Wire electric discharge machining apparatus
    31.
    发明授权
    Wire electric discharge machining apparatus 有权
    线放电加工机

    公开(公告)号:US09010673B2

    公开(公告)日:2015-04-21

    申请号:US13980748

    申请日:2011-05-16

    IPC分类号: B65H59/02 B23H7/10 B23H7/04

    CPC分类号: B23H7/10 B23H7/04

    摘要: A wire electric discharge machining apparatus according to embodiments includes a wire electrode, a wire supplying unit that supplies the wire electrode, a collecting motor that collects the wire electrode at a predetermined speed, a tension motor that controls a tension of the wire electrode between the wire supplying unit and the collecting motor, a speed calculating unit that calculates a traveling speed of the wire electrode at a predetermined time interval, a speed storing unit that stores the traveling speed calculated by the speed calculating unit, a differential speed calculating unit that calculates a differential speed between a current traveling speed output from the speed calculating unit and a past traveling speed stored in the speed storing unit, and a breakage detecting unit that detects breakage of the wire electrode by comparing the differential speed with a predetermined threshold.

    摘要翻译: 根据实施例的线放电加工装置包括线电极,供给线电极的线供给单元,以预定速度收集线电极的收集电动机,控制线电极的张力的张力电动机 线供给单元和收集电动机;速度计算单元,其以预定时间间隔计算线电极的行进速度;速度存储单元,其存储由速度计算单元计算出的行驶速度;差速计算单元,其计算 从速度计算单元输出的当前行驶速度与存储在速度存储单元中的过去行驶速度之间的差速;以及破损检测单元,其通过将差速与预定阈值进行比较来检测线电极的断裂。

    WIRE DISCHARGE MACHINING APPARATUS AND MANUFACTURING METHOD FOR SEMICONDUCTOR WAFERS USING THE SAME
    32.
    发明申请
    WIRE DISCHARGE MACHINING APPARATUS AND MANUFACTURING METHOD FOR SEMICONDUCTOR WAFERS USING THE SAME 审中-公开
    使用它的半导体波导的排线加工设备和制造方法

    公开(公告)号:US20150053650A1

    公开(公告)日:2015-02-26

    申请号:US14390189

    申请日:2012-10-19

    IPC分类号: B23H7/10 B23H9/00 B23H1/02

    摘要: A wire discharge machining apparatus including a plurality of main guide rollers disposed in parallel at intervals, one wire that is wound between the guide rollers while being spaced apart from one another at a fixed pitch to form cutting wire sections between a pair of guide rollers and travels according to the rotation of the main guide rollers, and power feed terminal units that feed electric power to wires of the cutting wire sections. The wire discharge machining apparatus performs cutting of a work piece with the cutting wire sections, suspends cut-out of semiconductor wafers from the work piece in a state in which a part of the semiconductor wafers is connected to the work piece, brings the wires of the cutting wire sections close to one cut surfaces, and scans the cut surfaces in a discharge-machined state.

    摘要翻译: 一种线排出加工装置,包括多个平行间隔布置的主引导辊,一个线以相互间隔彼此间隔的方式缠绕在导向辊之间,形成一对导辊之间的切割线部分, 根据主导辊的旋转运动,以及向切割线部分的电线供电的供电端子单元。 线排出加工装置在切割线部分切割工件,在半导体晶片的一部分连接到工件的状态下将工件的半导体晶片切断,使线 切割线部分靠近一个切割表面,并且在放电加工状态下扫描切割表面。

    WIRE ELECTRICAL DISCHARGE MACHINING APPARATUS
    33.
    发明申请
    WIRE ELECTRICAL DISCHARGE MACHINING APPARATUS 有权
    电线放电加工设备

    公开(公告)号:US20140144885A1

    公开(公告)日:2014-05-29

    申请号:US14130634

    申请日:2011-07-06

    IPC分类号: B23H7/10

    CPC分类号: B23H7/10 B23H7/104 B23H7/14

    摘要: In order to detect a wire breakage as soon as possible, the wire electrical discharge machining apparatus includes a speed fluctuation compensator that generates a speed fluctuation suppression command that is a speed compensation value that suppresses fluctuation of the rotational speed of the tension motor on the basis of the rotational speed of the tension motor and a breakage detecting device that detects a breakage of the wire electrode on the basis of a comparison of a preset breakage detection threshold and a speed fluctuation suppression command output from the speed fluctuation compensator.

    摘要翻译: 为了尽快检测到断线,电线放电加工装置包括速度波动补偿器,该速度波动补偿器产生作为抑制张力马达的转速的变动的速度补偿值的速度波动抑制指令 以及断裂检测装置,其基于预设断裂检测阈值和从速度波动补偿器输出的速度波动抑制指令的比较来检测线电极的断裂。

    Wire electric discharge machining apparatus having function of automatically selecting automatic wire connecting parameter
    34.
    发明授权
    Wire electric discharge machining apparatus having function of automatically selecting automatic wire connecting parameter 有权
    线放电加工设备具有自动选择自动接线参数的功能

    公开(公告)号:US08653401B2

    公开(公告)日:2014-02-18

    申请号:US13658120

    申请日:2012-10-23

    申请人: FANUC Corporation

    IPC分类号: B23H7/10 B23H7/20

    CPC分类号: B23H7/20 B23H7/10 B23H7/102

    摘要: By utilizing a function of automatically selecting an automatic wire-connection parameter of a wire electric discharge machining apparatus, a default cutting condition is read, a cutting process is executed, and a wire-connection process is executed. As a result, when the wire connection is successful, the process in an automatic wire connection mode is ended. On the other hand, when the wire connection is unsuccessful, it is determined whether or not a parameter set selected by executing a cutting condition automatic selection process is adopted as a new default cutting condition. When the selected parameter set is adopted as the new default cutting condition, the selected parameter set is stored as the new default cutting condition, and the automatic wire connection mode is ended.

    摘要翻译: 通过利用自动选择线放电加工装置的自动线连接参数的功能,读取默认切割条件,执行切割处理,并且执行线连接处理。 结果,当线连接成功时,结束自动连接方式的处理。 另一方面,当线路连接不成功时,确定通过执行切割条件自动选择处理所选择的参数集是否被采用作为新的默认切割条件。 当采用所选参数设置作为新的默认切割条件时,所选参数集作为新的默认切割条件存储,自动连线方式结束。

    ELECTRICAL DISCHARGE MACHINING APPARATUS AND ELECTRICAL DISCHARGE MACHINING METHOD
    35.
    发明申请
    ELECTRICAL DISCHARGE MACHINING APPARATUS AND ELECTRICAL DISCHARGE MACHINING METHOD 审中-公开
    电动放料加工设备和放电加工方法

    公开(公告)号:US20120312787A1

    公开(公告)日:2012-12-13

    申请号:US13579970

    申请日:2011-03-29

    IPC分类号: B23H7/02 B23H7/10

    CPC分类号: B23H7/02 B23H7/107 B23H7/14

    摘要: An electrical discharge machining apparatus includes a machining electrode that is one wire and includes a plurality of opposing sections with respect to a workpiece by being wound around a plurality of guide rollers, driving units that change a relative distance between the workpiece and the opposing sections, and a plurality of pulse generating units that apply electrical discharge machining pulses between the workpiece and the opposing sections, respectively, in which the pulse generating units are controlled such that application start times of electrical discharge machining pulses for adjacent opposing sections do not coincide with each other.

    摘要翻译: 放电加工装置包括:加工电极,其是一根线,并且通过围绕多个引导辊缠绕相对于工件的多个相对部分,所述驱动单元改变所述工件和所述相对部分之间的相对距离, 以及多个脉冲发生单元,其分别在工件和相对部分之间施加放电加工脉冲,其中脉冲发生单元被控制,使得相邻相对部分的放电加工脉冲的施加开始时间不与每个 其他。

    Method and device for stretching and/or separating wires
    36.
    发明授权
    Method and device for stretching and/or separating wires 有权
    用于拉伸和/或分离电线的方法和装置

    公开(公告)号:US08129650B2

    公开(公告)日:2012-03-06

    申请号:US12012969

    申请日:2008-02-06

    IPC分类号: B23H7/10

    CPC分类号: B23H7/102 B23H7/04

    摘要: The methods and devices enable a reliable and rapid automatic threading process on spark-erosive wire-cutting machines with closed round guides without complicated entry of parameters. A heat-output control device with an optimized output characteristic curve is supplied from a DC voltage source of the erosion generator. Through an at least partial feedback loop of heating current and source voltage, the characteristic curve is modified in such a way that different wire types or different annealing lengths for the wire provide optimal results for stretching, straightening and separating the wire electrode without controlled intervention. With adaptive control it is possible to thread future wire types automatically without reprogramming.

    摘要翻译: 这些方法和装置能够在具有闭合圆形导轨的火花腐蚀线切割机上进行可靠和快速的自动穿线工艺,而无需复杂的参数进入。 具有优化的输出特性曲线的热输出控制装置由侵蚀发生器的直流电压源提供。 通过加热电流和电源电压的至少部分反馈环路,特性曲线被修改为使得不同的导线类型或不同的退火长度为拉伸,拉直和分离线电极提供了最佳的结果,而无需受控干预。 通过自适应控制,可以自动对线程进行重新编程。

    Method of measuring taper angle in wire electric discharge machining apparatus and measuring tool
    37.
    发明授权
    Method of measuring taper angle in wire electric discharge machining apparatus and measuring tool 有权
    线放电加工装置和测量工具中锥角测量方法

    公开(公告)号:US07919721B2

    公开(公告)日:2011-04-05

    申请号:US11881310

    申请日:2007-07-25

    申请人: Yasushi Hayashi

    发明人: Yasushi Hayashi

    IPC分类号: B23H7/10

    CPC分类号: B23H7/065 B23H2500/20

    摘要: A method of measuring a taper angle in a wire electric discharge machining apparatus comprises, the steps of: providing a measuring tool (2) having lower and upper edges (27, 23) being spaced by a given height (H); moving a vertical wire electrode (EV) from a reference position (R) in one direction by a first distance (X1) to the lower edge (27); moving the vertical wire electrode from the reference position in the one direction by a second distance (X2) to the upper edge (23); moving an inclined wire electrode (EI) from the reference position in the one direction by a third distance (X3) to the lower edge; moving the inclined wire electrode from the reference position in the one direction by a fourth distance (X4) to the upper edge; and calculating a taper angle (θ) of the inclined wire electrode based on the following equation: θ=tan−1 γ/H γ=|(X3−X1)−(X4−X2)|.

    摘要翻译: 一种在线放电加工装置中测量锥角的方法包括以下步骤:提供具有间隔给定高度(H)的下边缘和上边缘(27,23)的测量工具(2); 将垂直线电极(EV)从参考位置(R)沿一个方向移动第一距离(X1)到下边缘(27); 将所述垂直线电极从所述基准位置沿所述一个方向移动到所述上边缘(23)的第二距离(X2); 将倾斜的线电极(EI)从基准位置沿一个方向移动第三距离(X3)到下边缘; 使所述倾斜线电极从所述基准位置沿所述一个方向向所述上边缘移动第四距离(X4); 根据以下公式计算倾斜线电极的锥角(&θ):η = tan-1γ/ Hγ= |(X3-X1) - (X4-X2)|。

    Wire inserting method and wire inserting apparatus in wire discharge processing
    38.
    发明授权
    Wire inserting method and wire inserting apparatus in wire discharge processing 失效
    电线放电加工中的插线方式和插线装置

    公开(公告)号:US07566843B2

    公开(公告)日:2009-07-28

    申请号:US11035333

    申请日:2005-01-13

    申请人: Mitsuo Ohta

    发明人: Mitsuo Ohta

    IPC分类号: B23H7/10

    摘要: A wire inserting method comprises a pipe inserting step of inserting one pipe (5) into all through-holes (11) under the state where the plurality of through-holes (11) are arranged on the same axis, a wire inserting step carried out after, or in parallel with, the pipe inserting step, for inserting the electrode wire (2) through the pipe (5), and a pipe removing step of pulling out only the pipe (5) from the through-holes (11) after the wire insertion step.

    摘要翻译: 线插入方法包括在多个通孔(11)布置在同一轴线上的状态下将一根管(5)插入所有通孔(11)中的管插入步骤, 在管插入步骤之后或平行于用于通过管道(5)插入电极线(2)的管道移除步骤,以及仅在管道(5)从通孔(11)仅拔出管道(5)的管道移除步骤之后, 电线插入步骤。

    WIRE-CUT ELECTRIC DISCHARGE MACHINE HAVING WIRE TENSION CONTROL FUNCTION
    39.
    发明申请
    WIRE-CUT ELECTRIC DISCHARGE MACHINE HAVING WIRE TENSION CONTROL FUNCTION 有权
    具有电线张力控制功能的线切割放电机

    公开(公告)号:US20080217300A1

    公开(公告)日:2008-09-11

    申请号:US12029105

    申请日:2008-02-11

    IPC分类号: B23H7/10

    CPC分类号: B23H7/104

    摘要: When a wire electrode is arranged along a traveling path by manual operation, a motor M1 for feeding the wire electrode to a workpiece is driven in response to a predetermined torque command from a control section with a switch SW1 on a side a. The wire electrode is connected, and a motor M2 for delivering the electrode from the wire is driven at a predetermined speed, whereby the electrode is run. Then, the switch SW1 is shifted to a side b and a switch SW2 to the side a, and the motor M1 is subjected to torque control such that a tension on the wire electrode detected by a tension detector is equal to a command tension. When a variation of the tension on the wire electrode is converged, the switches SW1 and SW2 are shifted to the side b, speed control of the motor M1 is performed so that detected tension is equal to the command tension, and electric discharge machining is started.

    摘要翻译: 当通过手动操作沿着行进路径布置线电极时,根据来自具有侧面a上的开关SW1的控制部分的预定扭矩命令来驱动用于将线电极馈送到工件的电动机M1。 线电极被连接,并且用于从电线输送电极的电动机M2以预定速度被驱动,从而电极运行。 然后,开关SW1向a侧移动,开关SW2向a侧移动,马达M1受到转矩控制,使得由张力检测器检测到的线电极上的张力等于指令张力。 当线电极上的张力的变化被会聚时,开关SW1和SW2移动到侧面b,执行电动机M1的速度控制,使得检测到的张力等于指令张力,并且开始放电加工 。

    Wire electric discharge machine and wire electric discharge machining method
    40.
    发明申请
    Wire electric discharge machine and wire electric discharge machining method 失效
    线放电机和线放电加工方法

    公开(公告)号:US20060102596A1

    公开(公告)日:2006-05-18

    申请号:US11272143

    申请日:2005-11-14

    IPC分类号: B23H7/10

    摘要: A wire electric discharge machine and a wire electric discharge machining method in which a workpiece set posture is compensated for an error. After a workpiece is set and fixed on a workpiece table, an upper guide measures three or more three-dimensional positions that are not situated on one straight line on an upper surface of the workpiece, utilizing detection of contact with the upper surface. A unit normal vector Nincl (Xn, Yn, Zn) is obtained, and a shift amount Δshif (ΔU, ΔV) for shift from an originally set vertical position (U0, V0) to a corrected position (Uc, Vc) is calculated. In machining, the shift amount Δshif (ΔU, ΔV) is added to the position (U0, V0) to compensate for an angle error of a machined surface, and a deviation of a machined point position caused by inclination of the workpiece is collaterally compensated for as required by correcting the upper and lower wire guides. Thus, the machined shape cannot be distorted, and the workpiece set posture error can be compensated for.

    摘要翻译: 线材放电机和放线加工方法,其中工件设定姿态被补偿出错误。 在将工件固定并固定在工件台上之后,上部导向器通过检测与上表面的接触来测量三维或三维以上不在工件上表面上的一条直线上的三维位置。 获得单位法线向量Nincl(Xn,Yn,Zn),并计算用于从初始设定的垂直位置(U0,V0)到校正位置(Uc,Vc)的偏移量的偏移量Deltashif(DeltaU,DeltaV)。 在加工中,移位量Deltashif(DeltaU,DeltaV)被添加到位置(U0,V0)以补偿加工表面的角度误差,并且由工件的倾斜引起的加工点位置的偏差被相互补偿 根据需要,通过校正上下导线器。 因此,加工形状不能变形,可以补偿工件设定姿势误差。