Epoxy compounds, process for the preparation thereof and resist
materials comprising thereof
    32.
    发明授权
    Epoxy compounds, process for the preparation thereof and resist materials comprising thereof 失效
    环氧化合物,其制备方法和抗蚀材料

    公开(公告)号:US4528332A

    公开(公告)日:1985-07-09

    申请号:US567481

    申请日:1984-01-03

    IPC分类号: C08F8/08

    摘要: Novel copolymers having a weight average molecular weight of 500 to 5,000,000 and comprising 1 to 99% by weight of a recurring unit represented by the formula (I), 1 to 99% by weight of a recurring unit represented by the formula (II) and 0 to 98% by weight of a recurring unit represented by the formula (III): ##STR1## wherein R.sup.1 is a hydrogen atom or a methyl group; X is a hydrogen atom, a methyl group or a phenyl group; Y is a hydrogen atom, a halogen atom, a methyl group, a phenyl group or a cyano group; and Z is a phenyl group, a phenyl group substituted by at least one alkyl group having 1 to 8 carbon atoms, a polycyclic aromatic hydrocarbon group having 10 to 20 carbon atoms, a cyano group, --COOR.sup.2 (in which R.sup.2 is an alkyl group having 1 to 20 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), --COR.sup.3 (in which R.sup.3 is an alkyl group having 1 to 12 carbon atoms or an aromatic hydrocarbon group having 6 to 14 carbon atoms), a nitro group, a pyridyl group, ##STR2## (in which R.sup.3 has the same meaning as defined above), or a halogen atom. The above-mentioned copolymers are useful as resist materials which are sensitive to high-energy radiations.

    摘要翻译: 新型共聚物,其重均分子量为500〜5,000,000,含有1〜99重量%的式(I)表示的重复单元,1〜99重量%的式(II)表示的重复单元和 0〜98重量%的由式(III)表示的重复单元:其中R1是氢原子或甲基; X是氢原子,甲基或苯基; Y是氢原子,卤素原子,甲基,苯基或氰基; Z为苯基,被至少一个碳原子数为1〜8的烷基取代的苯基,碳原子数为10〜20的多环芳香族烃基,氰基,-COOR 2(R2为烷基) 具有1至20个碳原子或具有6至14个碳原子的芳族烃基),-COR 3(其中R 3是具有1至12个碳原子的烷基或具有6至14个碳原子的芳族烃基),硝基 基,吡啶基,< IMAGE>(其中R 3具有与上述相同的含义)或卤素原子。 上述共聚物可用作对高能辐射敏感的抗蚀剂材料。