公开(公告)号：US20220301789A1

公开(公告)日：2022-09-22

申请号：US17690869

申请日：2022-03-09

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Enri DUQI ,  Gabriele GATTERE ,  Carlo VALZASINA

IPC: H01H13/14 ,  G01L1/16 ,  H01H13/06 ,  H01L41/113 ,  B81B3/00

Abstract: Button device comprising: a fixed support structure; a movable structure, laterally surrounded by said support structure and configured to deform at least in part under the action of an external force; and a fluid-tight protection cap. The movable structure includes a piston element, deformable elements having piezoelectric transducers arranged thereon, and anchor elements that couple the piston element to the deformable elements. When an external force acts on the piston element, the anchor elements transfer this force to the deformable elements and to the piezoelectric transducers, so as to sense the extent of this force.

公开(公告)号：US20210293597A1

公开(公告)日：2021-09-23

申请号：US17204664

申请日：2021-03-17

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Gabriele GATTERE ,  Francesco RIZZINI ,  Luca GUERINONI ,  Lorenzo CORSO ,  Domenico GIUSTI

IPC: G01F1/84

Abstract: Embodiments of a Coriolis-force-based flow sensing device and embodiments of methods for manufacturing embodiments of the Coriolis-force-based flow sensing device, comprising the steps of: forming a driving electrode; forming, on the driving electrode, a first sacrificial region; forming, on the first sacrificial region, a first structural portion with a second sacrificial region buried therein; forming openings for selectively etching the second sacrificial region; forming, within the openings, a porous layer having pores; removing the second sacrificial region through the pores of the porous layer, forming a buried channel; growing, on the porous layer and not within the buried channel, a second structural portion that forms, with the first structural region, a structural body; selectively removing the first sacrificial region thus suspending the structural body on the driving electrode.