CHARGED PARTICLE BEAM EMITTING DEVICE AND METHOD FOR OPERATING A CHARGED PARTICLE BEAM EMITTING DEVICE
    42.
    发明申请
    CHARGED PARTICLE BEAM EMITTING DEVICE AND METHOD FOR OPERATING A CHARGED PARTICLE BEAM EMITTING DEVICE 有权
    充电颗粒射束发射装置和用于操作充电颗粒光束发射装置的方法

    公开(公告)号:US20070158588A1

    公开(公告)日:2007-07-12

    申请号:US11469728

    申请日:2006-09-01

    CPC classification number: H01J37/073 H01J2237/022 H01J2237/06325

    Abstract: A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of placing the cold field emitter in a vacuum of a given pressure, the emitter exhibiting a high initial emission current I0 and a lower stable mean emission current IS under a given electric extraction field; applying the given electric extraction field to the emitter for emitting electrons from the emitter surface; performing a cleaning process by applying at least one heating pulse to the cold field emitter for heating the emitter surface, whereby the cleaning process is performed before the emission current of the cold field emitter has declined to the lower stable mean emission value IS; and repeating the cleaning process to keep the emission current of the emitter continuously above the substantially stable emission value IS.

    Abstract translation: 提供了一种用于操作带电粒子束发射器件的方法,特别是包括冷场发射器的电子束发射器件。 该方法包括以下步骤:将冷场发射器置于给定压力的真空中,发射体表现出高的初始发射电流I 0和较低的稳定平均发射电流I S, 在给定的电提取场下; 将给定的电提取场施加到发射器以从发射器表面发射电子; 通过对冷场发射器施加至少一个加热脉冲来加热发射体表面来执行清洁处理,由此在冷场发射器的发射电流已经下降到较低的稳定平均发光值I < S

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