Device and method for micro-electro-mechanical-system photonic switch
    31.
    发明授权
    Device and method for micro-electro-mechanical-system photonic switch 有权
    微电子机械系统光子开关的装置和方法

    公开(公告)号:US09213142B2

    公开(公告)日:2015-12-15

    申请号:US14086776

    申请日:2013-11-21

    Abstract: In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators and a first minor array optically coupled to the first plurality of collimators, where the first minor array includes a first plurality of minors, and where a first minor of the first plurality of minors includes a first plurality of photodiodes integrated on the first mirror.

    Abstract translation: 在一个实施例中,微电子机械系统(MEMS)光子开关包括第一多个准直器和光学耦合到第一多个准直器的第一次要阵列,其中第一次要阵列包括第一多个未成年人,以及 其中所述第一多个未成年人的第一未成年人包括集成在所述第一反射镜上的第一多个光电二极管。

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