公开(公告)号：US20050173770A1

公开(公告)日：2005-08-11

申请号：US10986635

申请日：2004-11-12

申请人： Kelly Linden ,  Mark Helsel ,  Dean Brown ,  Randall Sprague ,  Wyatt Davis

发明人： Kelly Linden ,  Mark Helsel ,  Dean Brown ,  Randall Sprague ,  Wyatt Davis

IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B26/10 ,  H01L21/78 ,  H04N1/04 ,  H01L21/00 ,  H01L27/14 ,  H01L29/82

CPC分类号： G02B26/0858 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866 ,  G02B26/105

摘要： Devices are formed on a semiconductor wafer in an interdigitated relationship and are released by deep reactive ion etching. MEMS scanners are formed without a surrounding frame. Mounting pads extend outward from torsion arms. Neighboring MEMS scanners are formed with their mounting pads interdigitated such that a regular polygon cannot be formed around a device without also intersecting a portion of one or more neighboring devices. MEMS scanners may be held in their outlines by a metal layer, by small semiconductor bridges, or a combination.

摘要翻译： 器件以交叉关系形成在半导体晶片上，并通过深反应离子蚀刻而释放。 MEMS扫描仪在没有周边框架的情况下形成。 安装垫从扭臂向外延伸。 相邻的MEMS扫描仪形成，其安装垫相互交错，使得不会在设备周围形成正多边形，而不会与一个或多个相邻设备的一部分相交。 MEMS扫描仪可以通过金属层，小型半导体桥或其组合保持在其轮廓中。