公开(公告)号：US20080156773A1

公开(公告)日：2008-07-03

申请号：US11904374

申请日：2007-09-27

申请人： Keita Kitade ,  Osamu Matsushita ,  Takashi Fujita ,  Toshiyuki Yokoyama

发明人： Keita Kitade ,  Osamu Matsushita ,  Takashi Fujita ,  Toshiyuki Yokoyama

IPC分类号： C23F1/00

CPC分类号： B24B37/013 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

摘要： To provide an end point detection method applying a resonance phenomenon, an end point detection apparatus, and a chemical mechanical polishing apparatus on which the detection apparatus is loaded for monitoring variation in the thickness of an electrically conductive film in real time, reliably detecting a polishing end point of the electrically conductive film at high accuracy, without generating noise, low power consumption, and capable of reducing the cost.In order to achieve above described objects, the present invention provides an end point detection method applying a resonance phenomenon in which a polishing end point is detected when the electrically conductive film is polished and removed to an appropriate thickness, wherein a sensor 37 composed of an oscillation circuit of the Colpitts type or the like having a planar inductor and a concentrated constant capacitor is used, and the variation in the thickness of the electrically conductive film is monitored in real time from the variation in the oscillation frequency of the sensor 37 caused along with the variation in the thickness of the electrically conductive film opposed to the planar inductor.

摘要翻译： 为了提供应用共振现象的终点检测方法，终点检测装置和化学机械抛光装置，其上装有检测装置以实时监测导电膜的厚度的变化，可靠地检测抛光 导电膜的终点高精度，不产生噪声，低功耗，并且能够降低成本。 为了实现上述目的，本发明提供一种应用共振现象的端点检测方法，其中当导电膜被抛光并去除到适当的厚度时，其中检测到抛光终点，其中传感器37由 使用具有平面电感器和集中恒定电容器的Colpitts型等的振荡电路，并且根据传感器37的振荡频率的变化实时监测导电膜的厚度变化 导电膜的厚度与平面电感器相对的变化。

公开(公告)号：US20060098952A1

公开(公告)日：2006-05-11

申请号：US11123818

申请日：2005-05-06

申请人： Masahiro Fujimoto ,  Hiroaki Tachibana ,  Toshiyuki Yokoyama

发明人： Masahiro Fujimoto ,  Hiroaki Tachibana ,  Toshiyuki Yokoyama

IPC分类号： H04N7/26 ,  H04N5/225

CPC分类号： H04N5/23241 ,  G11B20/10 ,  H04N19/156 ,  H04N19/162 ,  H04N19/177 ,  H04N19/40 ,  H04N19/61

摘要： Conventional transcoding techniques cannot generate a continuous encoded stream when the transcode operation is interrupted due to insufficient power, etc. and later resumed, causing a degradation in the quality of the image or sound at the point of interruption. A transcoding technique of the present invention determines whether a transcode operation is to be interrupted due to power failure, etc. and if so, stores coding information required to resume the transcode operation at the point of interruption.

摘要翻译： 当代码转换操作由于功率不足等而中断并且稍后恢复时，传统的代码转换技术不能产生连续的编码流，从而导致中断点处的图像或声音的质量下降。 本发明的代码转换技术确定代码转换操作是否由于电源故障等而被中断，如果是，则存储在中断点恢复转码操作所需的编码信息。

公开(公告)号：US06253591B1

公开(公告)日：2001-07-03

申请号：US09520610

申请日：2000-03-07

申请人： Mitsuru Sayama ,  Shin Ihara ,  Kazuya Okada ,  Toshiyuki Yokoyama

发明人： Mitsuru Sayama ,  Shin Ihara ,  Kazuya Okada ,  Toshiyuki Yokoyama

IPC分类号： B21D706

CPC分类号： B21D7/00 ,  B21D11/00

摘要： A method for bending a metallic flanged member includes the steps of applying a compressive force to a flange 2 of a metallic flanged member 1 in a direction that intersects a longitudinal direction of the metallic member for compression plastic deformation of the flange, and thereafter bending the metallic flanged member 1 along a flanged side thereof in such a manner that the flanged side of the metallic flanged member is situated on an inner side of a bending process, and an apparatus for use with the same method.

摘要翻译： 用于弯曲金属法兰构件的方法包括以下步骤：在与金属构件的纵向方向相交的方向上对金属法兰构件1的凸缘2施加压缩力，用于使凸缘压缩塑性变形，然后将 金属法兰构件1沿着法兰侧，使得金属法兰构件的凸缘侧位于弯曲过程的内侧，以及以相同方法使用的装置。