公开(公告)号：US06302372B1

公开(公告)日：2001-10-16

申请号：US09455175

申请日：1999-12-06

申请人： Andreas Sauer ,  Manfred Schuhmacher ,  Johannes Kunz ,  Gerhard Joos

发明人： Andreas Sauer ,  Manfred Schuhmacher ,  Johannes Kunz ,  Gerhard Joos

IPC分类号： F16K318

CPC分类号： C23C14/568

摘要： A gate valve (1) is constructed for the simultaneous blocking or clearing of two rectangular passage openings (8,9) of two chamber walls (4,5) that are provided between two vacuum chambers (1,3) and aligned with one another. To this end, it has two valve plates (20, 21), which are a component of a slider (15), which is situated so that it can move with play from a position clearing the passage openings (8,9) to a position which closes the passage openings (8,9). To move the valve plates (20,21) to the closing setting against the passage openings (8,9) on the slider (15), at least one lifting element (24), which is acted on by pressure, is provided.

摘要翻译： 闸阀（1）被构造用于同时阻塞或清除两个室壁（4,5）的两个矩形通道开口（8,9），两个腔室壁（4,5）设置在两个真空室（1,3）之间并彼此对准 。 为此，其具有两个作为滑块（15）的部件的阀板（20,21），其位于使其能够从打开通道开口（8,9）的位置移动到 关闭通道开口（8,9）的位置。 为了使阀板（20,21）相对于滑块（15）上的通道开口（8,9）移动到关闭设置，提供了由压力作用的至少一个提升元件（24）。