公开(公告)号：US07012752B2

公开(公告)日：2006-03-14

申请号：US11045554

申请日：2005-01-27

申请人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

发明人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

IPC分类号： G02B27/00

CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

摘要： An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.

摘要翻译： 公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。 一种可调波长滤光器，包括下反射镜，其中硅膜和氧化物膜顺次层叠在多层中，并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。 由此，通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜，可以选择性地发送透射光相对于入射光的波长。

公开(公告)号：US07209608B2

公开(公告)日：2007-04-24

申请号：US10923838

申请日：2004-08-24

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

IPC分类号： G02B6/28 ,  G02B6/36 ,  G02B27/00 ,  G02B1/10 ,  G02B5/28

CPC分类号： G02B26/001 ,  G02B2006/12109

摘要： Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.

摘要翻译： 提供了一种法布里 - 珀罗型波长可调谐滤光器，包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体，并且其两端通过间隔件固定到所述第一反射镜; 多个电极，各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置，每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体，其将所述杆结构与所述多个固定装置连接并用作旋转轴线。 并且当由作为电热膨胀，电磁力或外力产生翘曲时，作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。 从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。

公开(公告)号：US06947656B2

公开(公告)日：2005-09-20

申请号：US10412580

申请日：2003-04-14

申请人： Chang-Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Youn Tae Kim

发明人： Chang-Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Youn Tae Kim

IPC分类号： G02B26/02 ,  G02B6/26 ,  G02B6/34 ,  G02B6/35 ,  G02B6/00

CPC分类号： G02B6/352 ,  G02B6/266 ,  G02B6/29358 ,  G02B6/29389 ,  G02B6/29395 ,  G02B6/3514 ,  G02B6/3552 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3594

摘要： A variable optical attenuator with tunable wavelength selectivity includes at least two reflectors disposed parallel to each other at a predetermined angle from an optic axis and driving units connected to said at least two reflectors for allowing the reflectors to move back and forth in a direction perpendicular or parallel to the optic axis or to revolve centering on an axis perpendicular or parallel to the optic axis. Since the variable optical attenuator of the present invention serves as a variable optical attenuator and, at the same time, as a tunable wavelength filter, problems of insertion loss and optical alignment that might be caused by separately installing a variable optical attenuator and a wavelength filter can be effectively prevented. Moreover, by implementing the variable optical attenuator and the tunable wavelength filter by using a single device, the size of a system using the optical attenuator can be reduced.

公开(公告)号：USRE44356E1

公开(公告)日：2013-07-09

申请号：US12828908

申请日：2010-07-01

申请人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

发明人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

IPC分类号： H01L21/302 ,  B29D11/00

CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

摘要： A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining a mirror region on the first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; sequentially laminating conductive silicon films and oxide films for defining the mirror region on a second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror and forming an optical tuning space between the lower mirror and the upper mirror and etching the first sacrificial oxide film and the second sacrificial oxide film such that the lower mirror is floated on the semiconductor substrate.

摘要翻译： 一种可调波长光学滤波器的制造方法。 该方法包括以下步骤：在半导体衬底上形成用于浮置下反射镜的第一牺牲氧化膜; 依次层叠导电硅膜和用于在多层中在第一牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成下反射镜; 依次层叠导电硅膜和用于在多层中的第二牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成上反射镜并在下反​​射镜和上反射镜之间形成光学调谐空间，以及 蚀刻第一牺牲氧化物膜和第二牺牲氧化物膜，使得下反射镜浮在半导体衬底上。

公开(公告)号：US07167612B2

公开(公告)日：2007-01-23

申请号：US10745641

申请日：2003-12-29

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun

IPC分类号： G02B6/26 ,  G02B6/42 ,  G02B27/00 ,  G02B1/10 ,  G02B5/28

CPC分类号： G02B6/29358 ,  G02B6/29389 ,  G02B6/29395 ,  G02B6/32

摘要： A wavelength tunable filter capable of being driven such that reflecting mirrors move more distant as well as closer by using the principle that a direction of the electromagnetic forces changes depending on the direction of the current flowing perpendicular to the external magnetic field. According to the wavelength tunable filter of the present invention, when it is necessary to have the wavelength tuning range and mechanical structure similar to the conventional wavelength tunable filter driven in only one direction, it is possible to lower the maximum force needed to drive the filter to a half, and reduce a probability that a pull-in phenomenon occurs. On the other hand, it is possible to reduce a wavelength change time of the element by increasing a resonant frequency when the same wavelength tuning ranges are implemented by using the same maximum driving forces.

摘要翻译： 能够被驱动的波长可调滤波器，使得反射镜通过使用电磁力的方向根据垂直于外部磁场流动的电流的方向而变化的原理移动得更远和更近。 根据本发明的波长可调滤波器，当需要使波长调谐范围和机械结构类似于在一个方向上驱动的常规波长可调滤波器时，可以降低驱动滤波器所需的最大力 降低引入现象发生的可能性。 另一方面，当通过使用相同的最大驱动力来实现相同的波长调谐范围时，可以通过增加谐振频率来减小元件的波长变化时间。

公开(公告)号：US07116863B2

公开(公告)日：2006-10-03

申请号：US10819271

申请日：2004-04-07

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun ,  Yun Tae Kim

IPC分类号： G02B6/26

CPC分类号： G02B6/29358 ,  G02B6/29395

摘要： Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.

摘要翻译： 提供了微机电系统（MEMS）的波长可调光滤波器。 波长可调光滤波器包括两个光纤或光波导，其光轴彼此对准，用于准直光纤​​或光波导前端的光的两个透镜，形成在基板上的两个或更多个反射镜，支持在 至少一个反射镜，其中一个反射镜由致动器的热膨胀致动。 因为所有的反射镜都形成在基板上，所以制造工艺简单，可以精确调节初始共振波长。 由于热膨胀是由直接流过热致动器的电流产生的，因此可以通过低功耗来致动。 此外，由于不使用静电力来移动反射镜，所以不会发生反射镜之间的粘附现象，并且波长可以在宽范围内可调。 由于平面镜平行配置，因此容易进行光对准，线宽恒定，插入损耗低。

公开(公告)号：US07393793B2

公开(公告)日：2008-07-01

申请号：US11508017

申请日：2006-08-21

申请人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

发明人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

IPC分类号： H01L21/302

CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

摘要： A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining a mirror region on the first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; sequentially laminating conductive silicon films and oxide films for defining the mirror region on a second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror and forming an optical tuning space between the lower mirror and the upper mirror and etching the first sacrificial oxide film and the second sacrificial oxide film such that the lower mirror is floated on the semiconductor substrate.

摘要翻译： 一种可调波长光学滤波器的制造方法。 该方法包括以下步骤：在半导体衬底上形成用于浮置下反射镜的第一牺牲氧化膜; 依次层叠导电硅膜和用于在多层中在第一牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成下反射镜; 依次层叠导电硅膜和用于在多层中的第二牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成上反射镜并在下反​​射镜和上反射镜之间形成光学调谐空间，以及 蚀刻第一牺牲氧化物膜和第二牺牲氧化物膜，使得下反射镜浮在半导体衬底上。

公开(公告)号：US07163872B2

公开(公告)日：2007-01-16

申请号：US10671825

申请日：2003-09-25

申请人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

发明人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

IPC分类号： H01L21/00

CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

摘要： An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.

摘要翻译： 公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。 一种可调波长滤光器，包括下反射镜，其中硅膜和氧化物膜顺次层叠在多层中，并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。 由此，通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜，可以有选择地发射透射光相对于入射光的波长。

公开(公告)号：US08261617B2

公开(公告)日：2012-09-11

申请号：US12745745

申请日：2008-04-21

申请人： Chang Auck Choi ,  Chang Han Je ,  Gunn Hwang ,  Youn Tae Kim ,  Sung Hae Jung ,  Myung Lae Lee ,  Sung Sik Lee ,  Seok Hwan Moon

发明人： Chang Auck Choi ,  Chang Han Je ,  Gunn Hwang ,  Youn Tae Kim ,  Sung Hae Jung ,  Myung Lae Lee ,  Sung Sik Lee ,  Seok Hwan Moon

IPC分类号： G01L9/06 ,  B23P17/04

CPC分类号： G01L9/0042 ,  Y10T29/42 ,  Y10T29/49

摘要： A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.

摘要翻译： 提供一种微型半导体型压力传感器及其制造方法。 微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现，通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层，形成膜 在形成空腔的氧化物层和衬底的上部上形成一层形成材料层，在膜形成材料层中形成多个蚀刻孔，通过多个蚀刻孔去除腔形成氧化物层，以形成埋入腔 在所述基板中，在所述膜形成材料层的上部形成膜增强层，以形成用于封闭所述空腔的膜，并且在所述膜的上部形成由压阻材料制成的敏感膜。

公开(公告)号：US07997137B2

公开(公告)日：2011-08-16

申请号：US12168025

申请日：2008-07-03

申请人： Sung Sik Lee ,  Ji Man Park ,  Myung Lae Lee ,  Sung Hae Jung ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik Lee ,  Ji Man Park ,  Myung Lae Lee ,  Sung Hae Jung ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01P15/08

CPC分类号： G01P15/125 ,  G01P13/04

摘要： There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.

摘要翻译： 提供了一种用于检测在电容式微机电系统（MEMS）加速度计处感测的振荡的方向和振幅的双向读出电路，双向读出电路通过使用高分辨率电容 - 电容将电容式MEMS加速度计的电容变化转换为时变量 时间转换技术，并且通过使用时间 - 数字转换（TDC）技术输出时间变化量作为振荡的方向和振幅，从而不仅检测振荡的振幅，而且检测其方向，这是能够 被应用于各种MEMS传感器。