公开(公告)号：US20100109220A1

公开(公告)日：2010-05-06

申请号：US12596455

申请日：2008-04-15

申请人： Kazuhiro Musha ,  Hirofumi Minami ,  Takafumi Kawaguchi

发明人： Kazuhiro Musha ,  Hirofumi Minami ,  Takafumi Kawaguchi

IPC分类号： B25B1/00

CPC分类号： H01L21/6833 ,  B65G49/061 ,  B65G49/067 ,  B65G2249/02 ,  B65G2249/045 ,  G02F1/1303 ,  H01L21/67092 ,  H01L21/6838

摘要： Object To provide a substrate assembly apparatus capable of simplifying a structure of the apparatus and performing appropriate detachment of a substrate constantly.Solving Means A substrate assembly apparatus according to the present invention includes a support base and a holding mechanism. The support base is for supporting a lower substrate. The holding mechanism includes a holding surface and a functional element. The holding surface is for holding an upper surface of an upper substrate. The functional element is provided on the holding surface and has a holding force variable in accordance with a magnitude of a voltage. The holding mechanism causes a lower surface of the upper substrate to face an upper surface of the lower substrate supported by the support base. With this structure, it becomes possible to electrically control the holding force with respect to the substrate and simplify the structure of the holding mechanism. Further, since the holding force of the substrate can be changed smoothly, appropriate detachment is constantly allowed even with respect to a thin substrate.

摘要翻译： 本发明提供能够简化装置的结构并且不断地进行基板的适当脱离的基板组装装置。 解决方案根据本发明的基板组装设备包括支撑基座和保持机构。 支撑底座用于支撑下基板。 保持机构包括保持面和功能元件。 保持表面用于保持上基板的上表面。 功能元件设置在保持表面上，并且具有根据电压的大小可变的保持力。 保持机构使得上基板的下表面面对由支撑基座支撑的下基板的上表面。 利用这种结构，可以电控制相对于基板的保持力并简化保持机构的结构。 此外，由于可以平滑地改变基板的保持力，即使对于薄的基板也能够持续地进行适当的分离。

公开(公告)号：US20100040447A1

公开(公告)日：2010-02-18

申请号：US12564572

申请日：2009-09-22

申请人： Kazuhiro MUSHA ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

发明人： Kazuhiro MUSHA ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

IPC分类号： H01L21/68 ,  B25J9/00 ,  B25J18/02

CPC分类号： B25J9/107 ,  B25J9/042 ,  B25J9/102 ,  B25J9/104 ,  H01L21/67742 ,  Y10T74/20305

摘要： A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention.

摘要翻译： 提供一种不会对其环境造成污染的紧凑型运输装置。 在本发明的第一方面的输送装置中，由于第一旋转轴和第二旋转轴同心地配置，所以装置的安装面积小，死角逸出机构的结构简单。 由于可以使手部的连接部分变薄，所以可以减少插入手部的闸阀的开口。 结果，传送室内的灰尘难以进入处理室。 本发明的第二方面涉及一种间隔开的双轴型输送装置。 虽然设置在旋转轴上的第一臂的长度可以不同于设置在第一臂和基板支撑部之间的第二臂的长度，但是即使其长度不同，该装置也不会发生故障，因为它的传播力 在本发明的除死点以外的位置释放死点移除机构。

公开(公告)号：US20090092467A1

公开(公告)日：2009-04-09

申请号：US11989646

申请日：2007-02-23

申请人： Yasuzou Tanaka ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami

发明人： Yasuzou Tanaka ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami

IPC分类号： H01L21/677

CPC分类号： H01L21/682 ,  G03F7/70716 ,  G03F7/70975

摘要： To enable division for transportation and secure proper treatment on a substrate to be treated, the present invention provides a stage apparatus (11) including a substrate holding plane which holds a substrate to be treated, a pair of guide frames (13X1), (13X2) oppositely disposed with the substrate holding plane sandwiched therebetween, and a gantry (13Y) which is movably held on upper surfaces of the pair of guide frames (13X1), (13X2). The stage apparatus (11) is composed of a first structure V1 which includes one guide frame (13X1), a second structure V2 which includes the other guide frame (13X2), and a third structure V3 which includes the gantry (13Y). Thus, even if the stage apparatus is large, since it can be divided into the structures V1 to V3, the stage apparatus can be transported by land. In addition, since there are no joints on a moving path of the gantry (13Y), the stage apparatus can properly treat the substrate without causing deterioration of moving accuracy.

摘要翻译： 为了能够进行运输分割并确保正确处理的基板，本发明提供了一种台架装置（11），其包括保持要处理的基板的基板保持平面，一对引导框架（13X1），（13X2） ）和夹持在基板保持平面之间的相对设置的台架（13Y），可移动地保持在一对引导框架（13X1），（13X2）的上表面上的台架（13Y）。 舞台装置（11）由包括一个引导框架（13X1）的第一结构V1，包括另一引导框架（13X2）的第二结构V2和包括台架（13Y）的第三结构V3组成。 因此，即使舞台装置大，由于可以分为结构V1〜V3，所以舞台装置能够陆陆运送。 此外，由于在台架（13Y）的移动路径上没有接头，所以台架装置可以适当地处理基板而不会导致移动精度的劣化。