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41.
公开(公告)号:US20150001634A1
公开(公告)日:2015-01-01
申请号:US13930611
申请日:2013-06-28
Applicant: Globalfoundries Inc.
Inventor: Jerome Ciavatti , Roderick Miller , Marc Tarabbia
IPC: H01L27/06 , H01L21/8249
CPC classification number: H01L27/0623 , H01L21/8249 , H01L29/0804 , H01L29/735 , H01L29/7851
Abstract: One method disclosed herein includes performing at least one common process operation to form a plurality of first gate structures for each of a plurality of field effect transistors and a plurality of second gate structures above a region where a bipolar transistor will be formed and performing an ion implantation process and a heating process to form a continuous doped emitter region that extends under all of the second gate structures. A device disclosed herein includes a first plurality of field effect transistors with first gate structures, a bipolar transistor that has an emitter region and a plurality of second gate structures positioned above the emitter region, wherein the bipolar transistor comprises a continuous doped emitter region that extends laterally under all of the plurality of second gate structures.