公开(公告)号：US20070063134A1

公开(公告)日：2007-03-22

申请号：US11600999

申请日：2006-11-17

申请人： David Wine ,  Mark Helsel ,  Jon Barger ,  Clarence Tegreene

发明人： David Wine ,  Mark Helsel ,  Jon Barger ,  Clarence Tegreene

IPC分类号： H01J3/14 ,  H01J5/16

CPC分类号： G06K7/10633 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/101 ,  G02B27/0149 ,  G02B27/017 ,  G02B27/0172 ,  G02B2027/011 ,  G09G3/02 ,  G09G2320/0285 ,  G09G2320/041 ,  H04N5/74 ,  H04N9/3129

摘要： A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to establish the resonant frequency. The material can be removed by laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the torsion arm and selectively stimulated to migrate into the torsion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetrically distributed masses are removed or added in response to a measured resonant frequency to tune the resonant frequency to a desired resonant frequency. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

摘要翻译： MEM扫描装置具有可变谐振频率。 在一个实施例中，MEM装置包括支撑摆动体的扭转臂。 在一个实施例中，将可移除质量的阵列放置在振荡体的暴露部分上并选择性地去除以建立谐振频率。 材料可以通过激光烧蚀，蚀刻或其他处理方法去除。 在另一种方法中，将迁移材料放置在扭转臂上并选择性地被刺激以迁移到扭转臂中，从而改变扭转臂的机械特性。 改变的机械性能又改变了扭转臂的共振频率。 在另一种方法中，响应于测量的谐振频率去除或添加对称分布的质量，以将谐振频率调谐到期望的谐振频率。 显示装置包括扫描装置和扫描装置扫描关于两个或多个轴，通常以光栅图案扫描。 描述了控制扫描装置的频率响应的各种方法，包括MEMs扫描器的主动控制和无源频率调谐。

公开(公告)号：US20060029295A1

公开(公告)日：2006-02-09

申请号：US11193946

申请日：2005-07-29

申请人： David Wine ,  Mark Helsel ,  Jon Barger ,  Clarence Tegreene

发明人： David Wine ,  Mark Helsel ,  Jon Barger ,  Clarence Tegreene

IPC分类号： G06K9/20

CPC分类号： G06K7/10633 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/101 ,  G02B27/0149 ,  G02B27/017 ,  G02B27/0172 ,  G02B2027/011 ,  G09G3/02 ,  G09G2320/0285 ,  G09G2320/041 ,  H04N5/74 ,  H04N9/3129

摘要： A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to establish the resonant frequency. The material can be removed by laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the torsion arm and selectively stimulated to migrate into the torsion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetrically distributed masses are removed or added in response to a measured resonant frequency to tune the resonant frequency to a desired resonant frequency. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

摘要翻译： MEM扫描装置具有可变谐振频率。 在一个实施例中，MEM装置包括支撑摆动体的扭转臂。 在一个实施例中，将可移除质量的阵列放置在振荡体的暴露部分上并选择性地去除以建立谐振频率。 材料可以通过激光烧蚀，蚀刻或其他处理方法去除。 在另一种方法中，将迁移材料放置在扭转臂上并选择性地被刺激以迁移到扭转臂中，从而改变扭转臂的机械特性。 改变的机械性能又改变了扭转臂的共振频率。 在另一种方法中，响应于测量的谐振频率去除或添加对称分布的质量，以将谐振频率调谐到期望的谐振频率。 显示装置包括扫描装置和扫描装置扫描关于两个或多个轴，通常以光栅图案扫描。 描述了控制扫描装置的频率响应的各种方法，包括MEMs扫描器的主动控制和无源频率调谐。

公开(公告)号：US20050139678A1

公开(公告)日：2005-06-30

申请号：US11062037

申请日：2005-02-18

申请人： Mark Helsel ,  David Wine

发明人： Mark Helsel ,  David Wine

IPC分类号： G02B26/08 ,  G02B26/10 ,  G02B27/01 ,  G02B26/00 ,  G06K7/10

CPC分类号： G02B26/101 ,  G02B26/0833 ,  G02B26/0841 ,  G02B27/017 ,  G02B27/0176

摘要： A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertia of the oscillatory body and a secondary mass carried by the flexible arm. The shifted combined center of mass changes the resonant frequency of the MEMs device. In another embodiment, an absorptive material forms a portion of a torsional arm that supports the oscillatory body. The mechanical properties of the absorptive material can be varied by varying the concentration of a gas surrounding the absorptive material. The varied mechanical properties change the resonant frequency of the scanning device. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

摘要翻译： MEM扫描装置具有可变谐振频率。 在一个实施例中，MEM装置包括从振荡体延伸的柔性臂。 电场向柔性臂施加力，从而弯曲柔性臂以改变振动体的惯性矩和由柔性臂携带的次级质量。 移位的组合质心改变了MEMs器件的谐振频率。 在另一个实施例中，吸收材料形成支撑振荡体的扭转臂的一部分。 可以通过改变吸收材料周围的气体的浓度来改变吸收材料的机械性能。 不同的机械特性改变了扫描装置的谐振频率。 显示装置包括扫描装置和扫描装置扫描关于两个或多个轴，通常以光栅图案扫描。 描述了控制扫描装置的频率响应的各种方法，包括MEMs扫描器的主动控制和无源频率调谐。

公开(公告)号：US20050173770A1

公开(公告)日：2005-08-11

申请号：US10986635

申请日：2004-11-12

申请人： Kelly Linden ,  Mark Helsel ,  Dean Brown ,  Randall Sprague ,  Wyatt Davis

发明人： Kelly Linden ,  Mark Helsel ,  Dean Brown ,  Randall Sprague ,  Wyatt Davis

IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B26/10 ,  H01L21/78 ,  H04N1/04 ,  H01L21/00 ,  H01L27/14 ,  H01L29/82

CPC分类号： G02B26/0858 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866 ,  G02B26/105

摘要： Devices are formed on a semiconductor wafer in an interdigitated relationship and are released by deep reactive ion etching. MEMS scanners are formed without a surrounding frame. Mounting pads extend outward from torsion arms. Neighboring MEMS scanners are formed with their mounting pads interdigitated such that a regular polygon cannot be formed around a device without also intersecting a portion of one or more neighboring devices. MEMS scanners may be held in their outlines by a metal layer, by small semiconductor bridges, or a combination.

摘要翻译： 器件以交叉关系形成在半导体晶片上，并通过深反应离子蚀刻而释放。 MEMS扫描仪在没有周边框架的情况下形成。 安装垫从扭臂向外延伸。 相邻的MEMS扫描仪形成，其安装垫相互交错，使得不会在设备周围形成正多边形，而不会与一个或多个相邻设备的一部分相交。 MEMS扫描仪可以通过金属层，小型半导体桥或其组合保持在其轮廓中。

公开(公告)号：US20060082852A1

公开(公告)日：2006-04-20

申请号：US11287678

申请日：2005-11-28

申请人： David Wine ,  Mark Helsel ,  Clarence Tegreene

发明人： David Wine ,  Mark Helsel ,  Clarence Tegreene

IPC分类号： G02B26/08

CPC分类号： G02B26/105 ,  G02B26/085

摘要： A beam scanner is operable to scan light in two or more axes, typically in a raster pattern that includes a fast scan axis and a slow scan axis. Plural beams of light are scanned, each beam of light producing a scanned region that at least partially overlaps at least one adjoining scanned region. Scanned regions may be aligned to adjoin and overlap along a dimension corresponding to the slow scan axis. The beam scanner may comprise a scanned beam display and/or a scanned beam image capture device. In a display, the power level of overlapping displayed pixels may be scaled to provide smooth transitions between adjoining regions to improve the image quality presented to a viewer. In an image capture device, one or more detectors is operable to collect light scattered from adjoining regions and a controller is operable to produce an image from the scanned regions.

摘要翻译： 光束扫描器可操作以扫描两个或多个轴的光，通常以包括快扫描轴和慢扫描轴的光栅图案。 扫描多个光束，每个光束产生至少部分地重叠至少一个邻接的扫描区域的扫描区域。 扫描的区域可以对齐以邻接并且沿着与慢扫描轴对应的尺寸重叠。 束扫描器可以包括扫描束显示器和/或扫描束图像捕获装置。 在显示器中，重叠的显示像素的功率电平可以被缩放以在相邻区域之间提供平滑的过渡，以改善呈现给观看者的图像质量。 在图像捕获装置中，一个或多个检测器可操作以收集从相邻区域散射的光，并且控制器可操作以从扫描区域产生图像。