Magnetic field sensor and instrument comprising such a sensor
    31.
    发明授权
    Magnetic field sensor and instrument comprising such a sensor 失效
    包括这种传感器的磁场传感器和仪器

    公开(公告)号:US5686837A

    公开(公告)日:1997-11-11

    申请号:US423607

    申请日:1995-04-17

    IPC分类号: G01R33/09 G11B5/39 H01L43/08

    CPC分类号: G01R33/09

    摘要: A magnetic field sensor is composed of layered magnetoresistive elements which are arranged in a bridge on a substrate. The magnetoresistive elements comprise two ferromagnetic layers which exhibit an uni-axial anisotropy in one plane and are separated by a non-ferromagnetic layer. During the manufacture of the sensor the magnetization directions of these ferromagnetic layers are laid down so that two elements in two adjacent branches of the bridge exhibit an opposed sensitivity to external magnetic fields. Moreover, in each magnetoresistive element the magnetization of a ferromagnetic layer is adjusted substantially perpendicularly to the magnetization direction of the other ferromagnetic layer. As a result auxiliary fields are no longer required for the measurement of small magnetic fields and the sensor is substantially free of hysteresis and has an enhanced linearity.

    摘要翻译: 磁场传感器由布置在基板上的桥中的分层磁阻元件组成。 磁阻元件包括两个铁磁层,它们在一个平面中表现出单轴各向异性,并被非铁磁层分开。 在制造传感器期间,放置这些铁磁层的磁化方向,使得桥的两个相邻分支中的两个元件对外部磁场表现出相对的灵敏度。 此外,在每个磁阻元件中,铁磁层的磁化基本上垂直于另一个铁磁层的磁化方向调节。 因此,不需要辅助场来测量小磁场,并且传感器基本上没有滞后并且具有增强的线性度。