公开(公告)号：US09576775B2

公开(公告)日：2017-02-21

申请号：US14532894

申请日：2014-11-04

Applicant: relyon plasma GmbH ,  EPCOS AG

Inventor： Stefan Nettesheim ,  Georg Kuegerl ,  Markus Puff

IPC: B01J19/08 ,  H01J37/32 ,  H05H1/36 ,  H05H1/44

CPC classification number: H01J37/32449 ,  H01J37/32899 ,  H05H1/36 ,  H05H1/44

Abstract: The invention relates to a plasma generation device comprising a plurality of plasma modules for generating a plasma. Each plasma module has a module housing with at least one gas inlet for supplying a process gas. Furthermore, a discharge device for generating the plasma from the process gas and a plasma outlet are provided. The plasma generation device has at least two plasma modules for generating a plasma. Each plasma module has at least one gas outlet for some of the process gas, wherein the at least one gas outlet of at least one plasma module issues into a respective gas inlet of another plasma module.

Abstract translation: 本发明涉及一种等离子体产生装置，其包括用于产生等离子体的多个等离子体模块。 每个等离子体模块具有模块壳体，其具有至少一个气体入口用于提供处理气体。 此外，提供了用于从处理气体产生等离子体的排出装置和等离子体出口。 等离子体产生装置具有用于产生等离子体的至少两个等离子体模块。 每个等离子体模块具有用于一些工艺气体的至少一个气体出口，其中至少一个等离子体模块的至少一个气体出口发射到另一个等离子体模块的相应气体入口。

公开(公告)号：US20160027987A1

公开(公告)日：2016-01-28

申请号：US14771760

申请日：2014-03-19

Applicant: EPCOS AG

Inventor： Peter Kraxner ,  Markus Puff

IPC: H01L41/04

CPC classification number: H01L41/044

Abstract: A circuit assembly is used for controlling a piezoelectric transformer having an input capacitance in a first circuit branch. The circuit assembly also includes a second circuit branch for compensating for the input capacitance, preferably by means of a capacitive element, and a differential amplifier having two inputs. The first input is coupled to the first circuit branch and the second input is coupled to the second circuit branch.

Abstract translation: 电路组件用于控制在第一电路分支中具有输入电容的压电变压器。 电路组件还包括用于补偿输入电容的第二电路分支，优选地通过电容元件和具有两个输入的差分放大器。 第一输入耦合到第一电路支路，第二输入耦合到第二电路支路。