ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME
    33.
    发明申请
    ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME 有权
    超声波传感器及其制造方法

    公开(公告)号:US20160020709A1

    公开(公告)日:2016-01-21

    申请号:US14701580

    申请日:2015-05-01

    CPC classification number: B06B1/0292

    Abstract: An ultrasonic transducer and a method of manufacturing the same are provided. The ultrasonic transducer includes a substrate, a first insulation layer, and a first thin film layer; a plurality of support members formed on the first thin film layer; a second thin film layer supported by the plurality of support members; a cavity between the first thin film layer and the second thin film layer; and a common ground electrode on the second thin film layer.

    Abstract translation: 提供了一种超声换能器及其制造方法。 超声波换能器包括基板,第一绝缘层和第一薄膜层; 形成在所述第一薄膜层上的多个支撑构件; 由所述多个支撑构件支撑的第二薄膜层; 第一薄膜层和第二薄膜层之间的空腔; 以及第二薄膜层上的公共接地电极。

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