公开(公告)号：US20070158588A1

公开(公告)日：2007-07-12

申请号：US11469728

申请日：2006-09-01

申请人： Fang Zhou ,  Pavel Adamec ,  Jurgen Frosien ,  Jimmy Vishnipolsky

发明人： Fang Zhou ,  Pavel Adamec ,  Jurgen Frosien ,  Jimmy Vishnipolsky

IPC分类号： A61N5/00

CPC分类号： H01J37/073 ,  H01J2237/022 ,  H01J2237/06325

摘要： A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of placing the cold field emitter in a vacuum of a given pressure, the emitter exhibiting a high initial emission current I0 and a lower stable mean emission current IS under a given electric extraction field; applying the given electric extraction field to the emitter for emitting electrons from the emitter surface; performing a cleaning process by applying at least one heating pulse to the cold field emitter for heating the emitter surface, whereby the cleaning process is performed before the emission current of the cold field emitter has declined to the lower stable mean emission value IS; and repeating the cleaning process to keep the emission current of the emitter continuously above the substantially stable emission value IS.

摘要翻译： 提供了一种用于操作带电粒子束发射器件的方法，特别是包括冷场发射器的电子束发射器件。 该方法包括以下步骤：将冷场发射器置于给定压力的真空中，发射体表现出高的初始发射电流I 0和较低的稳定平均发射电流I S， 在给定的电提取场下; 将给定的电提取场施加到发射器以从发射器表面发射电子; 通过对冷场发射器施加至少一个加热脉冲来加热发射体表面来执行清洁处理，由此在冷场发射器的发射电流已经下降到较低的稳定平均发光值I < S

公开(公告)号：US07595490B2

公开(公告)日：2009-09-29

申请号：US11469728

申请日：2006-09-01

申请人： Fang Zhou ,  Pavel Adamec ,  Jürgen Frosien ,  Jimmy Vishnipolsky

发明人： Fang Zhou ,  Pavel Adamec ,  Jürgen Frosien ,  Jimmy Vishnipolsky

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/073 ,  H01J2237/022 ,  H01J2237/06325

摘要： A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of placing the cold field emitter in a vacuum of a given pressure, the emitter exhibiting a high initial emission current I0 and a lower stable mean emission current IS under a given electric extraction field; applying the given electric extraction field to the emitter for emitting electrons from the emitter surface; performing a cleaning process by applying at least one heating pulse to the cold field emitter for heating the emitter surface, whereby the cleaning process is performed before the emission current of the cold field emitter has declined to the lower stable mean emission value IS; and repeating the cleaning process to keep the emission current of the emitter continuously above the substantially stable emission value IS.

摘要翻译： 提供了一种用于操作带电粒子束发射器件的方法，特别是包括冷场发射器的电子束发射器件。 该方法包括以下步骤：将冷场发射器置于给定压力的真空中，发射体在给定的电提取场下表现出高的初始发射电流I0和较低的稳定平均发射电流IS; 将给定的电提取场施加到发射器以从发射器表面发射电子; 通过向冷场发射器施加至少一个加热脉冲来加热发射体表面来执行清洁处理，由此在冷场发射器的发射电流已经下降到较低的稳定平均发射值IS之前进行清洁处理; 并重复清洁处理以将发射极的发射电流连续地保持在基本上稳定的发射值IS上。

公开(公告)号：US07919749B2

公开(公告)日：2011-04-05

申请号：US12234453

申请日：2008-09-19

申请人： Fang Zhou ,  Juergen Frosien ,  Pavel Adamec

发明人： Fang Zhou ,  Juergen Frosien ,  Pavel Adamec

IPC分类号： H01J37/244

CPC分类号： H01J37/05 ,  H01J37/073 ,  H01J37/153 ,  H01J2237/057 ,  H01J2237/06341 ,  H01J2237/1207 ,  H01J2237/1534 ,  H01J2237/28

摘要： An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.

摘要翻译： 描述了一种用于提供能量过滤的一次电子束的电子束装置和方法。 其中，通过电子源产生具有不对称的第一能量分布的一次电子束。 一次电子束是使用延迟透镜进行高通能量滤波。

公开(公告)号：US20070018562A1

公开(公告)日：2007-01-25

申请号：US11489979

申请日：2006-07-20

申请人： Pavel Adamec ,  Fang Zhou

发明人： Pavel Adamec ,  Fang Zhou

IPC分类号： H01J1/02

CPC分类号： H01J37/06 ,  H01J37/02 ,  H01J37/073 ,  H01J49/48 ,  H01J2237/06316

摘要： A field emitter arrangement and a method of cleaning an emitting surface of a field emitter are provided. The field emitter arrangement may include a field emitter tip having an emitting surface, wherein said field emitter tip is adapted to generate a primary beam of charged particles, and at least one electron source adapted to illuminate the emitting surface of the field emitter tip. The method of cleaning the emitting surface may include providing the field emitter having the emitting surface and at least one electron source adapted to illuminate the emitting surface and illuminating the emitting surface of the field emitter with a cleansing electron beam generated by the at least one electron source.

摘要翻译： 提供场发射器布置和清洁场发射器的发射表面的方法。 场发射器配置可以包括具有发射表面的场发射器尖端，其中所述场发射极尖端适于产生带电粒子的主光束，以及适于照射场发射器尖端的发射表面的至少一个电子源。 清洁发射表面的方法可以包括提供具有发射表面的场致发射体和至少一个电子源，其适于照射发射表面并用由至少一个电子产生的清洁电子束照射场发射器的发射表面 资源。

公开(公告)号：US07982179B2

公开(公告)日：2011-07-19

申请号：US12366465

申请日：2009-02-05

申请人： Pavel Adamec ,  Fang Zhou

发明人： Pavel Adamec ,  Fang Zhou

IPC分类号： H01J23/00 ,  G12B13/00

CPC分类号： H01J37/244 ,  H01J37/261 ,  H01J2237/2443 ,  H01J2237/24507 ,  H01J2237/2826

摘要： A charged particle beam device is described. The charged particle beam device includes an emitter adapted for emitting a primary charged particle beam, a specimen location adapted for holding a specimen, from which secondary and/or backscattered charged particles are released on impingement of the primary charged particle beam, a detection unit adapted for detecting the secondary particles and/or secondary particles, and a beam guiding unit adapted for guiding the primary charged particle beam to the detection unit for impingement of a primary charged particle beam on the detection unit.

摘要翻译： 描述带电粒子束装置。 带电粒子束装置包括适于发射初级带电粒子束的发射器，适于保持试样的试样位置，从而从初级带电粒子束的冲击中释放辅助和/或反向散射的带电粒子，检测单元适于 用于检测二次粒子和/或二次粒子的光束引导单元，以及用于将初级带电粒子束引导到检测单元的光束引导单元，用于将一次带电粒子束撞击在检测单元上。

公开(公告)号：US09153413B2

公开(公告)日：2015-10-06

申请号：US12528307

申请日：2008-02-22

申请人： Gilad Almogy ,  Avishai Bartov ,  Juergen Frosien ,  Pavel Adamec ,  Helmut Banzhof

发明人： Gilad Almogy ,  Avishai Bartov ,  Juergen Frosien ,  Pavel Adamec ,  Helmut Banzhof

IPC分类号： G21K7/00 ,  H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28

CPC分类号： H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/1508 ,  H01J2237/2449 ,  H01J2237/2817

摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.

摘要翻译： 描述了多光束扫描电子束装置（100）。 具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130） 用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标 透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号 光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

公开(公告)号：US08878148B2

公开(公告)日：2014-11-04

申请号：US12888978

申请日：2010-09-23

申请人： Pavel Adamec ,  Ivo Li{hacek over (s)}ka ,  Gennadij Gluchman ,  Milan Snabl

发明人： Pavel Adamec ,  Ivo Li{hacek over (s)}ka ,  Gennadij Gluchman ,  Milan Snabl

IPC分类号： G21K5/00 ,  H01J37/06

CPC分类号： H01J37/06 ,  H01J2237/022 ,  H01J2237/06316 ,  H01J2237/06341

摘要： A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.

摘要翻译： 提供了一种通过离子刺激解吸预处理超高真空带电粒子枪室的方法。 该方法包括产生用于提供等离子体离子源的等离子体，以及向枪室中的至少一个表面施加负电位，其中负电位适于将离子通量从等离子体离子源提取到至少一个表面 用于通过撞击在至少一个表面上的离子通量从至少一个表面解吸污染颗粒。

公开(公告)号：US20110163229A1

公开(公告)日：2011-07-07

申请号：US12528306

申请日：2008-02-22

申请人： Juergen Frosien ,  Helmut Banzhof ,  Pavel Adamec

发明人： Juergen Frosien ,  Helmut Banzhof ,  Pavel Adamec

IPC分类号： G01N23/225 ,  G01N23/227 ,  G01N23/22 ,  G01N23/203 ,  H01J1/50

CPC分类号： H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/1508 ,  H01J2237/2449 ,  H01J2237/2817

摘要： A scanning charged particle beam device (100) is described. The scanning charged particle beam device includes a beam emitter (102) for emitting a primary electron beam, a first scan stage for scanning the beam over a specimen, an achromatic beam separator (130) adapted for separating a signal electron beam from the primary electron beam, and a detection unit (172,174,178) for detecting signal electrons.

摘要翻译： 描述扫描带电粒子束装置（100）。 扫描带电粒子束装置包括用于发射一次电子束的射束发射器（102），用于扫描试样上的束的第一扫描级，适于从一次电子分离信号电子束的消色束分离器（130） 以及用于检测信号电子的检测单元（172,174,178）。

公开(公告)号：US07872239B2

公开(公告)日：2011-01-18

申请号：US12181171

申请日：2008-07-28

申请人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

发明人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01R31/305

CPC分类号： H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

摘要翻译： 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

公开(公告)号：US20100320382A1

公开(公告)日：2010-12-23

申请号：US12528307

申请日：2008-02-22

申请人： Gilad Almogy ,  Avishai Bartov ,  Jürgen Frosien ,  Pavel Adamec ,  Helmut Banzhof

发明人： Gilad Almogy ,  Avishai Bartov ,  Jürgen Frosien ,  Pavel Adamec ,  Helmut Banzhof

IPC分类号： G01N23/00 ,  H01J37/147

CPC分类号： H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/1508 ,  H01J2237/2449 ,  H01J2237/2817

摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.

摘要翻译： 描述了多光束扫描电子束装置（100）。 具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130） 用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标 透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号 光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。