公开(公告)号：US20200011661A1

公开(公告)日：2020-01-09

申请号：US16502106

申请日：2019-07-03

Applicant: Mitutoyo Corporation

Inventor： Akihide Kimura

IPC: G01B11/27 ,  G01B11/24 ,  G01D5/347 ,  G01D5/38

Abstract: The present invention provides an optical angle sensor capable of detecting a wide range of angles with high resolution, having no scale, and specifying a reference angle. The optical angle sensor includes a light source for irradiating light, a reflection means for rotating around a predetermined axis as a measurement axis and reflecting the light irradiated from the light source, a light receiving means for receiving the light irradiated from the light source, and a calculation means for calculating the light received by the light receiving means as a signal. The light receiving means receives the light irradiated from the light source through the reflection means. The calculation means includes a specifying means for specifying the reference angle based on the light received by the light receiving means, and an angle calculating unit for calculating an absolute angle based on the light received by the light receiving means and the reference angle specified by the specifying means.

公开(公告)号：US10302466B2

公开(公告)日：2019-05-28

申请号：US15858218

申请日：2017-12-29

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason ,  Norman Laman ,  Akihide Kimura ,  Shu Hirata

IPC: G01D5/347

Abstract: An optical encoder configuration comprises a scale, an illumination source, and a photodetector configuration. The illumination source is configured to output structured illumination to the scale. The scale extends along a measuring axis direction and is configured to output scale light that forms a detector fringe pattern comprising periodic high and low intensity bands that extend over a relatively longer dimension along the measuring axis direction and are relatively narrow and periodic along a detected fringe motion direction transverse to the measuring axis direction. The high and low intensity bands move along the detected fringe motion direction transverse to the measuring axis direction as the scale grating displaces along the measuring axis direction. The photodetector configuration is configured to detect a displacement of the high and low intensity bands along the detected fringe motion direction and provide respective spatial phase displacement signals that are indicative of the scale displacement.

公开(公告)号：US20190004142A1

公开(公告)日：2019-01-03

申请号：US15942135

申请日：2018-03-30

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason ,  Norman Laman ,  Akihide Kimura ,  Shu Hirata

IPC: G01S3/783 ,  G01D5/347 ,  G01D5/244 ,  G01S3/781

Abstract: An optical encoder configuration comprises a scale, an illumination source, and a photodetector configuration. The illumination source is configured to output structured illumination to the scale. The scale extends along a measuring axis direction and is configured to output scale light that forms a detector fringe pattern comprising periodic high and low intensity bands that extend over a relatively longer dimension along the measuring axis direction and are relatively narrow and periodic along a detected fringe motion direction transverse to the measuring axis direction. The high and low intensity bands move along the detected fringe motion direction transverse to the measuring axis direction as the scale grating displaces along the measuring axis direction. The photodetector configuration is configured to detect a displacement of the high and low intensity bands along the detected fringe motion direction and provide respective spatial phase displacement signals that are indicative of the scale displacement.

公开(公告)号：US20190003858A1

公开(公告)日：2019-01-03

申请号：US15858218

申请日：2017-12-29

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason ,  Norman Laman ,  Akihide Kimura ,  Shu Hirata

IPC: G01D5/347

Abstract: An optical encoder configuration comprises a scale, an illumination source, and a photodetector configuration. The illumination source is configured to output structured illumination to the scale. The scale extends along a measuring axis direction and is configured to output scale light that forms a detector fringe pattern comprising periodic high and low intensity bands that extend over a relatively longer dimension along the measuring axis direction and are relatively narrow and periodic along a detected fringe motion direction transverse to the measuring axis direction. The high and low intensity bands move along the detected fringe motion direction transverse to the measuring axis direction as the scale grating displaces along the measuring axis direction. The photodetector configuration is configured to detect a displacement of the high and low intensity bands along the detected fringe motion direction and provide respective spatial phase displacement signals that are indicative of the scale displacement.

公开(公告)号：US10168189B1

公开(公告)日：2019-01-01

申请号：US15637750

申请日：2017-06-29

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason ,  Akihide Kimura ,  Shu Hirata

IPC: G01D5/347

Abstract: An optical encoder configuration comprises an illumination portion, a scale, and a photodetector configuration. The illumination portion transmits source light to a scale which outputs a periodic scale light pattern to the photodetector configuration. The photodetector configuration comprises a set of N spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis comprising two outer spatial phase detectors at a start and end of the sequence along the direction transverse to the measuring axis. At least a majority of the respective spatial phase detectors are relatively elongated along the measuring axis direction and relatively narrow along the direction perpendicular to the measuring axis direction, and comprise periodic scale light receptor areas positioned corresponding to a respective spatial phase of that spatial phase detector relative to the periodic scale light pattern, and are configured to provide a respective spatial phase detector signal.

公开(公告)号：US10094685B2

公开(公告)日：2018-10-09

申请号：US15391243

申请日：2016-12-27

Applicant: MITUTOYO CORPORATION

Inventor： Akihide Kimura ,  Joseph Daniel Tobiason

IPC: G01D5/34 ,  G01D5/347

Abstract: A detection head movable relative to a scale detects diffracted light and outputs a detection result. The diffracted light is diffracted by an incremental pattern. A signal processing unit calculates a relative displacement between the scale and the detection head. The detection head includes: a light source emitting the light to the scale; and a detection unit including a light-receiving unit in which a plurality of light-receiving elements that output a detection signal are arranged. The number of the plurality of light-receiving elements is an even number. A period of the arrangement of the plurality of light-receiving elements is an odd-number multiple of a fundamental period. The fundamental period is a period of interference fringes formed on the light-receiving unit by +1st and −1st order diffracted lights. A width of the light-receiving element is not equal to an integral multiple of the fundamental period.

公开(公告)号：US20170030745A1

公开(公告)日：2017-02-02

申请号：US15220487

申请日：2016-07-27

Applicant: MITUTOYO CORPORATION

Inventor： Akihide Kimura

IPC: G01D5/26

CPC classification number: G01D5/266 ,  G01D5/38

Abstract: A displacement detecting device includes a main scale and a detecting head unit. The detecting head unit includes a light source, a light receiving unit, and an index scale group that is disposed in the middle of a light path from the main scale to the light receiving unit. The index scale group includes two or more index scales including diffraction gratings, respectively. A positive s-th order diffracted light and a negative s-th order diffracted light of diffracted lights from the main scale are used as the signal lights. The displacement detecting device satisfies a first condition and a second condition, the first condition being expressed as follows: λ×(u1−u2)×(mN÷g)=2×sin α, the second condition being expressed as follows: λ×u1×(mN÷g)−sin α≠λ÷g×Σi=1N (ti×mi),

Abstract translation: 位移检测装置包括主标尺和检测头单元。 检测头单元包括设置在从主标尺到光接收单元的光路中间的光源，光接收单元和指标标度组。 索引刻度组分别包括两个或更多的折射率，包括衍射光栅。 作为信号光，使用来自主标尺的衍射光的正s级衍射光和负s级衍射光。 位移检测装置满足第一条件和第二条件，第一条件表示如下：λ×（u1-u2）×（mN÷g）= 2×sinα，第二条件表示如下：λ× u1×（mN÷g）-sinα≠λ÷g×Σi= 1N（ti×mi），

公开(公告)号：US20160116757A1

公开(公告)日：2016-04-28

申请号：US14919188

申请日：2015-10-21

Applicant: Mitutoyo Corporation

Inventor： Akihide Kimura

IPC: G02B27/42 ,  G02B27/14 ,  G01D5/347

Abstract: An optical encoder 10 comprising: a light source 11; a splitter 12 splits a light from the light source 11, a light receiving unit 16; a scale 13 is arranged on a light path and movable in a measurement direction, a grating being arranged on a main surface of the scale; and an offset diffraction grating 14 includes a plurality of diffraction gratings arranged in the optical path from the splitter 12 to the light receiving unit 16, the plurality of diffraction gratings diffracting the split lights with different phases, wherein, the plurality of diffraction gratings 13 in the offset diffraction grating 14 are arranged in one plane parallel to the main surface of the scale and are offset each other in an offset direction orthogonal to the measurement direction, the light receiving unit 16 includes a plurality of light-receiving elements 16-11 to 16-23 arranged in the offset direction.

Abstract translation: 一种光学编码器10，包括：光源11; 分离器12分离来自光源11的光，光接收单元16; 标尺13布置在光路上并可在测量方向上移动，光栅布置在刻度尺的主表面上; 并且偏移衍射光栅14包括布置在从分离器12到光接收单元16的光路中的多个衍射光栅，多个衍射光栅以不同相位衍射分裂光，其中，多个衍射光栅13在 偏移衍射光栅14被布置在与刻度板的主表面平行的一个平面中并且在与测量方向正交的偏移方向上彼此偏移，光接收单元16包括多个光接收元件16-11至 16-23排列在偏移方向。

公开(公告)号：US09068863B2

公开(公告)日：2015-06-30

申请号：US13860158

申请日：2013-04-10

Applicant: MITUTOYO CORPORATION

Inventor： Akihide Kimura

IPC: G01D5/34 ,  G01D5/347

CPC classification number: G01D5/347 ,  G01D5/34

Abstract: A first reference pattern has a plurality of patterns, which are arranged periodically in a measurement axis direction and have the same width in the measurement axis direction. The plurality of patterns have the respective different pitches. At least one of the plurality of patterns is smaller in pitch than a first main signal pattern. A second sensor has a plurality of detection regions which are in one-to-one correspondence with the plurality of patterns of the first reference pattern. An addition calculating section calculates an addition signal by adding up output signals of the plurality of detection regions. A square calculating section calculates a squared signal from the addition signal. A judging section outputs a reference signal for determination of a reference position according to signal levels of the squared signal.

Abstract translation: 第一参考图案具有沿测量轴方向周期性地设置并且在测量轴方向上具有相同宽度的多个图案。 多个图案具有相应的不同间距。 多个图案中的至少一个图案的间距小于第一主信号图案。 第二传感器具有与第一参考图案的多个图案一一对应的多个检测区域。 加法计算部分通过将多个检测区域的输出信号相加来计算加法信号。 平方计算部分根据加法信号计算平方信号。 判断部根据平方信号的信号电平输出用于确定基准位置的基准信号。

公开(公告)号：US20130270428A1

公开(公告)日：2013-10-17

申请号：US13860158

申请日：2013-04-10

Applicant: MITUTOYO CORPORATION

Inventor： Akihide Kimura

IPC: G01D5/347

CPC classification number: G01D5/347 ,  G01D5/34

Abstract: A first reference pattern has a plurality of patterns, which are arranged periodically in a measurement axis direction and have the same width in the measurement axis direction. The plurality of patterns have the respective different pitches. At least one of the plurality of patterns is smaller in pitch than a first main signal pattern. A second sensor has a plurality of detection regions which are in one-to-one correspondence with the plurality of patterns of the first reference pattern. An addition calculating section calculates an addition signal by adding up output signals of the plurality of detection regions. A square calculating section calculates a squared signal from the addition signal. A judging section outputs a reference signal for determination of a reference position according to signal levels of the squared signal.

Abstract translation: 第一参考图案具有沿测量轴方向周期性地设置并且在测量轴方向上具有相同宽度的多个图案。 多个图案具有相应的不同间距。 多个图案中的至少一个图案的间距小于第一主信号图案。 第二传感器具有与第一参考图案的多个图案一一对应的多个检测区域。 加法计算部分通过将多个检测区域的输出信号相加来计算加法信号。 平方计算部分根据加法信号计算平方信号。 判断部根据平方信号的信号电平输出用于确定基准位置的基准信号。