公开(公告)号：US06760143B2

公开(公告)日：2004-07-06

申请号：US10173029

申请日：2002-06-18

申请人： Yong-seop Yoon

发明人： Yong-seop Yoon

IPC分类号： G02B2600

CPC分类号： G02B26/0841

摘要： A micromirror actuator includes: a substrate; spring units elastically supported by protrusion formed on the substrate; a micromirror connected to the spring units and formed to be capable of rotating; trenches formed in the substrate at either side of the protrusions to correspond to the surface of the micromirror; and lower electrodes formed in each of the trenches. Accordingly, it is possible to expand the range of the driving angle of the micromirror with the use of a lower voltage.

摘要翻译： 微镜致动器包括：基板; 由形成在基板上的突起弹性地支撑的弹簧单元; 连接到弹簧单元并形成为能够旋转的微镜; 在突起的任一侧的基板中形成的对应于微反射镜的表面的沟槽; 以及形成在每个沟槽中的下电极。 因此，可以通过使用较低的电压来扩大微镜的驱动角度的范围。

公开(公告)号：US06343852B1

公开(公告)日：2002-02-05

申请号：US09440198

申请日：1999-11-15

申请人： Yong-seop Yoon

发明人： Yong-seop Yoon

IPC分类号： B41J204

CPC分类号： B41J2/14314

摘要： An apparatus for jetting a fluid to an exterior through a nozzle by exerting a driving force to the fluid held within a jetting fluid chamber and method of manufacturing the same. The apparatus employs an electrostatic force as the driving force for a driving part which is to be exerted to the fluid. The driving part for exerting the driving force to the fluid has upper and lower electrodes which are oppositely spaced apart from each other at a predetermined distance. The upper electrode is disposed within the interior of a membrane. Here, the membrane forms the lower surface of the jetting fluid chamber. Accordingly, the membrane is driven by the upper electrode which is displaced upward and downward due to the electrostatic force generated between the upper and lower electrodes, so that the driving force is exerted to the fluid within the jetting fluid chamber, and the fluid is jetted to the exterior through the nozzle.

摘要翻译： 一种用于通过向保持在喷射流体室内的流体施加驱动力的喷嘴将流体喷射到外部的装置及其制造方法。 该装置采用静电力作为要施加到流体的驱动部件的驱动力。 用于向驱动液体施加驱动力的驱动部件具有以预定距离相互间隔开的上下电极。 上电极设置在膜的内部。 这里，膜形成喷射流体室的下表面。 因此，由于在上下电极之间产生的静电力而使上电极向上下移动的膜被驱动，使得驱动力被施加到喷射流体室内的流体，喷射流体 通过喷嘴到外部。

公开(公告)号：US5917647A

公开(公告)日：1999-06-29

申请号：US111589

申请日：1998-07-07

申请人： Yong-seop Yoon

发明人： Yong-seop Yoon

IPC分类号： H04N5/74 ,  G02B7/00 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： An actuator having an asymmetric rigid structure for changing an optical beam path. The actuator has a base plate installed in a cover, first electrodes installed on an upper surface of the base plate by evaporation, a driving electrode disposed between the first electrodes, a pair of support plates each installed on a respective one of the first electrodes for receiving a voltage from the first electrodes, a reflecting plate disposed between the pair of support plates for reflecting an incident beam emitted from a beam source, and asymmetric members connected to the reflecting plate for adjusting an incident path of the incident beam and an inclination angle of a reflection beam with respect to the incident beam. The actuator can easily adjust the incident path of the incident beam and an inclination angle of the reflection beam with respect to the incident beam by asymmetrically inclining the reflecting plate. The actuator has only one driving electrode so that the driving conduit thereof is simply formed and reliable operation thereof is be attained.

摘要翻译： 具有用于改变光束路径的非对称刚性结构的致动器。 所述致动器具有安装在盖中的基板，通过蒸发而安装在所述基板的上表面上的第一电极，设置在所述第一电极之间的驱动电极，分别安装在所述第一电极中的相应一个上的一对支撑板， 从所述第一电极接收电压;反射板，设置在所述一对支撑板之间，用于反射从光束源发射的入射光束;以及不对称构件，连接到所述反射板，用于调节所述入射光束的入射路径和倾斜角度 相对于入射光束的反射光束。 致动器可以通过不对称地倾斜反射板来容易地调节入射光束的入射路径和反射光束相对于入射光束的倾斜角度。 致动器仅具有一个驱动电极，使得其驱动导管简单地形成，并且可以获得可靠的操作。