公开(公告)号：US07167612B2

公开(公告)日：2007-01-23

申请号：US10745641

申请日：2003-12-29

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun

IPC分类号： G02B6/26 ,  G02B6/42 ,  G02B27/00 ,  G02B1/10 ,  G02B5/28

CPC分类号： G02B6/29358 ,  G02B6/29389 ,  G02B6/29395 ,  G02B6/32

摘要： A wavelength tunable filter capable of being driven such that reflecting mirrors move more distant as well as closer by using the principle that a direction of the electromagnetic forces changes depending on the direction of the current flowing perpendicular to the external magnetic field. According to the wavelength tunable filter of the present invention, when it is necessary to have the wavelength tuning range and mechanical structure similar to the conventional wavelength tunable filter driven in only one direction, it is possible to lower the maximum force needed to drive the filter to a half, and reduce a probability that a pull-in phenomenon occurs. On the other hand, it is possible to reduce a wavelength change time of the element by increasing a resonant frequency when the same wavelength tuning ranges are implemented by using the same maximum driving forces.

摘要翻译： 能够被驱动的波长可调滤波器，使得反射镜通过使用电磁力的方向根据垂直于外部磁场流动的电流的方向而变化的原理移动得更远和更近。 根据本发明的波长可调滤波器，当需要使波长调谐范围和机械结构类似于在一个方向上驱动的常规波长可调滤波器时，可以降低驱动滤波器所需的最大力 降低引入现象发生的可能性。 另一方面，当通过使用相同的最大驱动力来实现相同的波长调谐范围时，可以通过增加谐振频率来减小元件的波长变化时间。

公开(公告)号：US07116863B2

公开(公告)日：2006-10-03

申请号：US10819271

申请日：2004-04-07

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun ,  Yun Tae Kim

IPC分类号： G02B6/26

CPC分类号： G02B6/29358 ,  G02B6/29395

摘要： Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.

摘要翻译： 提供了微机电系统（MEMS）的波长可调光滤波器。 波长可调光滤波器包括两个光纤或光波导，其光轴彼此对准，用于准直光纤​​或光波导前端的光的两个透镜，形成在基板上的两个或更多个反射镜，支持在 至少一个反射镜，其中一个反射镜由致动器的热膨胀致动。 因为所有的反射镜都形成在基板上，所以制造工艺简单，可以精确调节初始共振波长。 由于热膨胀是由直接流过热致动器的电流产生的，因此可以通过低功耗来致动。 此外，由于不使用静电力来移动反射镜，所以不会发生反射镜之间的粘附现象，并且波长可以在宽范围内可调。 由于平面镜平行配置，因此容易进行光对准，线宽恒定，插入损耗低。

公开(公告)号：US08638110B2

公开(公告)日：2014-01-28

申请号：US12675111

申请日：2008-07-21

申请人： Sung Sik Lee ,  Myung Lae Lee ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik Lee ,  Myung Lae Lee ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01R27/26

CPC分类号： G01D5/24

摘要： There is provided a high resolution circuit for converting a capacitance-to-time deviation including a capacitance deviation detecting unit generating two detection signals having a phase difference corresponding to variations of capacitance of an micro electro mechanical system (MEMS) sensor; a capacitance deviation amplifying unit dividing frequencies of the two detection signals to amplify the phase difference corresponding to the capacitance deviation; and a time signal generating unit generating a time signal having a pulse width corresponding to the amplified phase difference.

摘要翻译： 提供了一种用于转换电容 - 时间偏差的高分辨率电路，包括产生具有与微机电系统（MEMS）传感器的电容变化相对应的相位差的两个检测信号的电容偏差检测单元; 电容偏差放大单元，对所述两个检测信号的频率进行分频，以放大与所述电容偏差对应的相位差; 以及时间信号生成单元，生成具有与放大后的相位差对应的脉冲宽度的时间信号。

公开(公告)号：US07971633B2

公开(公告)日：2011-07-05

申请号：US11577233

申请日：2005-12-09

申请人： Seok Hwan Moon ,  Gunn Hwang ,  Sung Weon Kang ,  Chang Auck Choi

发明人： Seok Hwan Moon ,  Gunn Hwang ,  Sung Weon Kang ,  Chang Auck Choi

IPC分类号： H05K7/20

CPC分类号： H05K7/20336 ,  H01L23/427 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a loop type micro heat transport device including: a lower plate having a reservoir for storing operating fluid at its upper surface, an evaporating part spaced apart from the reservoir to evaporate the operating fluid, and a condensing part for condensing vapor evaporated from the evaporating part; and an upper plate engaged with an upper surface of the lower plate and formed at a position corresponding to the evaporating part and the condensing part, and including a vapor space having a vapor line through which the vapor evaporated from the evaporating part is transported to the condensing part, wherein the operating fluid is circulated through the reservoir, the evaporating part, and the condensing part. Therefore, it is possible to remarkably improve productivity since its simple structure helps to make the manufacture simple, as well as to improve cooling performance and enabling long distance heat transport.

摘要翻译： 本发明提供一种环型微热输送装置，其特征在于，具有：下板，其具有用于在其上表面存储工作流体的储存器，与所述储存器间隔开的蒸发部，蒸发所述工作流体;以及冷凝部， 蒸发部分 以及与所述下板的上表面接合并形成在与所述蒸发部和所述冷凝部对应的位置的上板，并且包括具有蒸气管的蒸气空间，蒸发部蒸发的蒸汽通过所述蒸气管路被输送到所述蒸发部 冷凝部件，其中工作流体循环通过储存器，蒸发部件和冷凝部件。 因此，由于其简单的结构有助于使制造简单，并且提高冷却性能并且能够进行长距离的热输送，因此可以显着提高生产率。

公开(公告)号：US20110133758A1

公开(公告)日：2011-06-09

申请号：US12675111

申请日：2008-07-21

申请人： Sung Sik Lee ,  Myung Lae Lee ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik Lee ,  Myung Lae Lee ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01R27/26

CPC分类号： G01D5/24

摘要： There is provided a high resolution circuit for converting a capacitance-to-time deviation including a capacitance deviation detecting unit generating two detection signals having a phase difference corresponding to variations of capacitance of an micro electro mechanical system (MEMS) sensor; a capacitance deviation amplifying unit dividing frequencies of the two detection signals to amplify the phase difference corresponding to the capacitance deviation; and a time signal generating unit generating a time signal having a pulse width corresponding to the amplified phase difference.

摘要翻译： 提供了一种用于转换电容 - 时间偏差的高分辨率电路，包括产生具有与微机电系统（MEMS）传感器的电容变化相对应的相位差的两个检测信号的电容偏差检测单元; 电容偏差放大单元，对所述两个检测信号的频率进行分频，以放大与所述电容偏差对应的相位差; 以及时间信号生成单元，生成具有与放大后的相位差对应的脉冲宽度的时间信号。

公开(公告)号：US07928388B2

公开(公告)日：2011-04-19

申请号：US12648161

申请日：2009-12-28

申请人： Seong Mok Cho ,  Ho Jun Ryu ,  Woo Seok Yang ,  Sang Hoon Cheon ,  Chang Auck Choi

发明人： Seong Mok Cho ,  Ho Jun Ryu ,  Woo Seok Yang ,  Sang Hoon Cheon ,  Chang Auck Choi

IPC分类号： G01J5/00

CPC分类号： G01J5/20

摘要： In an infrared detection sensor according to the present invention, all material constituting an upper portion of a sensing electrode in a supporting arm region is removed so that a supporting arm has low thermal conductivity. As a result, thermal conductivity of the infrared sensor structure is reduced, and the infrared detection sensor has excellent sensitivity.

摘要翻译： 在根据本发明的红外线检测传感器中，除去构成支撑臂区域中的感测电极的上部的所有材料，使得支撑臂具有低导热性。 结果，红外线传感器结构的导热性降低，红外线检测传感器具有良好的灵敏度。

公开(公告)号：US20110049366A1

公开(公告)日：2011-03-03

申请号：US12859466

申请日：2010-08-19

申请人： Woo Seok Yang ,  Sang Hoon Cheon ,  Seong Mok Cho ,  Ho Jun Ryu ,  Chang Auck Choi

发明人： Woo Seok Yang ,  Sang Hoon Cheon ,  Seong Mok Cho ,  Ho Jun Ryu ,  Chang Auck Choi

IPC分类号： H01L31/09 ,  H01L31/18 ,  C09K3/00

CPC分类号： G01J5/04 ,  G01J5/046

摘要： A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.

摘要翻译： 提供了用于测辐射热力计的电阻材料，用于使用该材料的红外探测器的测辐射热计，以及制造测辐射热计的方法。 在电阻材料中，选自氮（N），氧（O）和锗（Ge）中的至少一种元素包括在锑（Sb）中。 电阻材料具有优异的性能，例如高温电阻系数（TCR），低电阻率，低噪声常数，并且易于通过通常用于互补金属氧化物半导体（CMOS）工艺中的溅射在薄膜结构中形成， 因此它可以用作非制冷红外探测器的辐射热计的电阻器，从而为红外检测器提供出色的温度精度。

公开(公告)号：US20100251826A1

公开(公告)日：2010-10-07

申请号：US12745745

申请日：2008-04-21

申请人： Chang Auck Choi ,  Chang Han Je ,  Gunn Hwang ,  Youn Tae Kim ,  Sung Hae Jung ,  Myung Lae Lee ,  Sung Sik Lee ,  Seok Hwan Moon

发明人： Chang Auck Choi ,  Chang Han Je ,  Gunn Hwang ,  Youn Tae Kim ,  Sung Hae Jung ,  Myung Lae Lee ,  Sung Sik Lee ,  Seok Hwan Moon

IPC分类号： G01L9/06 ,  H01L41/22

CPC分类号： G01L9/0042 ,  Y10T29/42 ,  Y10T29/49

摘要： A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.

摘要翻译： 提供一种微型半导体型压力传感器及其制造方法。 微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现，通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层，形成膜 在形成空腔的氧化物层和衬底的上部上形成一层形成材料层，在膜形成材料层中形成多个蚀刻孔，通过多个蚀刻孔去除腔形成氧化物层，以形成埋入腔 在所述基板中，在所述膜形成材料层的上部形成膜增强层，以形成用于封闭所述空腔的膜，并且在所述膜的上部形成由压阻材料制成的敏感膜。

公开(公告)号：US07696478B2

公开(公告)日：2010-04-13

申请号：US12182496

申请日：2008-07-30

申请人： Ho Jun Ryu ,  Woo Seok Yang ,  Seong Mok Cho ,  Sang Hoon Cheon ,  Byoung Gon Yu ,  Chang Auck Choi

发明人： Ho Jun Ryu ,  Woo Seok Yang ,  Seong Mok Cho ,  Sang Hoon Cheon ,  Byoung Gon Yu ,  Chang Auck Choi

IPC分类号： G01J5/00

CPC分类号： G01J5/20 ,  C22C1/04 ,  C23C14/14 ,  C23C14/3464

摘要： Provided are resistive materials for a microbolometer, a method for preparation of resistive materials and a microbolometer containing the resistive materials. The resistive materials for the microbolometer include an alloy of silicon and antimony or an alloy of silicon, antimony and germanium, which has a high TCR and a low resistance.

摘要翻译： 提供了用于微电热计的电阻材料，用于制备电阻材料的方法和包含电阻材料的微电热计。 用于微热辐射计的电阻材料包括硅和锑的合金或硅，锑和锗的合金，其具有高TCR和低电阻。

公开(公告)号：US20090152467A1

公开(公告)日：2009-06-18

申请号：US12182456

申请日：2008-07-30

申请人： Sang Hoon Cheon ,  Ho Jun Ryu ,  Woo Seok Yang ,  Seong Mok Cho ,  Byoung Gon Yu ,  Chang Auck Choi

发明人： Sang Hoon Cheon ,  Ho Jun Ryu ,  Woo Seok Yang ,  Seong Mok Cho ,  Byoung Gon Yu ,  Chang Auck Choi

IPC分类号： G01J5/10 ,  H01L21/00

CPC分类号： G01J5/20 ,  G01J5/02 ,  G01J5/023

摘要： Provided are a multilayer-structured bolometer and a method of fabricating the same. In the multilayer-structured bolometer, the number of support arms supporting the body of a sensor structure is reduced to one, and two electrodes are formed on the one support arm. Thus, the sensor structure is electrically connected with a substrate through the only one support arm. According to the multilayer-structured bolometer and method of fabricating the bolometer, the thermal conductivity of the sensor structure is considerably reduced to remarkably improve sensitivity to temperature, and also the pixel size of the bolometer is reduced to obtain high-resolution thermal images. In addition, the multilayer-structured bolometer can have a high fill-factor due to a sufficiently large infrared-absorbing layer, and thus can improve infrared absorbance.

摘要翻译： 提供一种多层结构的测辐射热计及其制造方法。 在多层结构的测辐射热计中，支撑传感器结构的主体的支撑臂的数量减少到一个，并且在一个支撑臂上形成两个电极。 因此，传感器结构通过仅一个支撑臂与基板电连接。 根据多层结构的测辐射热计和制造测辐射热计的方法，传感器结构的导热性显着降低，显着提高了对温度的敏感性，还减小了测辐射热计的像素尺寸以获得高分辨率的热图像。 此外，由于具有足够大的红外线吸收层，多层结构的测辐射热计可以具有高的填充因子，因此可以提高红外吸收。