公开(公告)号：US20200165721A1

公开(公告)日：2020-05-28

申请号：US16075914

申请日：2016-02-12

申请人： Neil MORRISON ,  Jürgen HENRICH ,  Florian RIES ,  Tobias STOLLEY ,  Andreas SAUER ,  Wolfgang BUSCHBECK ,  Applied Materials, Inc.

发明人： Neil MORRISON ,  Jürgen HENRICH ,  Florian RIES ,  Tobias STOLLEY ,  Andreas SAUER ,  Wolfgang BUSCHBECK

IPC分类号： C23C14/56 ,  C23C16/54 ,  B65G39/18 ,  B05C9/14 ,  B05C1/08 ,  C23C16/458 ,  C23C16/511

摘要： A vacuum processing system for a flexible substrate is provided. The vacuum processing system includes a first chamber adapted for housing a supply roll for providing the flexible substrate; a second chamber adapted for housing a take-up roll for storing the flexible substrate after processing; a substrate transport arrangement including one or more guide rollers for guiding the flexible substrate from the first chamber to the second chamber; a maintenance zone between the first chamber and the second chamber wherein the maintenance zone allows for maintenance access to or of at least one of the first chamber and the second chamber; and a first process chamber for processing the flexible substrate.

公开(公告)号：US08336301B2

公开(公告)日：2012-12-25

申请号：US12435501

申请日：2009-05-05

申请人： Marcus Werni ,  Andreas Sauer

发明人： Marcus Werni ,  Andreas Sauer

IPC分类号： F01N3/00

CPC分类号： F01N3/2885 ,  F01N3/0335 ,  F01N13/017 ,  Y02A50/2325 ,  Y02T10/20

摘要： The present invention relates to an exhaust gas treatment unit for an exhaust system of a combustion engine, in particular of a motor vehicle, includes a housing, a plurality of exhaust gas treatment elements, which are arranged in the housing and through which a parallel flow is possible. The unit further includes an outlet nozzle, which penetrates a side face of the housing, and an outlet space disposed in the housing, whereby the outlet of at least one of the exhaust gas treatment elements opens into the outlet space. The rigidity and/or effectiveness of the exhaust gas treatment unit can be improved by means of a funnel body disposed in the outlet space, and comprising a funnel surface which is permeable to exhaust gas. The funnel body connects an outlet end of one of the exhaust gas treatment elements with the outlet nozzle.

摘要翻译： 本发明涉及一种用于内燃机，特别是机动车辆的排气系统的排气处理单元，其包括壳体，多个废气处理元件，其布置在壳体中，并且通过该排气处理单元 是可能的 该单元还包括穿过壳体的侧面的出口喷嘴和设置在壳体中的出口空间，由此废气处理元件中的至少一个的出口通向出口空间。 排气处理单元的刚度和/或效能可以通过设置在出口空间中的漏斗体来提高，并且包括能够排出废气的漏斗表面。 漏斗体将排气处理元件中的一个的出口端与出口喷嘴连接。

公开(公告)号：US20120052201A1

公开(公告)日：2012-03-01

申请号：US12876801

申请日：2010-09-07

申请人： Annemarie Flock ,  Andreas Sauer ,  Josef Hoffmann ,  Tobias Bergmann ,  Susanne Schlafer

发明人： Annemarie Flock ,  Andreas Sauer ,  Josef Hoffmann ,  Tobias Bergmann ,  Susanne Schlafer

IPC分类号： C23C14/22 ,  C23C14/24 ,  B25B11/00 ,  C23C14/34

CPC分类号： H01L21/67754

摘要： Pallets suited to accommodate thermal gradients during processing. In one aspect, a pallet includes a pair of elongate members, a fixed elongate lateral cross member fixedly coupled to each of the elongate members, and an elongate floating lateral cross member floatingly coupled to the elongate members. The floating lateral cross member displaced from the fixedly coupled lateral cross member to define a gap therebetween.

摘要翻译： 托盘适用于加工过程中的热梯度。 在一个方面，托盘包括一对细长构件，固定地连接到每个细长构件的细长横向横向构件以及与细长构件浮动连接的细长浮动横向横向构件。 浮动横向横向构件从固定联接的横向横向构件移位以限定其间的间隙。

公开(公告)号：US20080302656A1

公开(公告)日：2008-12-11

申请号：US11758955

申请日：2007-06-06

申请人： Jurgen Henrich ,  Andreas Sauer ,  Harald Wurster ,  Edgar Haberkorn

发明人： Jurgen Henrich ,  Andreas Sauer ,  Harald Wurster ,  Edgar Haberkorn

IPC分类号： C23C14/34

CPC分类号： C23C14/56 ,  C23C14/50

摘要： The invention relates to a vacuum coating installation with a transport system for planar substrates which are transported through a vacuum chamber. This transport system comprises several cylinders disposed in parallel. As the driving means for these cylinders one or several motors may be provided, which are located within or outside of the vacuum chamber. The coupling between the motor or the motors and the cylinders in any event takes place via magnet couplings. Since hereby no mechanical coupling established between the driving means and the cylinders, these can readily be separated from one another, which permits providing the cylinders, and with them the sputter cathodes, in a slide-in element which can be moved into and out of the vacuum chamber. If not every cylinder is provided with its own driving means, the cylinders, which are coupled with a driving means, can be connected via V-belts or the like with the other cylinders.

摘要翻译： 本发明涉及一种具有通过真空室输送的平面基板输送系统的真空镀膜装置。 该输送系统包括平行设置的多个圆筒。 作为这些气缸的驱动装置，可以设置一个或几个电动机，其位于真空室内或室外。 在任何情况下，电动机或电动机与气缸之间的联接通过磁性联轴器进行。 因此，由于驱动装置和气缸之间没有建立机械耦合，所以它们可以容易地彼此分开，这允许将气缸及其溅射阴极提供在可以移入和移出的滑入元件中 真空室。 如果不是每个气缸都设置有自己的驱动装置，则与驱动装置联接的气缸可以通过V型皮带等与其它气缸连接。

公开(公告)号：US20080138502A1

公开(公告)日：2008-06-12

申请号：US11945693

申请日：2007-11-27

申请人： Roland TRASSL ,  Andreas Sauer ,  Stephan Wieder

发明人： Roland TRASSL ,  Andreas Sauer ,  Stephan Wieder

IPC分类号： C23C14/34 ,  B32B1/02

CPC分类号： H01L31/18 ,  H01L31/02168 ,  Y02E10/50 ,  Y10T428/13

摘要： The invention relates to a method for the production of an SiN:H layer on a substrate which converts light into electric voltage, wherein a silicon-containing target is sputtered and at least one reactive gas in introduced into the volume between target and substrate. The silicon-containing target is implemented in the form of a tube and is comprised of an Si-based alloy with an Al content of 2 to 50 wt. %.

摘要翻译： 本发明涉及一种在衬底上制造SiN：H层的方法，该方法将光转换成电压，其中溅射含硅靶和至少一种反应性气体引入目标和衬底之间的体积。 含硅靶以管的形式实施，并且由Al含量为2〜50wt。％的Si基合金构成。 ％。

公开(公告)号：US20070165206A1

公开(公告)日：2007-07-19

申请号：US10586513

申请日：2004-04-10

申请人： Arnold Olesch ,  Manfred Weimann ,  Dirk Remmlinger ,  Alfred Rick ,  Holger Ratschat ,  Frank Mertens ,  Andreas Sauer ,  Harald Wurster

发明人： Arnold Olesch ,  Manfred Weimann ,  Dirk Remmlinger ,  Alfred Rick ,  Holger Ratschat ,  Frank Mertens ,  Andreas Sauer ,  Harald Wurster

IPC分类号： G01P3/36

CPC分类号： B65G49/06 ,  B65G2249/02 ,  C03C17/002 ,  G01B11/06 ,  G01B11/2433 ,  G01V8/10

摘要： In order that an installation for coating panes of glass can be operated more reliably, the invention proposes a modification of the light barriers used in the installation. On the receiver side of these light barriers there is a row of individual cells which are more or less shaded according to the thickness of the glass pane passing through the ray path of the light barrier. Some cells always deliver a significantly reduced signal which can be evaluated as a reliable indication of the presence of an object in the ray path.

摘要翻译： 为了更可靠地操作玻璃板的安装，本发明提出了在安装中使用的光栅的改进。 在这些光屏障的接收器侧，存在一排单独的单元，其根据穿过光栅的光线路径的玻璃板的厚度或多或少地阴影。 一些细胞总是递送显着降低的信号，其可以被评估为在光线路径中存在物体的可靠指示。

公开(公告)号：US06264794B1

公开(公告)日：2001-07-24

申请号：US09339218

申请日：1999-06-24

申请人： Michael Neumann ,  Stefan Niederer ,  Andreas Sauer

发明人： Michael Neumann ,  Stefan Niederer ,  Andreas Sauer

IPC分类号： D21H2302

CPC分类号： D21H11/16 ,  D21C9/004 ,  D21H25/005

摘要： The process is used for the production of high-quality glazed paper and includes the three process sections, stock preparation (1), paper formation (2), and glazing (3). According to the invention, the paper fibers used in the performance of the process are subjected to fiber loading, such that substances which reduce the compressibility of the fibers are incorporated in the cavities of the fibers. In combination with the glazing process (3), a paper with particularly high optical quality can then be produced.

摘要翻译： 该工艺用于生产高品质玻璃纸，包括三个工艺部分，原料制备（1），造纸（2）和玻璃（3）。 根据本发明，用于实施该方法的纸纤维经受纤维负载，使得将纤维的可压缩性降低的物质结合到纤维的空腔中。 结合玻璃工艺（3），可以产生具有特别高的光学质量的纸。

公开(公告)号：US5944967A

公开(公告)日：1999-08-31

申请号：US554750

申请日：1995-11-07

申请人： Hans Kunz ,  Andreas Sauer ,  Manfred Schuhmacher ,  Joachim Szczyrbowski ,  Dietmar Marquardt

发明人： Hans Kunz ,  Andreas Sauer ,  Manfred Schuhmacher ,  Joachim Szczyrbowski ,  Dietmar Marquardt

IPC分类号： C23C14/34 ,  H01J37/34

CPC分类号： H01J37/3435 ,  C23C14/3407 ,  H01J37/3408

摘要： A dual magnetron cathode assembly includes a pair of elongate, parallel targets in coplanar relationship fixed to respective magnetic yokes with associated rows of permanent magnets for producing a magnetic field over the targets. A common back plate is provided for both cathodes, a center shield plate extending from the back plate to between the targets, side shield plates and end shield plates likewise extending from the back plate to form side-by-side rectangular shielding enclosures which expose only the sputtering surface of the targets. The yokes are fixed with respect to the vacuum chamber by insulative holders which extend through openings in the back plate.

摘要翻译： 双磁控管阴极组件包括一对共面关系的细长的平行靶，固定到相应的磁轭上，该磁轭具有相关的永磁体排，用于在靶上产生磁场。 为两个阴极提供常见的背板，中央屏蔽板从后板延伸到目标之间，侧面屏蔽板和端部屏蔽板，同样从背板延伸，形成仅仅暴露的并排矩形屏蔽外壳 靶的溅射表面。 轭体通过延伸穿过背板中的开口的绝缘保持器相对于真空室固定。

公开(公告)号：US20200240008A1

公开(公告)日：2020-07-30

申请号：US15759801

申请日：2017-03-17

申请人： Sebastian Gunther ZANG ,  Andreas SAUER ,  Applied Materials, Inc.

发明人： Sebastian Gunther ZANG ,  Andreas SAUER

IPC分类号： C23C14/56 ,  C23C14/24 ,  F16K51/02

摘要： The present disclosure provides an apparatus for vacuum processing of a substrate. The apparatus includes a processing vacuum chamber, a maintenance vacuum chamber, an opening for transferring at least a portion of a material deposition source between the processing vacuum chamber and the maintenance vacuum chamber, and a magnetic closing arrangement for magnetically closing the opening.

公开(公告)号：US07114702B2

公开(公告)日：2006-10-03

申请号：US10928326

申请日：2004-08-27

申请人： Andreas Sauer

发明人： Andreas Sauer

IPC分类号： F16K25/00 ,  F16K3/00

CPC分类号： F16K3/207 ,  F16K3/0281

摘要： In a slide valve, especially for coating installations, for fluidic separation of two modules or chambers, interconnected through an opening, containing at least one slide plate, integrated in a housing transfixed by said opening, and which may be bidirectionally moved between an inactive position, releasing said opening, and an operating position, completely covering said opening, and at least a closing drive, which may be activated to act upon said slide plate in its operating position and for its sealing contact in a closed position against a sealing surface transfixing said housing, according to the invention, at least one of said closing drives is firmly attached inside housing, relative to the activating movement of said slide plate.

摘要翻译： 在滑阀中，特别是用于涂覆装置的两个模块或室的流体分离，通过开口相互连接，该开口包含至少一个滑动板，该滑动板集成在由所述开口固定的壳体中，并且可以在非活动位置之间双向移动 释放所述开口和完全覆盖所述开口的操作位置以及至少一个闭合驱动器，所述操作位置可以被致动以在其操作位置作用在所述滑板上，并且其闭合位置处的密封接触抵抗密封表面的固定 根据本发明，所述壳体中的至少一个相对于所述滑板的启动运动被牢固地附接在壳体内。