Techniques for manufacturing slanted structures

    公开(公告)号:US11550083B2

    公开(公告)日:2023-01-10

    申请号:US16909573

    申请日:2020-06-23

    Abstract: A surface-relief grating comprises a plurality of grating ridges including a first material, and a layer of a second material conformally deposited on surfaces of the plurality of grating ridges. A first region of the surface-relief grating is characterized by a first grating depth and a first duty cycle greater than a first threshold value. A second region of the surface-relief grating is characterized by a second grating depth and a second duty cycle lower than a second threshold value that is lower than the first threshold value. A difference between the first grating depth and the second grating depth is less than 20% of the second grating depth.

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