公开(公告)号：US20210333083A1

公开(公告)日：2021-10-28

申请号：US17001328

申请日：2020-08-24

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason

IPC: G01B7/012 ,  G01B9/02

Abstract: A calibration configuration for a chromatic range sensor (CRS) optical probe of a coordinate measurement machine (CMM) includes a cylindrical calibration object and a spherical calibration object. The cylindrical calibration object includes at least a first nominally cylindrical calibration surface having a central axis that extends along a Z direction that is intended to be aligned approximately parallel to a rotation axis of the CRS optical probe. The spherical calibration object includes a nominally spherical calibration surface having a first plurality of surface portions. The CMM is operated to obtain radial distance measurements and determine cylindrical calibration data using radial distance measurements of the cylindrical calibration object and to determine spherical calibration data using radial distance measurements of the spherical calibration object.

公开(公告)号：US11119214B2

公开(公告)日：2021-09-14

申请号：US16563362

申请日：2019-09-06

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason ,  Paul Gerard Gladnick

IPC: G01S17/48 ,  G02B3/00 ,  G02B3/14 ,  H04N5/232

Abstract: A triangulation sensing system includes a projection axis configuration and an imaging axis configuration. The projection axis configuration includes a triangulation light source (e.g. an incoherent source) and a variable focus lens (VFL) that is controlled to rapidly periodically modulate a triangulation light focus position (TLFP) along a Z axis over a focus position scan range, to provide a corresponding triangulation light extended focus range (TLEFR) that supports accurate measurement throughout. In some implementations, the triangulation system may be configured to provide the best measurement accuracy for a workpiece region of interest (WROI) by exposing its triangulation image only when the scanned TLFP temporarily coincides with the WROI Z height. In some implementations, the triangulation system may be configured to limit various measurement operations to using only an operational pixel subset of a detector that receives image light from the WROI, in order to shorten the measurement time.

公开(公告)号：US09029757B2

公开(公告)日：2015-05-12

申请号：US13787742

申请日：2013-03-06

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason

IPC: G01D5/347

CPC classification number: G01D5/34715 ,  G01D5/34792

Abstract: An illumination portion of an optical encoder comprising a scale track extending along a measuring axis direction, an imaging portion, and a detector configuration. The illumination portion comprises: a light source configured to output source light; a collimation portion; and a structured illumination generating portion comprising a beam-separating portion and an illumination grating and configured to input the source light and output structured illumination to the scale track. The beam-separating portion is arranged to input the source light and output a first source light portion and a second source light portion to the illumination grating, such that they form beams that are spaced apart from one another along the measuring axis direction. The illumination grating is configured to diffract the first and second source light portions to the scale track such that only two orders of diffracted light overlap within an imaged region.

Abstract translation: 光学编码器的照明部分包括沿测量轴方向延伸的刻度轨道，成像部分和检测器配置。 照明部分包括：被配置为输出源光的光源; 准直部分 以及结构化照明产生部分，其包括光束分离部分和照明光栅，并被配置为输入源光并将结构化照明输出到刻度轨道。 光束分离部分被布置成输入源光并将第一源光部分和第二源光部分输出到照明光栅，使得它们形成沿着测量轴线方向彼此间隔开的光束。 照明光栅被配置为将第一和第二源光部分衍射到刻度轨道，使得在成像区域内只有两个衍射光重叠。

公开(公告)号：US11326865B2

公开(公告)日：2022-05-10

申请号：US17001328

申请日：2020-08-24

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason

IPC: G01B9/02 ,  G01B7/012

Abstract: A calibration configuration for a chromatic range sensor (CRS) optical probe of a coordinate measurement machine (CMM) includes a cylindrical calibration object and a spherical calibration object. The cylindrical calibration object includes at least a first nominally cylindrical calibration surface having a central axis that extends along a Z direction that is intended to be aligned approximately parallel to a rotation axis of the CRS optical probe. The spherical calibration object includes a nominally spherical calibration surface having a first plurality of surface portions. The CMM is operated to obtain radial distance measurements and determine cylindrical calibration data using radial distance measurements of the cylindrical calibration object and to determine spherical calibration data using radial distance measurements of the spherical calibration object.

公开(公告)号：US10295378B2

公开(公告)日：2019-05-21

申请号：US15702520

申请日：2017-09-12

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason ,  Norman Laman ,  Akihide Kimura ,  Shu Hirata

IPC: G01D5/347 ,  G01D5/244

Abstract: An optical encoder configuration comprises a scale, an illumination source, and a photodetector configuration. The illumination source is configured to output structured illumination to the scale. The scale extends along a measuring axis direction and is configured to output scale light that forms a detector fringe pattern comprising periodic high and low intensity bands that extend over a relatively longer dimension along the measuring axis direction and are relatively narrow and periodic along a detected fringe motion direction transverse to the measuring axis direction. The high and low intensity bands move along the detected fringe motion direction transverse to the measuring axis direction as the scale grating displaces along the measuring axis direction. The photodetector configuration is configured to detect a displacement of the high and low intensity bands along the detected fringe motion direction and provide respective spatial phase displacement signals that are indicative of the scale displacement.

公开(公告)号：US10274344B2

公开(公告)日：2019-04-30

申请号：US16012064

申请日：2018-06-19

Applicant: MITUTOYO CORPORATION

Inventor： Akihide Kimura ,  Joseph Daniel Tobiason

IPC: G01D5/34 ,  G01D5/347 ,  G01D5/38

Abstract: A detection head movable relative to a scale detects diffracted light and outputs a detection result. The diffracted light is diffracted by an incremental pattern. A signal processing unit calculates a relative displacement between the scale and the detection head. The detection head includes: a light source emitting the light to the scale; and a detection unit including a light-receiving unit receiving the diffracted light through an optical element, in which the light-receiving elements outputting detection signals are periodically arranged with a predetermined period. The number of the plurality of light-receiving elements is an even number. The predetermined period is a value obtained by multiplying a fundamental period by an odd-number. The fundamental period is a period of interference fringes formed on the light-receiving unit by +1st and −1st order diffracted lights. A width of the light-receiving element is not equal to an integral multiple of the fundamental period.

公开(公告)号：US09018578B2

公开(公告)日：2015-04-28

申请号：US13717586

申请日：2012-12-17

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason ,  Eric Herbert Altendorf

IPC: G01D5/34 ,  G01D5/347 ,  G01D5/245

CPC classification number: G01D5/34715 ,  G01D5/2455 ,  G01D5/34792

Abstract: A flexible optical displacement encoder configuration uses a source grating to illuminate a scale with structured light such that light from the scale is modulated with a beat frequency envelope which may have a relatively coarse pitch that matches a desired detector pitch. An imaging configuration provides spatial filtering to remove the high spatial frequencies from the modulation envelope to provide a clean signal in the detected fringe pattern. This combination of elements allows an incremental scale track pattern with a relatively finer pitch (e.g., 4, 5, 8 microns) to provide fringes with a coarser pitch (e.g., 20 microns) at a detector. Various scale resolutions can use a corresponding source grating such that all combinations can produce detector fringes that match the same economical detector component.

Abstract translation: 灵活的光学位移编码器配置使用源光栅来用结构化光照射刻度，使得来自刻度的光以具有与期望的检测器间距匹配的相对较粗的间距的拍频包络进行调制。 成像配置提供空间滤波以从调制包络去除高空间频率，以在检测到的条纹图案中提供干净的信号。 元件的这种组合允许具有较细间距（例如，4,5,8微米）的增量刻度轨道图案在检测器处提供具有较粗间距（例如20微米）的条纹。 各种尺度分辨率可以使用相应的光栅光栅，使得所有组合可以产生与相同的经济检测器部件匹配的检测器条纹。

公开(公告)号：US20140263987A1

公开(公告)日：2014-09-18

申请号：US14290846

申请日：2014-05-29

Applicant: Mitutoyo Corporation

Inventor： Joseph Daniel Tobiason

IPC: G01D5/347

CPC classification number: G01D5/34792 ,  G01D5/34715

Abstract: A flexible optical displacement encoder configuration uses a source grating to illuminate a scale with structured light such that light from the scale is modulated with a beat frequency envelope, which may have a relatively coarse pitch that matches a desired detector pitch. An imaging configuration provides spatial filtering to remove the high spatial frequencies from the modulation envelope to provide a clean signal in the detected fringe pattern. This combination of elements allows an incremental scale track pattern with a relatively finer pitch (e.g., 4, 5, 8 microns) to provide fringes with a coarser pitch (e.g., 20 microns) at a detector. Various scale resolutions can use a corresponding source grating such that all combinations can produce detector fringes that match the same economical detector component.

Abstract translation: 灵活的光学位移编码器配置使用源光栅来照射具有结构光的刻度，使得来自刻度尺的光以节拍频率包络进行调制，拍子频率包络可以具有与期望的检测器间距匹配的相对较粗的间距。 成像配置提供空间滤波以从调制包络去除高空间频率，以在检测到的条纹图案中提供干净的信号。 元件的这种组合允许具有较细间距（例如，4,5,8微米）的增量刻度轨道图案在检测器处提供具有较粗间距（例如20微米）的条纹。 各种尺度分辨率可以使用相应的光栅光栅，使得所有组合可以产生与相同的经济检测器部件匹配的检测器条纹。

公开(公告)号：US20130161500A1

公开(公告)日：2013-06-27

申请号：US13730790

申请日：2012-12-28

Applicant: Mitutoyo Corporation

Inventor： Yong Xie ,  Joseph Daniel Tobiason

IPC: F21V5/04

CPC classification number: F21V5/04 ,  F21V9/14 ,  G01D5/34715 ,  G01D5/34792

Abstract: An illumination portion is used in an optical encoder which comprises a scale grating, an imaging portion, and a detector portion. A light source outputs light having a wavelength λ. A structured illumination generating portion inputs the light and outputs structured illumination. The structured illumination comprises an illumination fringe pattern oriented transversely to the measuring axis direction. A first filtering lens focuses the structured illumination proximate to a plane of the spatial filter aperture configuration. A spatial filtering aperture configuration includes a central portion that blocks zero-order portions of the structured illumination and an open aperture portion that outputs +1 order and −1 order portions of the structured illumination to a second filtering lens. The second filtering lens outputs the structured illumination to a plane of the scale grating with an illumination fringe pitch PMI along the measuring axis direction at a plane coinciding with the scale grating.

Abstract translation: 在光学编码器中使用照明部分，其包括刻度光栅，成像部分和检测器部分。 光源输出具有波长λ的光。 结构照明产生部分输入光并输出结构照明。 结构照明包括横向于测量轴方向定向的照明条纹图案。 第一滤波透镜将结构化照明近似于空间滤光器孔径配置的平面聚焦。 空间滤波孔径构造包括阻挡结构化照明的零级部分的中心部分和将结构化照明的+1级和-1级部分输出到第二滤光透镜的开口部分。 第二滤波透镜在与刻度光栅重合的平面处沿着测量轴方向将结构化照明输出到刻度光栅的平面，具有照明条纹间距PMI。

公开(公告)号：US11714051B2

公开(公告)日：2023-08-01

申请号：US17538774

申请日：2021-11-30

Applicant: Mitutoyo Corporation

Inventor： Paul Gerard Gladnick ,  Joseph Daniel Tobiason

IPC: G01N21/95 ,  G01N21/88

CPC classification number: G01N21/95 ,  G01N21/8806 ,  G01N21/8851

Abstract: A metrology system includes front and back vision components portions. The front vision components portion includes a light source, camera, variable focal length (VFL) lens, and objective lens defining an optical axis. The back vision components portion may include a reflective surface and a polarization altering component. A workpiece with apertures is located between the front and back vision components portions. For each aperture of the workpiece, the system adjusts a relative position between the front vision components portion and the workpiece to align its optical axis with each aperture such that light from the light source passes through the aperture and is reflected by the reflective surface of the back vision components portion. The system uses the VFL lens and camera to acquire an image stack including images of the aperture, and analyzes the image stack to determine a measurement related to a workpiece feature of the aperture.