公开(公告)号：US20050127292A1

公开(公告)日：2005-06-16

申请号：US11008477

申请日：2004-12-09

申请人： Min-Sub Kang ,  Sang-Kil Lee ,  Kwang-Sik Kim ,  Kyung-Ho Jung ,  Sung-Joong Kim

发明人： Min-Sub Kang ,  Sang-Kil Lee ,  Kwang-Sik Kim ,  Kyung-Ho Jung ,  Sung-Joong Kim

IPC分类号： H01L21/66 ,  G01Q10/04 ,  H01J37/22 ,  H01J37/28 ,  H01L21/027

CPC分类号： H01J37/28 ,  G06K9/0014 ,  H01J2237/2814 ,  H01J2237/2817

摘要： A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the inspection pattern. A determination is made as to whether the inspection pattern is defective by comparing the scanning electron microscope picture of the inspection pattern to a scanning electron microscope picture of a sample pattern, and by comparing the scanning electron microscope secondary electron signal profile of the inspection pattern to a scanning electron microscope secondary electron signal profile of a sample pattern.

摘要翻译： 通过获取检查图案的扫描电子显微镜图像并获取检查图案的扫描电子显微镜二次电子信号轮廓来检查图案。 通过将检查图案的扫描电子显微镜照片与样品图案的扫描电子显微镜照片进行比较，并将检查图案的扫描电子显微镜二次电子信号轮廓与 样品图案的扫描电子显微镜二次电子信号轮廓。

公开(公告)号：US20050041255A1

公开(公告)日：2005-02-24

申请号：US10914149

申请日：2004-08-10

申请人： Pil-Sik Hyun ,  Sun-Jin Kang ,  Sang-Kil Lee ,  Kyung-Ho Jung

发明人： Pil-Sik Hyun ,  Sun-Jin Kang ,  Sang-Kil Lee ,  Kyung-Ho Jung

IPC分类号： G01B11/06 ,  H01L21/66 ,  G01B9/02

CPC分类号： G01B11/0641

摘要： In an apparatus and a method of measuring a thickness of a multilayer on a substrate, a spectrum of reflected light reflected from the substrate is measured. A plurality of recipe data, each corresponding to one of a plurality of hypothetical multilayers, is stored. One of the plurality of hypothetical multilayers is initially assumed to be the multilayer actually formed on the substrate. A plurality of theoretical spectra is calculated using one of the plurality of recipe data in accordance with various theoretical thicknesses of one of the plurality of hypothetical multilayers. The measured spectrum is compared with the plurality of theoretical spectra to determine a temporary thickness of the multilayer. A reliability of the temporary thickness of the multilayer is estimated. The temporary thickness is output as a thickness of the multilayer on the substrate when the reliability of the temporary thickness is within an allowable range.