550A1
公开(公告)日：2008-08-28
申请号：US12110831
申请日：2008-04-28
IPC分类号： B08B3/12
摘要： Ultrasonic probe comprising an elongate body having a first end and a second end, an ultrasonic transducer attached to the probe at or adjacent the first end, and an enlarged support section intermediate the ultrasonic transducer and the second end, wherein the enlarged support section has an equivalent diameter greater than an equivalent diameter of the body at any location between the enlarged support section and the ultrasonic transducer. The probe may be used to introduce ultrasonic energy into ultrasonic cleaning systems.
摘要翻译： 超声波探头包括具有第一端和第二端的细长主体，在第一端处或邻近第一端附接到探针的超声波换能器，以及位于超声波换能器和第二端之间的扩大的支撑部分，其中扩大的支撑部分具有 等效直径大于在扩大的支撑部分和超声波换能器之间的任何位置处的本体的等效直径。 探头可用于将超声波能量引入超声波清洗系统。
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公开(公告)号：US06517608B2
公开(公告)日：2003-02-11
申请号：US10187342
申请日：2002-06-28
IPC分类号： B03C301
CPC分类号： B03C3/06 , B03C3/38 , B03C3/41 , B03C2201/10
摘要： An apparatus for removing particles from a gas in a high purity flowing gas system is provided which includes a flow tube inserted inline in the flowing gas system having an inlet and an outlet, a pressure sealed, electrically insulated feed-through integral to the flow tube, an emitter inserted through the feed-through into the flow tube to create a plasma in the gas to charge particles in the gas, and a collector surface in proximity to the emitter; whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. An apparatus for removing particles from a gas in a high purity gas containment vessel is also provided which includes a gas containment vessel having an inlet orifice, a pressure sealed, electrically insulated feed-through sealingly attached adjacent the inlet orifice, an emitter inserted through the feed-through into the gas containment vessel to create a plasma in the gas to charge particles in the gas; and a collector surface in proximity to the emitter, whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. Methods of using the above apparatus are also provided.
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公开(公告)号：US06637998B2
公开(公告)日：2003-10-28
申请号：US09968125
申请日：2001-10-01
IPC分类号： B65G4907
CPC分类号： H01L21/67724 , H01L21/67736 , Y10S414/139 , Y10S414/14
摘要： A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the system includes a mobile cart, a vacuum sealable container to hold the substrates, a vacuum source having a portable power source, located on the cart and capable of generating a vacuum in the container, and a docking valve to mate with a corresponding valve on each of the processing chambers, where the docking valve and the corresponding valve are securable to one another to form a substantially vacuum-tight seal and openable, while mated, to permit unloading and loading of substrates between the container and the processing chamber. A method of using the system is also provided.
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