Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus
    1.
    发明授权
    Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus 有权
    旋转导入机构,基板输送装置和真空处理装置

    公开(公告)号:US08366375B2

    公开(公告)日:2013-02-05

    申请号:US12513873

    申请日:2007-11-13

    IPC分类号: H01L21/677

    摘要: There are provided a rotation introduction mechanism which transmits a rotating motion on the atmosphere side into vacuum, is arranged simply, has a low sliding resistance, and has a long life, a substrate transfer apparatus, a substrate transfer apparatus having a small pivot radius and generating a smaller amount of dusts, and a vacuum processing apparatus. A lubricant holding member is attached to a vacuum seal mechanism. The substrate transfer apparatus is arranged such that a first link mechanism includes a first arm and a fourth arm, a second link mechanism includes a second arm and a third arm, the first arm is fixedly attached to a first drive shaft, the first arm is fixedly attached to a second drive shaft, the third arm is rotatably attached to the first drive shaft, and the fourth arm is rotatably attached to the second drive shaft. The vacuum processing apparatus includes the substrate transfer apparatus.

    摘要翻译: 提供一种旋转引导机构,其将气氛侧的旋转运动变为真空,简单地设置,具有低滑动阻力,寿命长,旋转半径小的基板输送装置,基板输送装置, 产生较少量的灰尘,以及真空处理设备。 润滑剂保持构件附接到真空密封机构。 衬底传送装置被布置成使得第一连杆机构包括第一臂和第四臂,第二连杆机构包括第二臂和第三臂,第一臂固定地附接到第一驱动轴,第一臂是 固定地连接到第二驱动轴上,第三臂可转动地安装在第一驱动轴上,第四臂可转动地安装在第二驱动轴上。 真空处理装置包括基板输送装置。

    Transport apparatus, control method for the same, and vacuum processing system
    3.
    发明授权
    Transport apparatus, control method for the same, and vacuum processing system 有权
    运输设备,控制方法及真空处理系统

    公开(公告)号:US07645112B2

    公开(公告)日:2010-01-12

    申请号:US11167584

    申请日:2005-06-28

    IPC分类号: B66C23/00

    摘要: A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

    摘要翻译: 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置,由此将运送单元中运送的物体运送到正确的位置。 输送装置包括:具有气密结构的壳体; 第一至第三驱动轴,其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息,向电磁线圈提供驱动电流,以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

    Transport apparatus, control method for the same, and vacuum processing system
    4.
    发明授权
    Transport apparatus, control method for the same, and vacuum processing system 有权
    运输设备,控制方法及真空处理系统

    公开(公告)号:US07572093B2

    公开(公告)日:2009-08-11

    申请号:US11095649

    申请日:2005-04-01

    IPC分类号: B25J18/02

    摘要: A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

    摘要翻译: 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂,其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转,并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂,并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不彼此干涉。

    Plurality of column electrode driving circuits and display device including the same

    公开(公告)号:US07113180B2

    公开(公告)日:2006-09-26

    申请号:US09911780

    申请日:2001-07-24

    IPC分类号: G09G5/00

    摘要: A plurality of column electrode driving circuits is used in a matrix type display device including a plurality of row electrode driving circuits each for driving a plurality of row electrodes and the plurality of column electrode driving circuits each for driving a plurality of column electrodes. Each of the plurality of column electrode driving circuits includes a data input section for receiving a control data signal for the plurality of column electrodes; a timing control section for generating a timing control signal for controlling at least one of the row electrode driving circuit and the column electrode driving circuit; a selection section for selecting one of a signal in synchronization with the timing signal generated by the timing control section and the control data signal input to the data input section, based on the control data signal input to the data input section; and a data output section for outputting one of the signal in synchronization with the timing signal and the control data signal which is selected by the selection section. The data input section of a second column electrode driving circuit of the plurality of column electrode driving circuits is connected to the data output section of a first column electrode driving circuit of the plurality of column electrode driving circuits, and the data output section of the second column electrode driving circuit is connected to the data input section of a third column electrode driving circuit of the plurality of column electrode driving circuits.

    Active-matrix-type liquid crystal display device, data signal line driving circuit, and liquid crystal display device driving method
    6.
    发明授权
    Active-matrix-type liquid crystal display device, data signal line driving circuit, and liquid crystal display device driving method 有权
    有源矩阵型液晶显示装置,数据信号线驱动电路以及液晶显示装置的驱动方法

    公开(公告)号:US06677925B1

    公开(公告)日:2004-01-13

    申请号:US09656007

    申请日:2000-09-06

    IPC分类号: G09G336

    CPC分类号: G09G3/3655

    摘要: In an active-matrix LCD device, a coupling signal in accordance with a sum of outputs of data signal lines is detected by a detection-use bus line crossing each of the data signal lines. The coupling signal is superimposed via a coupling capacitor on an input signal that serves as a reference, and is inverted and amplified by a inverting-amplifying section, then it is outputted as a common electrode signal. With this, a waveform that corresponds to a sum of the outputs is coupled with the common electrode signal. As a result, the common electrode signal is caused to have an influence that corresponds to a fluctuation of a potential of the common electrode due to outputs of the data signal lines and that is reverse in phase, thereby enabling to prevent horizontal shadow due to the outputs of the data signal lines. Thus, it is possible to realize an active-matrix-type LCD device in which horizontal shadow can be prevented with low power consumption.

    摘要翻译: 在有源矩阵LCD装置中,通过与每条数据信号线交叉的检测用总线来检测根据数据信号线的输出之和的耦合信号。 耦合信号通过耦合电容器叠加在作为参考的输入信号上,并由反相放大部分反相放大,然后作为公共电极信号输出。 由此,与输出的和对应的波形与公共电极信号耦合。 结果,使公共电极信号由于数据信号线的输出而相应于公共电极的电位的波动并且相位相反的影响,从而能够防止由于 数据信号线的输出。 因此,可以实现能够以低功耗来防止水平阴影的有源矩阵型LCD装置。

    Method and circuit for driving liquid crystal panel
    7.
    发明授权
    Method and circuit for driving liquid crystal panel 失效
    液晶面板驱动方法及电路

    公开(公告)号:US6118421A

    公开(公告)日:2000-09-12

    申请号:US721717

    申请日:1996-09-27

    IPC分类号: G02F1/133 G09G3/20 G09G3/36

    摘要: A method for driving a liquid crystal panel including a plurality of pixel electrodes arranged in a matrix, a plurality of data lines respectively connected to the pixel electrodes in a plurality of columns, a plurality of gate lines respectively connected to the pixel electrodes in a plurality of rows, and a plurality of switching devices, respectively connected to the pixel electrodes, for connecting and disconnecting the corresponding pixel electrode and the corresponding data line based on a signal sent from the corresponding gate line. The method includes the step of applying a driving voltage having a waveform corresponding to image data used for display to each data line while inverting the driving voltage gate line by gate line and frame by frame, so as to maintain an average value of the driving voltage in each frame within a certain range.

    摘要翻译: 一种用于驱动液晶面板的方法,所述液晶面板包括以矩阵形式布置的多个像素电极,分别连接到多个像素电极的多条数据线,分别连接到多个像素电极的多条栅极线 以及分别连接到像素电极的多个开关装置,用于基于从相应的栅极线发送的信号连接和断开对应的像素电极和相应的数据线。 该方法包括以下步骤:将具有对应于用于显示的图像数据的波形的驱动电压施加到每个数据线,同时通过栅极线和逐帧反相驱动电压栅极线,以便保持驱动电压的平均值 在每个帧内在一定范围内。

    Information display device capable of increasing detection speed and
detection accuracy of input coordinates on display screen by detecting
movement amount of electronic pen
    8.
    发明授权
    Information display device capable of increasing detection speed and detection accuracy of input coordinates on display screen by detecting movement amount of electronic pen 失效
    信息显示装置,通过检测电子笔的移动量,能够提高显示画面上的输入坐标的检测速度和检测精度

    公开(公告)号:US5631670A

    公开(公告)日:1997-05-20

    申请号:US329252

    申请日:1994-10-26

    CPC分类号: G06F3/0412 G09G3/3648

    摘要: There is provided an information display device in which speed of detecting input coordinates on a display screen is increased. A coordinate detection circuit 7 detects indication coordinates at a tip end of an electronic pen 6 based on an induction voltage induced at a detection electrode of the electronic pen 6 in scanning a row electrode G and a column electrode S. A coordinate output circuit 17 obtains indication coordinates at the tip end of the electronic pen 6 based on a movement amount detection signal from a movement amount detecting section 20 of the electronic pen 6. A coordinate signal generating circuit 18 outputs an x-coordinate signal and a y-coordinate signal by combining the indication coordinates detected by the coordinate detection circuit 7 and the indication coordinates obtained by the coordinate output circuit 17. Thus by filling an interval between the indication coordinates detected by the coordinate detection circuit 7 with indication coordinates obtained by the coordinate output circuit 17, an apparent detection speed of the input coordinates can be increased.

    摘要翻译: 提供了一种信息显示装置,其中检测显示屏幕上的输入坐标的速度增加。 坐标检测电路7基于在扫描行电极G和列电极S时在电子笔6的检测电极感应的感应电压来检测电子笔6的尖端处的指示坐标。坐标输出电路17获得 基于来自电子笔6的移动量检测部20的移动量检测信号,电子笔6的前端的指示坐标。坐标信号生成电路18输出x坐标信号和y坐标信号 组合由坐标检测电路7检测的指示坐标和由坐标输出电路17获得的指示坐标。因此,通过将由坐标检测电路7检测到的指示坐标之间的间隔填充到由坐标输出电路17获得的指示坐标, 可以增加输入坐标的表观检测速度。

    Synchronizing circuit
    10.
    发明授权
    Synchronizing circuit 失效
    同步电路

    公开(公告)号:US5319706A

    公开(公告)日:1994-06-07

    申请号:US753902

    申请日:1991-09-03

    摘要: When a specific signal (such as copy guard signal) is added between horizontal synchronizing signals in a composite synchronizing signal, and the addition period of the specific signal is defined in a specific period on the basis of the vertical synchronizing signal, the composite synchronizing signal is masked to remove the specific signal, thereby obtaining a masked composite synchronizing signal. Afterwards, from the masked composite synchronizing signal, the horizontal synchronizing signal and vertical synchronizing signal are obtained. In the case of composite synchronizing signal containing noise, without masking, the horizontal synchronizing signal and vertical synchronizing signal are directly obtained from the composite synchronizing signal. Therefore, when noise is not present, the horizontal synchronizing signal and vertical synchronizing signal may be obtained without disturbing the video image.

    摘要翻译: 当在复合同步信号中的水平同步信号之间添加特定信号(例如复制保护信号),并且基于垂直同步信号在特定周期内定义特定信号的相加周期时,复合同步信号 被掩蔽以去除特定信号,从而获得掩蔽的复合同步信号。 之后,从掩蔽的复合同步信号中获得水平同步信号和垂直同步信号。 在包含噪声的复合同步信号的情况下,没有掩蔽,从复合同步信号直接获得水平同步信号和垂直同步信号。 因此,当不存在噪声时,可以获得水平同步信号和垂直同步信号而不干扰视频图像。